Matches in SemOpenAlex for { <https://semopenalex.org/work/W2927422892> ?p ?o ?g. }
- W2927422892 endingPage "2074" @default.
- W2927422892 startingPage "2068" @default.
- W2927422892 abstract "Strained silicon-on-insulator (SSOI) is a promising platform for 5G, which will require both high-performance and low-power complementary metal-oxide- semiconductor (CMOS) devices. Hence, it is important to understand the behavior of strain in SSOI at deeply scaled dimensions. We thus present a simulation study of SSOI technology, where the strain profiles of “fins” with different dimensions and layer thicknesses are analyzed. We discover, for the first time, that a buried oxide (BOX) as thin as 10-15 nm is able to effectively memorize the strain. It is also able to retain the strain under annealing up to 1000 °C, a result verified by the Raman measurements. Such a thin BOX enables a good back-gate control for dynamic threshold voltage (Vt) tuning of SSOI transistors. The ability to have a good performance enhancement (from strain), and dynamic Vt tunability (from thin BOX) makes SSOI favorable for 5G mixed-signal applications." @default.
- W2927422892 created "2019-04-11" @default.
- W2927422892 creator A5011567907 @default.
- W2927422892 creator A5013111648 @default.
- W2927422892 creator A5014399843 @default.
- W2927422892 creator A5014960472 @default.
- W2927422892 creator A5022168259 @default.
- W2927422892 creator A5026115376 @default.
- W2927422892 creator A5049887447 @default.
- W2927422892 creator A5061938708 @default.
- W2927422892 creator A5063188500 @default.
- W2927422892 creator A5065345119 @default.
- W2927422892 creator A5071367521 @default.
- W2927422892 creator A5083523827 @default.
- W2927422892 creator A5079218074 @default.
- W2927422892 date "2019-05-01" @default.
- W2927422892 modified "2023-09-26" @default.
- W2927422892 title "Highly Scaled Strained Silicon-On-Insulator Technology for the 5G Era: Impact of Geometry and Annealing on Strain Retention and Device Performance of nMOSFETs" @default.
- W2927422892 cites W1512402821 @default.
- W2927422892 cites W1523476363 @default.
- W2927422892 cites W1963943924 @default.
- W2927422892 cites W1967083796 @default.
- W2927422892 cites W1967619401 @default.
- W2927422892 cites W1968207191 @default.
- W2927422892 cites W1982139584 @default.
- W2927422892 cites W1996787970 @default.
- W2927422892 cites W2009036300 @default.
- W2927422892 cites W2014761329 @default.
- W2927422892 cites W2017435217 @default.
- W2927422892 cites W2035492164 @default.
- W2927422892 cites W2040559176 @default.
- W2927422892 cites W2041753269 @default.
- W2927422892 cites W2047875260 @default.
- W2927422892 cites W2051532337 @default.
- W2927422892 cites W2061007109 @default.
- W2927422892 cites W2061836093 @default.
- W2927422892 cites W2070121658 @default.
- W2927422892 cites W2097655600 @default.
- W2927422892 cites W2122613004 @default.
- W2927422892 cites W2127276031 @default.
- W2927422892 cites W2131964402 @default.
- W2927422892 cites W2131991976 @default.
- W2927422892 cites W2132170989 @default.
- W2927422892 cites W2135818056 @default.
- W2927422892 cites W2146213338 @default.
- W2927422892 cites W2146739410 @default.
- W2927422892 cites W2149675154 @default.
- W2927422892 cites W2150989092 @default.
- W2927422892 cites W2158692165 @default.
- W2927422892 cites W2163637740 @default.
- W2927422892 cites W2164140967 @default.
- W2927422892 cites W2168443337 @default.
- W2927422892 cites W2291984582 @default.
- W2927422892 cites W2328159675 @default.
- W2927422892 cites W2398919947 @default.
- W2927422892 cites W2545663115 @default.
- W2927422892 cites W2546541429 @default.
- W2927422892 cites W2765860079 @default.
- W2927422892 cites W846121663 @default.
- W2927422892 doi "https://doi.org/10.1109/ted.2019.2904313" @default.
- W2927422892 hasPublicationYear "2019" @default.
- W2927422892 type Work @default.
- W2927422892 sameAs 2927422892 @default.
- W2927422892 citedByCount "4" @default.
- W2927422892 countsByYear W29274228922020 @default.
- W2927422892 countsByYear W29274228922021 @default.
- W2927422892 countsByYear W29274228922023 @default.
- W2927422892 crossrefType "journal-article" @default.
- W2927422892 hasAuthorship W2927422892A5011567907 @default.
- W2927422892 hasAuthorship W2927422892A5013111648 @default.
- W2927422892 hasAuthorship W2927422892A5014399843 @default.
- W2927422892 hasAuthorship W2927422892A5014960472 @default.
- W2927422892 hasAuthorship W2927422892A5022168259 @default.
- W2927422892 hasAuthorship W2927422892A5026115376 @default.
- W2927422892 hasAuthorship W2927422892A5049887447 @default.
- W2927422892 hasAuthorship W2927422892A5061938708 @default.
- W2927422892 hasAuthorship W2927422892A5063188500 @default.
- W2927422892 hasAuthorship W2927422892A5065345119 @default.
- W2927422892 hasAuthorship W2927422892A5071367521 @default.
- W2927422892 hasAuthorship W2927422892A5079218074 @default.
- W2927422892 hasAuthorship W2927422892A5083523827 @default.
- W2927422892 hasConcept C119599485 @default.
- W2927422892 hasConcept C120665830 @default.
- W2927422892 hasConcept C121332964 @default.
- W2927422892 hasConcept C127413603 @default.
- W2927422892 hasConcept C159985019 @default.
- W2927422892 hasConcept C165801399 @default.
- W2927422892 hasConcept C172385210 @default.
- W2927422892 hasConcept C192245399 @default.
- W2927422892 hasConcept C192562407 @default.
- W2927422892 hasConcept C24326235 @default.
- W2927422892 hasConcept C2776390347 @default.
- W2927422892 hasConcept C2777855556 @default.
- W2927422892 hasConcept C2778413303 @default.
- W2927422892 hasConcept C2779667780 @default.
- W2927422892 hasConcept C40003534 @default.
- W2927422892 hasConcept C46362747 @default.
- W2927422892 hasConcept C49040817 @default.