Matches in SemOpenAlex for { <https://semopenalex.org/work/W2938369548> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W2938369548 endingPage "1438" @default.
- W2938369548 startingPage "1430" @default.
- W2938369548 abstract "Chemical mechanical planarization (CMP) is a high-precision and complex manufacturing process that removes material with chemical and mechanical forces in order to achieve highly planar surfaces. Significant research efforts have been devoted to developing physics-based and data-driven approaches to predicting the material removal rate (MRR) in the CMP process. Both physics-based and data-driven methods have advantages and disadvantages. A novel physics-informed machine learning approach is introduced to combine a physics-based model of MRR in CMP with a data-driven model of MRR in CMP. The physics-based model takes into account the contact between a polishing pad and abrasives and the contact between abrasives and a wafer. The data-driven model trained by a machine learning algorithm predicts the asperity radius and asperity density of the polishing pad using the polishing pad wear and conditioner wear estimated by the physics-based model. The predicted asperity radius and asperity density of the polishing pad are then used to estimate MRR in CMP. Experimental data collected from a CMP tool under varying operating conditions are used to train and validate the predictive model. Experimental results have shown that the physics-informed machine learning method is capable of predicting MRR in CMP with high accuracy." @default.
- W2938369548 created "2019-04-25" @default.
- W2938369548 creator A5020451053 @default.
- W2938369548 creator A5034019298 @default.
- W2938369548 creator A5057418739 @default.
- W2938369548 date "2019-04-01" @default.
- W2938369548 modified "2023-09-30" @default.
- W2938369548 title "Predictive modeling of material removal rate in chemical mechanical planarization with physics-informed machine learning" @default.
- W2938369548 cites W156119927 @default.
- W2938369548 cites W1678356000 @default.
- W2938369548 cites W1975042814 @default.
- W2938369548 cites W1987179253 @default.
- W2938369548 cites W1992939429 @default.
- W2938369548 cites W2015239133 @default.
- W2938369548 cites W2016910361 @default.
- W2938369548 cites W2023294425 @default.
- W2938369548 cites W2048538992 @default.
- W2938369548 cites W2075398095 @default.
- W2938369548 cites W2078261409 @default.
- W2938369548 cites W2087872598 @default.
- W2938369548 cites W2093333193 @default.
- W2938369548 cites W2101407763 @default.
- W2938369548 cites W2108102614 @default.
- W2938369548 cites W2108861471 @default.
- W2938369548 cites W2127767984 @default.
- W2938369548 cites W2155260474 @default.
- W2938369548 cites W2472252848 @default.
- W2938369548 cites W2606754133 @default.
- W2938369548 cites W2779937602 @default.
- W2938369548 cites W2900768224 @default.
- W2938369548 doi "https://doi.org/10.1016/j.wear.2019.02.012" @default.
- W2938369548 hasPublicationYear "2019" @default.
- W2938369548 type Work @default.
- W2938369548 sameAs 2938369548 @default.
- W2938369548 citedByCount "26" @default.
- W2938369548 countsByYear W29383695482020 @default.
- W2938369548 countsByYear W29383695482021 @default.
- W2938369548 countsByYear W29383695482022 @default.
- W2938369548 countsByYear W29383695482023 @default.
- W2938369548 crossrefType "journal-article" @default.
- W2938369548 hasAuthorship W2938369548A5020451053 @default.
- W2938369548 hasAuthorship W2938369548A5034019298 @default.
- W2938369548 hasAuthorship W2938369548A5057418739 @default.
- W2938369548 hasConcept C111919701 @default.
- W2938369548 hasConcept C119857082 @default.
- W2938369548 hasConcept C127413603 @default.
- W2938369548 hasConcept C138113353 @default.
- W2938369548 hasConcept C159985019 @default.
- W2938369548 hasConcept C160671074 @default.
- W2938369548 hasConcept C171250308 @default.
- W2938369548 hasConcept C178635117 @default.
- W2938369548 hasConcept C180088628 @default.
- W2938369548 hasConcept C192562407 @default.
- W2938369548 hasConcept C199639397 @default.
- W2938369548 hasConcept C2779778606 @default.
- W2938369548 hasConcept C38652104 @default.
- W2938369548 hasConcept C41008148 @default.
- W2938369548 hasConcept C78519656 @default.
- W2938369548 hasConcept C98045186 @default.
- W2938369548 hasConceptScore W2938369548C111919701 @default.
- W2938369548 hasConceptScore W2938369548C119857082 @default.
- W2938369548 hasConceptScore W2938369548C127413603 @default.
- W2938369548 hasConceptScore W2938369548C138113353 @default.
- W2938369548 hasConceptScore W2938369548C159985019 @default.
- W2938369548 hasConceptScore W2938369548C160671074 @default.
- W2938369548 hasConceptScore W2938369548C171250308 @default.
- W2938369548 hasConceptScore W2938369548C178635117 @default.
- W2938369548 hasConceptScore W2938369548C180088628 @default.
- W2938369548 hasConceptScore W2938369548C192562407 @default.
- W2938369548 hasConceptScore W2938369548C199639397 @default.
- W2938369548 hasConceptScore W2938369548C2779778606 @default.
- W2938369548 hasConceptScore W2938369548C38652104 @default.
- W2938369548 hasConceptScore W2938369548C41008148 @default.
- W2938369548 hasConceptScore W2938369548C78519656 @default.
- W2938369548 hasConceptScore W2938369548C98045186 @default.
- W2938369548 hasLocation W29383695481 @default.
- W2938369548 hasOpenAccess W2938369548 @default.
- W2938369548 hasPrimaryLocation W29383695481 @default.
- W2938369548 hasRelatedWork W1530515008 @default.
- W2938369548 hasRelatedWork W1987571941 @default.
- W2938369548 hasRelatedWork W2030673534 @default.
- W2938369548 hasRelatedWork W2046026222 @default.
- W2938369548 hasRelatedWork W2058666584 @default.
- W2938369548 hasRelatedWork W2109659628 @default.
- W2938369548 hasRelatedWork W2129492640 @default.
- W2938369548 hasRelatedWork W2335316114 @default.
- W2938369548 hasRelatedWork W2348452527 @default.
- W2938369548 hasRelatedWork W2385996032 @default.
- W2938369548 hasVolume "426-427" @default.
- W2938369548 isParatext "false" @default.
- W2938369548 isRetracted "false" @default.
- W2938369548 magId "2938369548" @default.
- W2938369548 workType "article" @default.