FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2921360942> ?p ?o ?g. }

• W2921360942 endingPage "8577" @default.
• W2921360942 startingPage "8567" @default.
• W2921360942 abstract "This paper presents linear-fractional-trans-formation (LFT)-structured uncertainty state-space modeling for robust control of the multiple-input multiple-output (MIMO) ultra-precision wafer stage with flexible structures to meet the challenges of vibration-dependent model uncertainties. Specifically, based on the modal MIMO state-space model, a parametric uncertainty model related with flexible modes is presented, and the uncertainty parameters are structured to a diagonal matrix with the LFT method. Meanwhile, a multiplicative uncertainty model is employed to express the uncertainty in high frequency with respect to ignored high-order modes. Thus, the final uncertainty model is structured with uncertainty parameters and high-frequency uncertainty. Based on the proposed uncertainty model, a comprehensive robust control scheme is proposed. Specifically, the weighting function matrixes are designed by the loop-shaping approach, and a $mu$ analysis is employed to achieve a nonconservative solution with respect to the structured uncertainty. A standard stability criterion of a $bf{M} boldsymbol{Delta}$ structure system is then utilized to determine the system stability by the largest structure singular value. Comparative experiments on a developed ultra-precision wafer stage are finally conducted, and the results validate that the proposed method achieves significant improvements on control performance, robustness, and robust stability in all exposure fields." @default.
• W2921360942 created "2019-03-22" @default.
• W2921360942 creator A5034840676 @default.
• W2921360942 creator A5038183876 @default.
• W2921360942 creator A5041969609 @default.
• W2921360942 creator A5053137087 @default.
• W2921360942 creator A5056082865 @default.
• W2921360942 creator A5062005306 @default.
• W2921360942 date "2019-11-01" @default.
• W2921360942 modified "2023-09-24" @default.
• W2921360942 title "LFT-Structured Uncertainty State-Space Modeling for State Feedback Robust Control of the Ultra-Precision Wafer Stage" @default.
• W2921360942 cites W1510866903 @default.
• W2921360942 cites W1964949272 @default.
• W2921360942 cites W1974984002 @default.
• W2921360942 cites W1978206976 @default.
• W2921360942 cites W1981971475 @default.
• W2921360942 cites W2000910171 @default.
• W2921360942 cites W2001575886 @default.
• W2921360942 cites W2011262671 @default.
• W2921360942 cites W2052886083 @default.
• W2921360942 cites W2058209887 @default.
• W2921360942 cites W2085837966 @default.
• W2921360942 cites W2106929622 @default.
• W2921360942 cites W2110127934 @default.
• W2921360942 cites W2116982747 @default.
• W2921360942 cites W2119189211 @default.
• W2921360942 cites W2131417783 @default.
• W2921360942 cites W2135335762 @default.
• W2921360942 cites W2141070096 @default.
• W2921360942 cites W2143844987 @default.
• W2921360942 cites W2145922707 @default.
• W2921360942 cites W2508733693 @default.
• W2921360942 cites W2586907788 @default.
• W2921360942 cites W2787891090 @default.
• W2921360942 cites W2791892332 @default.
• W2921360942 cites W2888221352 @default.
• W2921360942 doi "https://doi.org/10.1109/tie.2019.2903779" @default.
• W2921360942 hasPublicationYear "2019" @default.
• W2921360942 type Work @default.
• W2921360942 sameAs 2921360942 @default.
• W2921360942 citedByCount "5" @default.
• W2921360942 countsByYear W29213609422020 @default.
• W2921360942 countsByYear W29213609422021 @default.
• W2921360942 countsByYear W29213609422022 @default.
• W2921360942 crossrefType "journal-article" @default.
• W2921360942 hasAuthorship W2921360942A5034840676 @default.
• W2921360942 hasAuthorship W2921360942A5038183876 @default.
• W2921360942 hasAuthorship W2921360942A5041969609 @default.
• W2921360942 hasAuthorship W2921360942A5053137087 @default.
• W2921360942 hasAuthorship W2921360942A5056082865 @default.
• W2921360942 hasAuthorship W2921360942A5062005306 @default.
• W2921360942 hasConcept C104317684 @default.
• W2921360942 hasConcept C105795698 @default.
• W2921360942 hasConcept C111919701 @default.
• W2921360942 hasConcept C11413529 @default.
• W2921360942 hasConcept C119599485 @default.
• W2921360942 hasConcept C127413603 @default.
• W2921360942 hasConcept C133731056 @default.
• W2921360942 hasConcept C154945302 @default.
• W2921360942 hasConcept C155386361 @default.
• W2921360942 hasConcept C160671074 @default.
• W2921360942 hasConcept C17500928 @default.
• W2921360942 hasConcept C185592680 @default.
• W2921360942 hasConcept C192562407 @default.
• W2921360942 hasConcept C2775924081 @default.
• W2921360942 hasConcept C3018651601 @default.
• W2921360942 hasConcept C31531917 @default.
• W2921360942 hasConcept C33923547 @default.
• W2921360942 hasConcept C41008148 @default.
• W2921360942 hasConcept C47446073 @default.
• W2921360942 hasConcept C48103436 @default.
• W2921360942 hasConcept C49040817 @default.
• W2921360942 hasConcept C55493867 @default.
• W2921360942 hasConcept C63479239 @default.
• W2921360942 hasConcept C72434380 @default.
• W2921360942 hasConcept C98045186 @default.
• W2921360942 hasConceptScore W2921360942C104317684 @default.
• W2921360942 hasConceptScore W2921360942C105795698 @default.
• W2921360942 hasConceptScore W2921360942C111919701 @default.
• W2921360942 hasConceptScore W2921360942C11413529 @default.
• W2921360942 hasConceptScore W2921360942C119599485 @default.
• W2921360942 hasConceptScore W2921360942C127413603 @default.
• W2921360942 hasConceptScore W2921360942C133731056 @default.
• W2921360942 hasConceptScore W2921360942C154945302 @default.
• W2921360942 hasConceptScore W2921360942C155386361 @default.
• W2921360942 hasConceptScore W2921360942C160671074 @default.
• W2921360942 hasConceptScore W2921360942C17500928 @default.
• W2921360942 hasConceptScore W2921360942C185592680 @default.
• W2921360942 hasConceptScore W2921360942C192562407 @default.
• W2921360942 hasConceptScore W2921360942C2775924081 @default.
• W2921360942 hasConceptScore W2921360942C3018651601 @default.
• W2921360942 hasConceptScore W2921360942C31531917 @default.
• W2921360942 hasConceptScore W2921360942C33923547 @default.
• W2921360942 hasConceptScore W2921360942C41008148 @default.
• W2921360942 hasConceptScore W2921360942C47446073 @default.
• W2921360942 hasConceptScore W2921360942C48103436 @default.
• W2921360942 hasConceptScore W2921360942C49040817 @default.
• W2921360942 hasConceptScore W2921360942C55493867 @default.

• next