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• W2940357429 abstract "In this paper, we present a redundant microsensor based on the bulk and etch silicononinsulator (BESOI) process for measuring relative humidity (RH), by using a grapheneoxide/polyvinylalcohol (GO/PVA) composite. The MEMS is a mechanical oscillator, composed of a proof mass with multilayer of nanomaterials (GO/PVA) and suspended by four crab-leg springs. The redundant approach realized concerns the use of different readout strategies in order to estimate the same measurand RH. This is an intriguing solution to realize a robust measurement system with multiple outputs, by using the GO/PVA as functional material. In the presence of RH variation, GO/PVA (1) changes its mass, and as consequence, a variation of the natural frequency of the integrated oscillator can be observed; and (2) varies its conductivity, which can be measured by using two integrated electrodes. The sensor was designed, analyzed and modeled; experimental results are reported here to demonstrate the effectiveness of our implementation." @default.
• W2940357429 created "2019-04-25" @default.
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• W2940357429 date "2019-04-10" @default.
• W2940357429 modified "2023-10-16" @default.
• W2940357429 title "Analysis of a Hybrid Micro-Electro-Mechanical Sensor Based on Graphene Oxide/Polyvinyl Alcohol for Humidity Measurements" @default.
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• W2940357429 doi "https://doi.org/10.3390/s19071720" @default.
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