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- W2935417487 abstract "A monolithic silicon multi-sensor on SOI wafer that consists of a three-axis piezoresistive accelerometer,a piezoresistive absolute pressure sensor,and a silicon thermistor temperature sensor is presented.The fabrication process of the sensor is described.An effective micromachining process is developed to improve the reliability of the metal wire in the multi-sensor and to avoid adhesion between the PYREX glass and silicon mass in the process of anodic bonding.Finally,the measurement results of the sensor are shown." @default.
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- W2935417487 date "2007-01-30" @default.
- W2935417487 modified "2023-09-23" @default.
- W2935417487 title "Fabrication of Monolithic Silicon Multi-Sensor on SOI Wafer" @default.
- W2935417487 hasPublicationYear "2007" @default.
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