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• W2925854617 abstract "In the present work efforts have been made to develop microheater integrated gas sensors with low power consumption. The design and simulation of a single-cell microheater is carried out using ANSYS. Low power consumption (<35 mW) platinum micro-heater has been fabricated using bulk micromachining technique on silicon dioxide membrane (1.5 μm thin), which provided improved thermal isolation of the active area of 250 × 250 μm2. The micro-heater has achieved a maximum temperature of ∼950 °C at an applied dc voltage of 2.5 V. Fabricated mircro-heater has been integrated with SnO2 based gas sensors for the efficient detection of H2 and NO2 gases. The developed sensors were found to yield the maximum sensing response of ∼184 and ∼2.1 with low power consumption of 29.18 and 34.53 mW towards the detection of 1 ppm of NO2 gas and 500 ppm of H2 gas, respectively." @default.
• W2925854617 created "2019-04-11" @default.
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• W2925854617 date "2018-10-13" @default.
• W2925854617 modified "2023-10-14" @default.
• W2925854617 title "MEMS-based microheaters integrated gas sensors" @default.
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• W2925854617 doi "https://doi.org/10.1080/10584587.2018.1514877" @default.
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