Matches in SemOpenAlex for { <https://semopenalex.org/work/W2922806964> ?p ?o ?g. }
Showing items 1 to 81 of
81
with 100 items per page.
- W2922806964 abstract "Machine learning (ML) techniques have been applied for quick optical proximity correction (OPC) processing. A key limitation of previous ML-OPC approaches lies in the fact that a layout segment is corrected while the correction result for other segments is not reflected yet. Bidirectional recurrent neural network (BRNN) model is adopted in this paper to alleviate this problem. BRNN consists of multiple neural network instances, which are serially linked through hidden layer connections in both forward- and backward-directions. Each instance corresponds to one layout segment, so BRNN processing corrects a group of nearby segments together. Two key problems are identified and addressed: mapping between layout segments and neural network instances, and network input features. In experiments, BRNN-OPC achieves 3.9nm average EPE for test M1 layout, which can be compared to 6.7nm average EPE from state-of-the-art ML-OPC method." @default.
- W2922806964 created "2019-04-01" @default.
- W2922806964 creator A5001343991 @default.
- W2922806964 creator A5014796830 @default.
- W2922806964 creator A5020011072 @default.
- W2922806964 date "2019-03-20" @default.
- W2922806964 modified "2023-09-28" @default.
- W2922806964 title "Optical proximity correction using bidirectional recurrent neural network (BRNN)" @default.
- W2922806964 cites W2032573787 @default.
- W2922806964 cites W2043406489 @default.
- W2922806964 cites W2103308273 @default.
- W2922806964 cites W2131774270 @default.
- W2922806964 cites W2146918190 @default.
- W2922806964 cites W2795908090 @default.
- W2922806964 cites W2809465272 @default.
- W2922806964 doi "https://doi.org/10.1117/12.2515159" @default.
- W2922806964 hasPublicationYear "2019" @default.
- W2922806964 type Work @default.
- W2922806964 sameAs 2922806964 @default.
- W2922806964 citedByCount "3" @default.
- W2922806964 countsByYear W29228069642021 @default.
- W2922806964 countsByYear W29228069642022 @default.
- W2922806964 crossrefType "proceedings-article" @default.
- W2922806964 hasAuthorship W2922806964A5001343991 @default.
- W2922806964 hasAuthorship W2922806964A5014796830 @default.
- W2922806964 hasAuthorship W2922806964A5020011072 @default.
- W2922806964 hasConcept C111919701 @default.
- W2922806964 hasConcept C11413529 @default.
- W2922806964 hasConcept C147168706 @default.
- W2922806964 hasConcept C153180895 @default.
- W2922806964 hasConcept C154945302 @default.
- W2922806964 hasConcept C178790620 @default.
- W2922806964 hasConcept C185592680 @default.
- W2922806964 hasConcept C26517878 @default.
- W2922806964 hasConcept C2779227376 @default.
- W2922806964 hasConcept C38652104 @default.
- W2922806964 hasConcept C41008148 @default.
- W2922806964 hasConcept C50644808 @default.
- W2922806964 hasConcept C78371743 @default.
- W2922806964 hasConcept C98045186 @default.
- W2922806964 hasConceptScore W2922806964C111919701 @default.
- W2922806964 hasConceptScore W2922806964C11413529 @default.
- W2922806964 hasConceptScore W2922806964C147168706 @default.
- W2922806964 hasConceptScore W2922806964C153180895 @default.
- W2922806964 hasConceptScore W2922806964C154945302 @default.
- W2922806964 hasConceptScore W2922806964C178790620 @default.
- W2922806964 hasConceptScore W2922806964C185592680 @default.
- W2922806964 hasConceptScore W2922806964C26517878 @default.
- W2922806964 hasConceptScore W2922806964C2779227376 @default.
- W2922806964 hasConceptScore W2922806964C38652104 @default.
- W2922806964 hasConceptScore W2922806964C41008148 @default.
- W2922806964 hasConceptScore W2922806964C50644808 @default.
- W2922806964 hasConceptScore W2922806964C78371743 @default.
- W2922806964 hasConceptScore W2922806964C98045186 @default.
- W2922806964 hasLocation W29228069641 @default.
- W2922806964 hasOpenAccess W2922806964 @default.
- W2922806964 hasPrimaryLocation W29228069641 @default.
- W2922806964 hasRelatedWork W1500096254 @default.
- W2922806964 hasRelatedWork W1665872203 @default.
- W2922806964 hasRelatedWork W1991745880 @default.
- W2922806964 hasRelatedWork W2021783659 @default.
- W2922806964 hasRelatedWork W208014707 @default.
- W2922806964 hasRelatedWork W2134249401 @default.
- W2922806964 hasRelatedWork W2189585484 @default.
- W2922806964 hasRelatedWork W2374830240 @default.
- W2922806964 hasRelatedWork W168624313 @default.
- W2922806964 hasRelatedWork W2185467021 @default.
- W2922806964 hasRelatedWork W2839735101 @default.
- W2922806964 hasRelatedWork W2843202520 @default.
- W2922806964 hasRelatedWork W2935295783 @default.
- W2922806964 hasRelatedWork W2957156564 @default.
- W2922806964 hasRelatedWork W2957162600 @default.
- W2922806964 hasRelatedWork W2991750714 @default.
- W2922806964 hasRelatedWork W3018548804 @default.
- W2922806964 hasRelatedWork W3040534940 @default.
- W2922806964 hasRelatedWork W3062106199 @default.
- W2922806964 hasRelatedWork W3091263758 @default.
- W2922806964 isParatext "false" @default.
- W2922806964 isRetracted "false" @default.
- W2922806964 magId "2922806964" @default.
- W2922806964 workType "article" @default.