FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2921269604> ?p ?o ?g. }

• W2921269604 endingPage "21" @default.
• W2921269604 startingPage "15" @default.
• W2921269604 abstract "We propose a new route for pattern formation based on atmospheric pressure plasma directed assembly during photoresist removal. Atmospheric plasma etching of AZ5214E resist coated on Silicon leads to the formation of periodic, oxygen-plasma resistant residuals on the underlying substrate. The O2 content in the He/O2 gas feed was found to play significant role on the size and density of the formed structures. Fourier analysis of the spatial morphology of surfaces confirmed quantitatively the approximate periodicity and its dependence on O2 content. XPS analysis revealed the formation of sulfur-containing compounds coming from DNQ molecules of AZ5214E, which organize to etching-resistant molecules due to the synergistic effect of etching and radiation from the radio frequency (RF) discharge. Finally, we applied anisotropic plasma etching based on a pulsed-gas alternating plasma process in low pressure to transfer the atmospheric plasma induced pattern on the underlying Silicon substrate fabricating quasi-ordered Si pillars. The results show the potential of atmospheric plasma directed assembly for uniform, large-area and open-air pattern definition for application in modern nanofabrication." @default.
• W2921269604 created "2019-03-22" @default.
• W2921269604 creator A5018899317 @default.
• W2921269604 creator A5035563268 @default.
• W2921269604 creator A5054650329 @default.
• W2921269604 creator A5058608373 @default.
• W2921269604 creator A5059329421 @default.
• W2921269604 creator A5078451590 @default.
• W2921269604 date "2019-05-01" @default.
• W2921269604 modified "2023-10-11" @default.
• W2921269604 title "Atmospheric pressure plasma directed assembly during photoresist removal: A new route to micro and nano pattern formation" @default.
• W2921269604 cites W1965475311 @default.
• W2921269604 cites W1966049447 @default.
• W2921269604 cites W1966548041 @default.
• W2921269604 cites W1983708828 @default.
• W2921269604 cites W1985453198 @default.
• W2921269604 cites W2013343352 @default.
• W2921269604 cites W2030988435 @default.
• W2921269604 cites W2038845950 @default.
• W2921269604 cites W2040926247 @default.
• W2921269604 cites W2061158555 @default.
• W2921269604 cites W2061637908 @default.
• W2921269604 cites W2089240058 @default.
• W2921269604 cites W2095249450 @default.
• W2921269604 cites W2104212315 @default.
• W2921269604 cites W2113248973 @default.
• W2921269604 cites W2129216969 @default.
• W2921269604 cites W2483079544 @default.
• W2921269604 cites W2559925802 @default.
• W2921269604 cites W2585664286 @default.
• W2921269604 cites W2586296283 @default.
• W2921269604 cites W2624250495 @default.
• W2921269604 cites W2736607047 @default.
• W2921269604 cites W2789778501 @default.
• W2921269604 cites W2795048862 @default.
• W2921269604 cites W3106073536 @default.
• W2921269604 cites W4234109392 @default.
• W2921269604 doi "https://doi.org/10.1016/j.mne.2019.03.001" @default.
• W2921269604 hasPublicationYear "2019" @default.
• W2921269604 type Work @default.
• W2921269604 sameAs 2921269604 @default.
• W2921269604 citedByCount "10" @default.
• W2921269604 countsByYear W29212696042019 @default.
• W2921269604 countsByYear W29212696042020 @default.
• W2921269604 countsByYear W29212696042021 @default.
• W2921269604 countsByYear W29212696042022 @default.
• W2921269604 countsByYear W29212696042023 @default.
• W2921269604 crossrefType "journal-article" @default.
• W2921269604 hasAuthorship W2921269604A5018899317 @default.
• W2921269604 hasAuthorship W2921269604A5035563268 @default.
• W2921269604 hasAuthorship W2921269604A5054650329 @default.
• W2921269604 hasAuthorship W2921269604A5058608373 @default.
• W2921269604 hasAuthorship W2921269604A5059329421 @default.
• W2921269604 hasAuthorship W2921269604A5078451590 @default.
• W2921269604 hasBestOaLocation W29212696041 @default.
• W2921269604 hasConcept C100460472 @default.
• W2921269604 hasConcept C107187091 @default.
• W2921269604 hasConcept C107872376 @default.
• W2921269604 hasConcept C111368507 @default.
• W2921269604 hasConcept C113196181 @default.
• W2921269604 hasConcept C121332964 @default.
• W2921269604 hasConcept C127313418 @default.
• W2921269604 hasConcept C127413603 @default.
• W2921269604 hasConcept C130472188 @default.
• W2921269604 hasConcept C134406635 @default.
• W2921269604 hasConcept C136525101 @default.
• W2921269604 hasConcept C142724271 @default.
• W2921269604 hasConcept C162117346 @default.
• W2921269604 hasConcept C171250308 @default.
• W2921269604 hasConcept C175708663 @default.
• W2921269604 hasConcept C185592680 @default.
• W2921269604 hasConcept C192562407 @default.
• W2921269604 hasConcept C200239111 @default.
• W2921269604 hasConcept C204787440 @default.
• W2921269604 hasConcept C2777289219 @default.
• W2921269604 hasConcept C2779227376 @default.
• W2921269604 hasConcept C42360764 @default.
• W2921269604 hasConcept C49040817 @default.
• W2921269604 hasConcept C544956773 @default.
• W2921269604 hasConcept C62520636 @default.
• W2921269604 hasConcept C71924100 @default.
• W2921269604 hasConcept C82706917 @default.
• W2921269604 hasConcept C85344455 @default.
• W2921269604 hasConceptScore W2921269604C100460472 @default.
• W2921269604 hasConceptScore W2921269604C107187091 @default.
• W2921269604 hasConceptScore W2921269604C107872376 @default.
• W2921269604 hasConceptScore W2921269604C111368507 @default.
• W2921269604 hasConceptScore W2921269604C113196181 @default.
• W2921269604 hasConceptScore W2921269604C121332964 @default.
• W2921269604 hasConceptScore W2921269604C127313418 @default.
• W2921269604 hasConceptScore W2921269604C127413603 @default.
• W2921269604 hasConceptScore W2921269604C130472188 @default.
• W2921269604 hasConceptScore W2921269604C134406635 @default.
• W2921269604 hasConceptScore W2921269604C136525101 @default.
• W2921269604 hasConceptScore W2921269604C142724271 @default.
• W2921269604 hasConceptScore W2921269604C162117346 @default.
• W2921269604 hasConceptScore W2921269604C171250308 @default.
• W2921269604 hasConceptScore W2921269604C175708663 @default.

• next