Matches in SemOpenAlex for { <https://semopenalex.org/work/W2937134795> ?p ?o ?g. }
- W2937134795 endingPage "085803" @default.
- W2937134795 startingPage "085803" @default.
- W2937134795 abstract "Silicon (Si), germanium (Ge) and Si1−x Ge x alloys are currently used as active layers in microprocessors. Si and Ge are fully miscible and their interdiffusion can occur even at room temperature. Thus, well-controlled Ge/Si interdiffusion is crucial to insure the performance of electronic devices. During the course of our experiments to synthesize tensile-strained and n-doped Ge/Si films for optoelectronic applications, we notice that Ge/Si interdiffusion could affect the optical properties of Ge/Si films. We report here an approach to use carbon (C) adsorption on Ge to minimize Ge/Si interdiffusion. Since carbon atoms have a small atomic radius, deposited carbon can occupy vacancies and interstitial sites in Ge. This allows to greatly reduce Ge/Si interdiffusion because diffusion mechanisms via vacancies and interstitial sites are known to have the lowest activation energy. In addition, by optimizing the deposited C amount, one can maintain the epitaxial growth process of Ge/Si heterostructures." @default.
- W2937134795 created "2019-04-25" @default.
- W2937134795 creator A5011523242 @default.
- W2937134795 creator A5061803175 @default.
- W2937134795 creator A5061964161 @default.
- W2937134795 creator A5075140638 @default.
- W2937134795 creator A5077481306 @default.
- W2937134795 date "2019-05-16" @default.
- W2937134795 modified "2023-10-17" @default.
- W2937134795 title "The efficiency of carbon adsorption as a diffusion barrier in Ge/Si heterostructures" @default.
- W2937134795 cites W1624159365 @default.
- W2937134795 cites W1648540692 @default.
- W2937134795 cites W1965366925 @default.
- W2937134795 cites W1972354739 @default.
- W2937134795 cites W1972650102 @default.
- W2937134795 cites W1978822844 @default.
- W2937134795 cites W1981807085 @default.
- W2937134795 cites W1988344574 @default.
- W2937134795 cites W2000999566 @default.
- W2937134795 cites W2010617349 @default.
- W2937134795 cites W2011508159 @default.
- W2937134795 cites W2012898403 @default.
- W2937134795 cites W2014146096 @default.
- W2937134795 cites W2018749737 @default.
- W2937134795 cites W2020856128 @default.
- W2937134795 cites W2021957902 @default.
- W2937134795 cites W2034252237 @default.
- W2937134795 cites W2043452621 @default.
- W2937134795 cites W2044795334 @default.
- W2937134795 cites W2055946032 @default.
- W2937134795 cites W2058639886 @default.
- W2937134795 cites W2063723216 @default.
- W2937134795 cites W2071072535 @default.
- W2937134795 cites W2075988172 @default.
- W2937134795 cites W2079534868 @default.
- W2937134795 cites W2079751674 @default.
- W2937134795 cites W2083645204 @default.
- W2937134795 cites W2085359721 @default.
- W2937134795 cites W2086022906 @default.
- W2937134795 cites W2089140928 @default.
- W2937134795 cites W2091253397 @default.
- W2937134795 cites W2097581778 @default.
- W2937134795 cites W2114285461 @default.
- W2937134795 cites W2277331938 @default.
- W2937134795 cites W2654566244 @default.
- W2937134795 cites W4320805313 @default.
- W2937134795 cites W4381157736 @default.
- W2937134795 doi "https://doi.org/10.1088/1402-4896/ab182b" @default.
- W2937134795 hasPublicationYear "2019" @default.
- W2937134795 type Work @default.
- W2937134795 sameAs 2937134795 @default.
- W2937134795 citedByCount "2" @default.
- W2937134795 countsByYear W29371347952021 @default.
- W2937134795 countsByYear W29371347952022 @default.
- W2937134795 crossrefType "journal-article" @default.
- W2937134795 hasAuthorship W2937134795A5011523242 @default.
- W2937134795 hasAuthorship W2937134795A5061803175 @default.
- W2937134795 hasAuthorship W2937134795A5061964161 @default.
- W2937134795 hasAuthorship W2937134795A5075140638 @default.
- W2937134795 hasAuthorship W2937134795A5077481306 @default.
- W2937134795 hasConcept C104779481 @default.
- W2937134795 hasConcept C121332964 @default.
- W2937134795 hasConcept C127413603 @default.
- W2937134795 hasConcept C140205800 @default.
- W2937134795 hasConcept C147789679 @default.
- W2937134795 hasConcept C150394285 @default.
- W2937134795 hasConcept C159467904 @default.
- W2937134795 hasConcept C159985019 @default.
- W2937134795 hasConcept C171250308 @default.
- W2937134795 hasConcept C185592680 @default.
- W2937134795 hasConcept C192562407 @default.
- W2937134795 hasConcept C2778836790 @default.
- W2937134795 hasConcept C2779227376 @default.
- W2937134795 hasConcept C42360764 @default.
- W2937134795 hasConcept C49040817 @default.
- W2937134795 hasConcept C61696701 @default.
- W2937134795 hasConcept C69357855 @default.
- W2937134795 hasConcept C79794668 @default.
- W2937134795 hasConcept C97355855 @default.
- W2937134795 hasConceptScore W2937134795C104779481 @default.
- W2937134795 hasConceptScore W2937134795C121332964 @default.
- W2937134795 hasConceptScore W2937134795C127413603 @default.
- W2937134795 hasConceptScore W2937134795C140205800 @default.
- W2937134795 hasConceptScore W2937134795C147789679 @default.
- W2937134795 hasConceptScore W2937134795C150394285 @default.
- W2937134795 hasConceptScore W2937134795C159467904 @default.
- W2937134795 hasConceptScore W2937134795C159985019 @default.
- W2937134795 hasConceptScore W2937134795C171250308 @default.
- W2937134795 hasConceptScore W2937134795C185592680 @default.
- W2937134795 hasConceptScore W2937134795C192562407 @default.
- W2937134795 hasConceptScore W2937134795C2778836790 @default.
- W2937134795 hasConceptScore W2937134795C2779227376 @default.
- W2937134795 hasConceptScore W2937134795C42360764 @default.
- W2937134795 hasConceptScore W2937134795C49040817 @default.
- W2937134795 hasConceptScore W2937134795C61696701 @default.
- W2937134795 hasConceptScore W2937134795C69357855 @default.
- W2937134795 hasConceptScore W2937134795C79794668 @default.
- W2937134795 hasConceptScore W2937134795C97355855 @default.