Matches in SemOpenAlex for { <https://semopenalex.org/work/W2937840446> ?p ?o ?g. }
- W2937840446 endingPage "273" @default.
- W2937840446 startingPage "266" @default.
- W2937840446 abstract "Tungsten nitride (WNx) thin films were synthesized on the silicon substrates by way of Gas Injection Magnetron Sputtering (GIMS) technique. Pulsed discharge conditions, generated in the GIMS method, were optimized to maintain the nitrogen partial pressure in the range of an order of 10−3 to 10−1 Pa by a periodical injection of gas doses. In this way, we could increase the mean free path of atomic species and preserve their kinetic energy, in comparison to the continuous sputtering techniques. Under these conditions we attempted to overcome the high nucleation barrier, common for β-W2N phase synthesis. Here, different nucleation mechanisms of tungsten nitride thin films were examined by the scanning electron microscopy (SEM) and the atomic force microscopy (AFM). In terms of chemical bonding state investigations of WNx films, we engaged the Raman spectroscopy measurements and the X-ray photoelectron spectroscopy (XPS). Furthermore, structural circumstances of tungsten nitrides were analyzed via X-ray diffraction (XRD) investigations. On a line of advanced applications issue, optical properties of these films were discussed on the basis of the spectroscopic ellipsometry results." @default.
- W2937840446 created "2019-04-25" @default.
- W2937840446 creator A5002856363 @default.
- W2937840446 creator A5032352007 @default.
- W2937840446 creator A5035182004 @default.
- W2937840446 creator A5036159832 @default.
- W2937840446 creator A5039915357 @default.
- W2937840446 creator A5049485243 @default.
- W2937840446 creator A5058862897 @default.
- W2937840446 creator A5069614098 @default.
- W2937840446 creator A5085387170 @default.
- W2937840446 date "2019-07-01" @default.
- W2937840446 modified "2023-10-16" @default.
- W2937840446 title "Chemical and structural characterization of tungsten nitride (WNx) thin films synthesized via Gas Injection Magnetron Sputtering technique" @default.
- W2937840446 cites W1080203331 @default.
- W2937840446 cites W1490216280 @default.
- W2937840446 cites W1908330182 @default.
- W2937840446 cites W1971111028 @default.
- W2937840446 cites W1971907963 @default.
- W2937840446 cites W1973675385 @default.
- W2937840446 cites W1976563040 @default.
- W2937840446 cites W1981966175 @default.
- W2937840446 cites W1982999497 @default.
- W2937840446 cites W1984449869 @default.
- W2937840446 cites W1984502237 @default.
- W2937840446 cites W1985105276 @default.
- W2937840446 cites W1986815767 @default.
- W2937840446 cites W2013738874 @default.
- W2937840446 cites W2015191015 @default.
- W2937840446 cites W2020208970 @default.
- W2937840446 cites W2025379881 @default.
- W2937840446 cites W2028904648 @default.
- W2937840446 cites W2046072906 @default.
- W2937840446 cites W2053743211 @default.
- W2937840446 cites W2060604096 @default.
- W2937840446 cites W2063563402 @default.
- W2937840446 cites W2064017182 @default.
- W2937840446 cites W2065323626 @default.
- W2937840446 cites W2086514778 @default.
- W2937840446 cites W2089215005 @default.
- W2937840446 cites W2099036534 @default.
- W2937840446 cites W2127616986 @default.
- W2937840446 cites W2131098965 @default.
- W2937840446 cites W2136511140 @default.
- W2937840446 cites W2158398544 @default.
- W2937840446 cites W2250970918 @default.
- W2937840446 cites W2276242434 @default.
- W2937840446 cites W2277771604 @default.
- W2937840446 cites W2322177140 @default.
- W2937840446 cites W2328820405 @default.
- W2937840446 cites W2469248656 @default.
- W2937840446 cites W2585549855 @default.
- W2937840446 cites W2588572790 @default.
- W2937840446 cites W2608551417 @default.
- W2937840446 cites W2741921574 @default.
- W2937840446 cites W2770976862 @default.
- W2937840446 cites W2781699448 @default.
- W2937840446 cites W2810474750 @default.
- W2937840446 cites W2894657467 @default.
- W2937840446 doi "https://doi.org/10.1016/j.vacuum.2019.04.020" @default.
- W2937840446 hasPublicationYear "2019" @default.
- W2937840446 type Work @default.
- W2937840446 sameAs 2937840446 @default.
- W2937840446 citedByCount "26" @default.
- W2937840446 countsByYear W29378404462019 @default.
- W2937840446 countsByYear W29378404462020 @default.
- W2937840446 countsByYear W29378404462021 @default.
- W2937840446 countsByYear W29378404462022 @default.
- W2937840446 countsByYear W29378404462023 @default.
- W2937840446 crossrefType "journal-article" @default.
- W2937840446 hasAuthorship W2937840446A5002856363 @default.
- W2937840446 hasAuthorship W2937840446A5032352007 @default.
- W2937840446 hasAuthorship W2937840446A5035182004 @default.
- W2937840446 hasAuthorship W2937840446A5036159832 @default.
- W2937840446 hasAuthorship W2937840446A5039915357 @default.
- W2937840446 hasAuthorship W2937840446A5049485243 @default.
- W2937840446 hasAuthorship W2937840446A5058862897 @default.
- W2937840446 hasAuthorship W2937840446A5069614098 @default.
- W2937840446 hasAuthorship W2937840446A5085387170 @default.
- W2937840446 hasConcept C102404424 @default.
- W2937840446 hasConcept C113196181 @default.
- W2937840446 hasConcept C120665830 @default.
- W2937840446 hasConcept C121332964 @default.
- W2937840446 hasConcept C127413603 @default.
- W2937840446 hasConcept C159985019 @default.
- W2937840446 hasConcept C171250308 @default.
- W2937840446 hasConcept C175708663 @default.
- W2937840446 hasConcept C178790620 @default.
- W2937840446 hasConcept C185592680 @default.
- W2937840446 hasConcept C19067145 @default.
- W2937840446 hasConcept C191897082 @default.
- W2937840446 hasConcept C192562407 @default.
- W2937840446 hasConcept C194760766 @default.
- W2937840446 hasConcept C22423302 @default.
- W2937840446 hasConcept C26771246 @default.
- W2937840446 hasConcept C2779227376 @default.
- W2937840446 hasConcept C40003534 @default.
- W2937840446 hasConcept C42360764 @default.