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• W2922697100 abstract "Metasurfaces with complex periodic nanoarrays have attracted a large amount of attention over the past decades due to their pronounced plasmonic and photonic properties. Though various metasurface properties have been theoretically and experimentally investigated, the realization of practical metasurface applications remains a big challenge due to very limited large-area complex nanostructure fabrication. In this paper, we demonstrate a parallel direct writing achromatic Talbot lithography (DW-ATL) technique for large-area arbitrary sub-micron periodic nano-arrays fabrication. By using a laser interferometer, the sparse hole/dot arrays obtained by ATL could be stitched precisely between discrete multiple exposures. Complex sub-micron periodic nanoarrays, such as elliptical discs, rods, L-shaped and Y-shaped periodic nanoarrays, with a sub-hundred nm resolution were fabricated over an area of ∼mm2." @default.
• W2922697100 created "2019-04-01" @default.
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• W2922697100 date "2019-05-07" @default.
• W2922697100 modified "2023-10-16" @default.
• W2922697100 title "Parallel direct writing achromatic talbot lithography: a method for large-area arbitrary sub-micron periodic nano-arrays fabrication" @default.
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• W2922697100 doi "https://doi.org/10.1088/1361-6528/ab1108" @default.
• W2922697100 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/30889553" @default.
• W2922697100 hasPublicationYear "2019" @default.
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