FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2922187519> ?p ?o ?g. }

• W2922187519 endingPage "182" @default.
• W2922187519 startingPage "171" @default.
• W2922187519 abstract "A wafer map contains a graphical representation of the locations about defect pattern on the semiconductor wafer, which can provide useful information for quality engineers. Various defect patterns occur due to increasing wafer sizes and decreasing features sizes, which makes it very complex and unreliable process to identify them. In this paper, we propose a voting ensemble classifier with multi-types features to identify wafer map defect patterns in semiconductor manufacturing. Our research contents can be summarized as follows. First, three distinctive features such as density-, geometry-, and radon-based features were extracted from raw wafer images. Then, we applied four machine learning classifiers, namely logistic regression (LR), random forests (RFs), gradient boosting machine (GBM), and artificial neural network (ANN), and trained them using extracted features of original data set. Then their results were combined with a soft voting ensemble (SVE) technique which assigns higher weights to the classifiers with respect to their prediction accuracy. Consequently, we got performance measures with accuracy, precision, recall, ${F}$ -measure, and AUC score of 95.8616%, 96.9326%, 96.9326%, 96.7124%, and 99.9114%, respectively. These results show that the SVE classifier with proposed multi-types features outperformed regular machine learning-based classifiers for wafer maps defect detection." @default.
• W2922187519 created "2019-03-22" @default.
• W2922187519 creator A5049471995 @default.
• W2922187519 creator A5057307965 @default.
• W2922187519 creator A5064951615 @default.
• W2922187519 date "2019-05-01" @default.
• W2922187519 modified "2023-10-04" @default.
• W2922187519 title "A Voting Ensemble Classifier for Wafer Map Defect Patterns Identification in Semiconductor Manufacturing" @default.
• W2922187519 cites W13338109 @default.
• W2922187519 cites W1590083702 @default.
• W2922187519 cites W1678356000 @default.
• W2922187519 cites W1975617480 @default.
• W2922187519 cites W1988790447 @default.
• W2922187519 cites W2016648380 @default.
• W2922187519 cites W2020286945 @default.
• W2922187519 cites W2025653905 @default.
• W2922187519 cites W2032099903 @default.
• W2922187519 cites W2034243637 @default.
• W2922187519 cites W2035969035 @default.
• W2922187519 cites W2036821116 @default.
• W2922187519 cites W2044855549 @default.
• W2922187519 cites W2048106119 @default.
• W2922187519 cites W2066956616 @default.
• W2922187519 cites W2070415427 @default.
• W2922187519 cites W2070674634 @default.
• W2922187519 cites W2093825590 @default.
• W2922187519 cites W2095649738 @default.
• W2922187519 cites W2104441235 @default.
• W2922187519 cites W2104550562 @default.
• W2922187519 cites W2120196566 @default.
• W2922187519 cites W2131658761 @default.
• W2922187519 cites W2137559939 @default.
• W2922187519 cites W2154231986 @default.
• W2922187519 cites W2167917621 @default.
• W2922187519 cites W2286515324 @default.
• W2922187519 cites W2487770199 @default.
• W2922187519 cites W2498672755 @default.
• W2922187519 cites W2790607928 @default.
• W2922187519 cites W2792944472 @default.
• W2922187519 cites W2805484002 @default.
• W2922187519 cites W28412257 @default.
• W2922187519 cites W2911964244 @default.
• W2922187519 cites W3004732066 @default.
• W2922187519 cites W4212883601 @default.
• W2922187519 doi "https://doi.org/10.1109/tsm.2019.2904306" @default.
• W2922187519 hasPublicationYear "2019" @default.
• W2922187519 type Work @default.
• W2922187519 sameAs 2922187519 @default.
• W2922187519 citedByCount "121" @default.
• W2922187519 countsByYear W29221875192019 @default.
• W2922187519 countsByYear W29221875192020 @default.
• W2922187519 countsByYear W29221875192021 @default.
• W2922187519 countsByYear W29221875192022 @default.
• W2922187519 countsByYear W29221875192023 @default.
• W2922187519 crossrefType "journal-article" @default.
• W2922187519 hasAuthorship W2922187519A5049471995 @default.
• W2922187519 hasAuthorship W2922187519A5057307965 @default.
• W2922187519 hasAuthorship W2922187519A5064951615 @default.
• W2922187519 hasConcept C106135958 @default.
• W2922187519 hasConcept C119599485 @default.
• W2922187519 hasConcept C119857082 @default.
• W2922187519 hasConcept C124101348 @default.
• W2922187519 hasConcept C127413603 @default.
• W2922187519 hasConcept C153180895 @default.
• W2922187519 hasConcept C154945302 @default.
• W2922187519 hasConcept C160671074 @default.
• W2922187519 hasConcept C169258074 @default.
• W2922187519 hasConcept C41008148 @default.
• W2922187519 hasConcept C45942800 @default.
• W2922187519 hasConcept C46686674 @default.
• W2922187519 hasConcept C50644808 @default.
• W2922187519 hasConcept C66018809 @default.
• W2922187519 hasConcept C70153297 @default.
• W2922187519 hasConcept C95623464 @default.
• W2922187519 hasConceptScore W2922187519C106135958 @default.
• W2922187519 hasConceptScore W2922187519C119599485 @default.
• W2922187519 hasConceptScore W2922187519C119857082 @default.
• W2922187519 hasConceptScore W2922187519C124101348 @default.
• W2922187519 hasConceptScore W2922187519C127413603 @default.
• W2922187519 hasConceptScore W2922187519C153180895 @default.
• W2922187519 hasConceptScore W2922187519C154945302 @default.
• W2922187519 hasConceptScore W2922187519C160671074 @default.
• W2922187519 hasConceptScore W2922187519C169258074 @default.
• W2922187519 hasConceptScore W2922187519C41008148 @default.
• W2922187519 hasConceptScore W2922187519C45942800 @default.
• W2922187519 hasConceptScore W2922187519C46686674 @default.
• W2922187519 hasConceptScore W2922187519C50644808 @default.
• W2922187519 hasConceptScore W2922187519C66018809 @default.
• W2922187519 hasConceptScore W2922187519C70153297 @default.
• W2922187519 hasConceptScore W2922187519C95623464 @default.
• W2922187519 hasFunder F4320311687 @default.
• W2922187519 hasFunder F4320321203 @default.
• W2922187519 hasFunder F4320322064 @default.
• W2922187519 hasFunder F4320322120 @default.
• W2922187519 hasIssue "2" @default.
• W2922187519 hasLocation W29221875191 @default.
• W2922187519 hasOpenAccess W2922187519 @default.
• W2922187519 hasPrimaryLocation W29221875191 @default.

• next