Matches in SemOpenAlex for { <https://semopenalex.org/work/W2933846840> ?p ?o ?g. }
Showing items 1 to 81 of
81
with 100 items per page.
- W2933846840 endingPage "162" @default.
- W2933846840 startingPage "157" @default.
- W2933846840 abstract "To characterize the effect of deformation of die-bonding packages on the performance of MEMS devices,a laser scanning vibrometer was used,based on the theory of vibration analysis and signal processing.Because it is a commonly used structure in MEMS design,a surface micromachined polysilicon fixed-fixed beam was chosen.Its resonant frequencies from the 1st to the 3rd order were recorded before and after die bonding and compared to FEM simulations.The results suggest that the thermo-mechanical coupling deformation in the multilayer packaging structure affects the performance of MEMS device remarkably,and the resonant frequencies shift of the beam are more than 15%~30%.Therefore,it is possible to include the package effect in the primary design circle of MEMS devices,which may enhance the device performance and shorten the primary design cycle." @default.
- W2933846840 created "2019-04-11" @default.
- W2933846840 creator A5014503607 @default.
- W2933846840 creator A5018878424 @default.
- W2933846840 creator A5038334345 @default.
- W2933846840 creator A5043391944 @default.
- W2933846840 date "2007-12-26" @default.
- W2933846840 modified "2023-09-23" @default.
- W2933846840 title "Thermally Induced Packaging Effect on the Resonant Frequencies of a Fixed-Fixed Beam" @default.
- W2933846840 hasPublicationYear "2007" @default.
- W2933846840 type Work @default.
- W2933846840 sameAs 2933846840 @default.
- W2933846840 citedByCount "1" @default.
- W2933846840 crossrefType "journal-article" @default.
- W2933846840 hasAuthorship W2933846840A5014503607 @default.
- W2933846840 hasAuthorship W2933846840A5018878424 @default.
- W2933846840 hasAuthorship W2933846840A5038334345 @default.
- W2933846840 hasAuthorship W2933846840A5043391944 @default.
- W2933846840 hasConcept C121332964 @default.
- W2933846840 hasConcept C127413603 @default.
- W2933846840 hasConcept C131584629 @default.
- W2933846840 hasConcept C135628077 @default.
- W2933846840 hasConcept C159985019 @default.
- W2933846840 hasConcept C168834538 @default.
- W2933846840 hasConcept C192562407 @default.
- W2933846840 hasConcept C198394728 @default.
- W2933846840 hasConcept C204366326 @default.
- W2933846840 hasConcept C24890656 @default.
- W2933846840 hasConcept C37977207 @default.
- W2933846840 hasConcept C49040817 @default.
- W2933846840 hasConcept C6260449 @default.
- W2933846840 hasConcept C66938386 @default.
- W2933846840 hasConcept C927094 @default.
- W2933846840 hasConcept C96199931 @default.
- W2933846840 hasConceptScore W2933846840C121332964 @default.
- W2933846840 hasConceptScore W2933846840C127413603 @default.
- W2933846840 hasConceptScore W2933846840C131584629 @default.
- W2933846840 hasConceptScore W2933846840C135628077 @default.
- W2933846840 hasConceptScore W2933846840C159985019 @default.
- W2933846840 hasConceptScore W2933846840C168834538 @default.
- W2933846840 hasConceptScore W2933846840C192562407 @default.
- W2933846840 hasConceptScore W2933846840C198394728 @default.
- W2933846840 hasConceptScore W2933846840C204366326 @default.
- W2933846840 hasConceptScore W2933846840C24890656 @default.
- W2933846840 hasConceptScore W2933846840C37977207 @default.
- W2933846840 hasConceptScore W2933846840C49040817 @default.
- W2933846840 hasConceptScore W2933846840C6260449 @default.
- W2933846840 hasConceptScore W2933846840C66938386 @default.
- W2933846840 hasConceptScore W2933846840C927094 @default.
- W2933846840 hasConceptScore W2933846840C96199931 @default.
- W2933846840 hasIssue "1" @default.
- W2933846840 hasLocation W29338468401 @default.
- W2933846840 hasOpenAccess W2933846840 @default.
- W2933846840 hasPrimaryLocation W29338468401 @default.
- W2933846840 hasRelatedWork W2008858060 @default.
- W2933846840 hasRelatedWork W2023817014 @default.
- W2933846840 hasRelatedWork W2060885779 @default.
- W2933846840 hasRelatedWork W2068544226 @default.
- W2933846840 hasRelatedWork W2086631591 @default.
- W2933846840 hasRelatedWork W2107781971 @default.
- W2933846840 hasRelatedWork W2143273555 @default.
- W2933846840 hasRelatedWork W2352730847 @default.
- W2933846840 hasRelatedWork W2357811181 @default.
- W2933846840 hasRelatedWork W2373392623 @default.
- W2933846840 hasRelatedWork W2414440803 @default.
- W2933846840 hasRelatedWork W2525158003 @default.
- W2933846840 hasRelatedWork W2531367614 @default.
- W2933846840 hasRelatedWork W2557256828 @default.
- W2933846840 hasRelatedWork W2613267215 @default.
- W2933846840 hasRelatedWork W2752627252 @default.
- W2933846840 hasRelatedWork W2907291254 @default.
- W2933846840 hasRelatedWork W2913238300 @default.
- W2933846840 hasRelatedWork W2970300136 @default.
- W2933846840 hasRelatedWork W3106234590 @default.
- W2933846840 hasVolume "29" @default.
- W2933846840 isParatext "false" @default.
- W2933846840 isRetracted "false" @default.
- W2933846840 magId "2933846840" @default.
- W2933846840 workType "article" @default.