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• W2931179902 abstract "This article describes the atomic layer deposition (ALD) of nickel nitride and nickel thin films using a diamine adduct of Ni(II) chloride, NiCl 2 (TMPDA) (TMPDA = N,N,N′,N′, ‐tetramethyl‐1,3‐propanediamine), as the metal precursor. Owing to the high reducing power of tert‐butylhydrazine (TBH), the films are grown at low temperatures of 190–250 °C. This is one of the few low‐temperature ALD processes that can be used to grow Ni 3 N and Ni metal on both insulating and conductive substrates. The films are characterized in terms of crystallinity, morphology, composition, resistivity, and coercivity. X‐ray diffraction shows reflections compatible with either hexagonal Ni or Ni 3 N. Composition analyses suggest that the films are close to stoichiometric Ni 3 N. Despite the nitride component, the films exhibit low resistivity values and at the lowest, a resistivity of 37 μΩ cm is achieved. The result is lower than what is typically observed for Ni x N films and not much higher than the best results concerning ALD Ni metal. The nitrogen content of the films is lowered down to 1.2 at% by postdeposition reduction at 150 °C in 10% forming gas. After the reduction, the nonmagnetic nitride films are converted to ferromagnetic Ni metal." @default.
• W2931179902 created "2019-04-11" @default.
• W2931179902 creator A5031045822 @default.
• W2931179902 creator A5031444654 @default.
• W2931179902 creator A5038649954 @default.
• W2931179902 creator A5052591354 @default.
• W2931179902 creator A5062789504 @default.
• W2931179902 creator A5067880144 @default.
• W2931179902 creator A5079543961 @default.
• W2931179902 creator A5081018621 @default.
• W2931179902 creator A5083082970 @default.
• W2931179902 creator A5085936111 @default.
• W2931179902 date "2019-04-01" @default.
• W2931179902 modified "2023-09-26" @default.
• W2931179902 title "Atomic Layer Deposition of Nickel Nitride Thin Films using NiCl ₂ (TMPDA) and Tert‐Butylhydrazine as Precursors" @default.
• W2931179902 cites W1875951937 @default.
• W2931179902 cites W1965324845 @default.
• W2931179902 cites W1966417390 @default.
• W2931179902 cites W1966846834 @default.
• W2931179902 cites W1976897250 @default.
• W2931179902 cites W1982442231 @default.
• W2931179902 cites W1984871324 @default.
• W2931179902 cites W1991889436 @default.
• W2931179902 cites W1993917137 @default.
• W2931179902 cites W1994276677 @default.
• W2931179902 cites W1998883481 @default.
• W2931179902 cites W2001418025 @default.
• W2931179902 cites W2004485595 @default.
• W2931179902 cites W2006899770 @default.
• W2931179902 cites W2019401773 @default.
• W2931179902 cites W2021734425 @default.
• W2931179902 cites W2025172217 @default.
• W2931179902 cites W2031082492 @default.
• W2931179902 cites W2035799710 @default.
• W2931179902 cites W2036713366 @default.
• W2931179902 cites W2050954740 @default.
• W2931179902 cites W2053000681 @default.
• W2931179902 cites W2055805112 @default.
• W2931179902 cites W2056272747 @default.
• W2931179902 cites W2063640721 @default.
• W2931179902 cites W2065426390 @default.
• W2931179902 cites W2066863079 @default.
• W2931179902 cites W2070053091 @default.
• W2931179902 cites W2071006714 @default.
• W2931179902 cites W2080739458 @default.
• W2931179902 cites W2088826193 @default.
• W2931179902 cites W2089819583 @default.
• W2931179902 cites W2090768871 @default.
• W2931179902 cites W2124126967 @default.
• W2931179902 cites W2139438072 @default.
• W2931179902 cites W2155365079 @default.
• W2931179902 cites W2158932701 @default.
• W2931179902 cites W2281209855 @default.
• W2931179902 cites W2315047087 @default.
• W2931179902 cites W2327013367 @default.
• W2931179902 cites W2332212930 @default.
• W2931179902 cites W2546107878 @default.
• W2931179902 cites W2560682321 @default.
• W2931179902 cites W2578642625 @default.
• W2931179902 cites W2589635806 @default.
• W2931179902 cites W2726918412 @default.
• W2931179902 cites W2735630426 @default.
• W2931179902 cites W2775477573 @default.
• W2931179902 cites W2780145074 @default.
• W2931179902 cites W2797026137 @default.
• W2931179902 cites W2803099510 @default.
• W2931179902 cites W2808760842 @default.
• W2931179902 cites W3105947284 @default.
• W2931179902 doi "https://doi.org/10.1002/pssa.201900058" @default.
• W2931179902 hasPublicationYear "2019" @default.
• W2931179902 type Work @default.
• W2931179902 sameAs 2931179902 @default.
• W2931179902 citedByCount "5" @default.
• W2931179902 countsByYear W29311799022019 @default.
• W2931179902 countsByYear W29311799022020 @default.
• W2931179902 countsByYear W29311799022021 @default.
• W2931179902 countsByYear W29311799022022 @default.
• W2931179902 crossrefType "journal-article" @default.
• W2931179902 hasAuthorship W2931179902A5031045822 @default.
• W2931179902 hasAuthorship W2931179902A5031444654 @default.
• W2931179902 hasAuthorship W2931179902A5038649954 @default.
• W2931179902 hasAuthorship W2931179902A5052591354 @default.
• W2931179902 hasAuthorship W2931179902A5062789504 @default.
• W2931179902 hasAuthorship W2931179902A5067880144 @default.
• W2931179902 hasAuthorship W2931179902A5079543961 @default.
• W2931179902 hasAuthorship W2931179902A5081018621 @default.
• W2931179902 hasAuthorship W2931179902A5083082970 @default.
• W2931179902 hasAuthorship W2931179902A5085936111 @default.
• W2931179902 hasBestOaLocation W29311799022 @default.
• W2931179902 hasConcept C113196181 @default.
• W2931179902 hasConcept C119599485 @default.
• W2931179902 hasConcept C127413603 @default.
• W2931179902 hasConcept C144082473 @default.
• W2931179902 hasConcept C147789679 @default.
• W2931179902 hasConcept C159985019 @default.
• W2931179902 hasConcept C171250308 @default.
• W2931179902 hasConcept C178790620 @default.
• W2931179902 hasConcept C179104552 @default.
• W2931179902 hasConcept C185592680 @default.
• W2931179902 hasConcept C19067145 @default.

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