Matches in SemOpenAlex for { <https://semopenalex.org/work/W2922202557> ?p ?o ?g. }
- W2922202557 endingPage "6" @default.
- W2922202557 startingPage "1" @default.
- W2922202557 abstract "An important figure of merit in microwave superconducting quantum interference device multiplexer (MW-MUX) is the quality factor of superconducting resonators. In advanced industrial science and technology (AIST), the intrinsic quality factor Qi of the resonators in the MW-MUX chips degraded significantly compared to those in the resonator-only chips owing to something during the fabrication process. In this study, we have investigated the damage process by conducting controlled experiments and an SEM-EDX analysis. As a result, we have confirmed that the metallic layers (Pd and Nb) were not removed completely and remained along the edge of the resonator, which resulted in the degradation of Qi. Further, we have invented a new process to overcome this imperfection during the removal of Pd layer using so called “caldera planarization”. The metal line that remained along the edge was not observed in the MW-MUX chips fabricated using this improved process. Finally, we have achieved Qi as high as that of resonator-only chips using the improved process." @default.
- W2922202557 created "2019-03-22" @default.
- W2922202557 creator A5006124868 @default.
- W2922202557 creator A5008141743 @default.
- W2922202557 creator A5018879082 @default.
- W2922202557 creator A5019417876 @default.
- W2922202557 creator A5028740407 @default.
- W2922202557 creator A5029935378 @default.
- W2922202557 creator A5030268692 @default.
- W2922202557 creator A5037158833 @default.
- W2922202557 creator A5049219928 @default.
- W2922202557 creator A5056645748 @default.
- W2922202557 creator A5068546620 @default.
- W2922202557 creator A5087915058 @default.
- W2922202557 date "2019-08-01" @default.
- W2922202557 modified "2023-10-16" @default.
- W2922202557 title "Degradation of Quality Factor of Superconducting Resonators by Remaining Metallic Film and Improved Fabrication Process Using Caldera Planarization" @default.
- W2922202557 cites W1580987494 @default.
- W2922202557 cites W1835472223 @default.
- W2922202557 cites W1982244026 @default.
- W2922202557 cites W2029500834 @default.
- W2922202557 cites W2033720109 @default.
- W2922202557 cites W2051645232 @default.
- W2922202557 cites W2054175409 @default.
- W2922202557 cites W2056893414 @default.
- W2922202557 cites W2064017177 @default.
- W2922202557 cites W2064736034 @default.
- W2922202557 cites W2074657551 @default.
- W2922202557 cites W2078676308 @default.
- W2922202557 cites W2141460602 @default.
- W2922202557 cites W2560482070 @default.
- W2922202557 cites W2568369257 @default.
- W2922202557 cites W2614810335 @default.
- W2922202557 cites W2792096580 @default.
- W2922202557 cites W2887416527 @default.
- W2922202557 cites W3104574605 @default.
- W2922202557 cites W3122512836 @default.
- W2922202557 doi "https://doi.org/10.1109/tasc.2019.2905144" @default.
- W2922202557 hasPublicationYear "2019" @default.
- W2922202557 type Work @default.
- W2922202557 sameAs 2922202557 @default.
- W2922202557 citedByCount "0" @default.
- W2922202557 crossrefType "journal-article" @default.
- W2922202557 hasAuthorship W2922202557A5006124868 @default.
- W2922202557 hasAuthorship W2922202557A5008141743 @default.
- W2922202557 hasAuthorship W2922202557A5018879082 @default.
- W2922202557 hasAuthorship W2922202557A5019417876 @default.
- W2922202557 hasAuthorship W2922202557A5028740407 @default.
- W2922202557 hasAuthorship W2922202557A5029935378 @default.
- W2922202557 hasAuthorship W2922202557A5030268692 @default.
- W2922202557 hasAuthorship W2922202557A5037158833 @default.
- W2922202557 hasAuthorship W2922202557A5049219928 @default.
- W2922202557 hasAuthorship W2922202557A5056645748 @default.
- W2922202557 hasAuthorship W2922202557A5068546620 @default.
- W2922202557 hasAuthorship W2922202557A5087915058 @default.
- W2922202557 hasConcept C119599485 @default.
- W2922202557 hasConcept C121332964 @default.
- W2922202557 hasConcept C127413603 @default.
- W2922202557 hasConcept C136525101 @default.
- W2922202557 hasConcept C142724271 @default.
- W2922202557 hasConcept C159985019 @default.
- W2922202557 hasConcept C180088628 @default.
- W2922202557 hasConcept C187725362 @default.
- W2922202557 hasConcept C192562407 @default.
- W2922202557 hasConcept C19275194 @default.
- W2922202557 hasConcept C204787440 @default.
- W2922202557 hasConcept C2779227376 @default.
- W2922202557 hasConcept C49040817 @default.
- W2922202557 hasConcept C54101563 @default.
- W2922202557 hasConcept C62520636 @default.
- W2922202557 hasConcept C70970002 @default.
- W2922202557 hasConcept C71924100 @default.
- W2922202557 hasConcept C97126364 @default.
- W2922202557 hasConceptScore W2922202557C119599485 @default.
- W2922202557 hasConceptScore W2922202557C121332964 @default.
- W2922202557 hasConceptScore W2922202557C127413603 @default.
- W2922202557 hasConceptScore W2922202557C136525101 @default.
- W2922202557 hasConceptScore W2922202557C142724271 @default.
- W2922202557 hasConceptScore W2922202557C159985019 @default.
- W2922202557 hasConceptScore W2922202557C180088628 @default.
- W2922202557 hasConceptScore W2922202557C187725362 @default.
- W2922202557 hasConceptScore W2922202557C192562407 @default.
- W2922202557 hasConceptScore W2922202557C19275194 @default.
- W2922202557 hasConceptScore W2922202557C204787440 @default.
- W2922202557 hasConceptScore W2922202557C2779227376 @default.
- W2922202557 hasConceptScore W2922202557C49040817 @default.
- W2922202557 hasConceptScore W2922202557C54101563 @default.
- W2922202557 hasConceptScore W2922202557C62520636 @default.
- W2922202557 hasConceptScore W2922202557C70970002 @default.
- W2922202557 hasConceptScore W2922202557C71924100 @default.
- W2922202557 hasConceptScore W2922202557C97126364 @default.
- W2922202557 hasFunder F4320320912 @default.
- W2922202557 hasFunder F4320334789 @default.
- W2922202557 hasIssue "5" @default.
- W2922202557 hasLocation W29222025571 @default.
- W2922202557 hasOpenAccess W2922202557 @default.
- W2922202557 hasPrimaryLocation W29222025571 @default.
- W2922202557 hasRelatedWork W2016425794 @default.