Matches in SemOpenAlex for { <https://semopenalex.org/work/W2940598410> ?p ?o ?g. }
Showing items 1 to 90 of
90
with 100 items per page.
- W2940598410 endingPage "6462" @default.
- W2940598410 startingPage "6458" @default.
- W2940598410 abstract "Parylene is one of the polymers widely used as an electrical insulating or waterproof layer in the fields of semiconductor, electronics, and biomedical engineering owing to its outstanding properties of chemically inertness, biocompatibility, water resistance, low conductivity, and flexibility. It is increasingly required for real-time and non-destructive characterization of the deposition of parylene layer for the quality control and assurance. In the present work, we suggested an impedance measurement based parylene coating system which can provide the electrical properties of the deposited parylene in real-time and non-destructively. For this, the impedance spectra of parylene C, N, or D were measured using the fabricated interdigitated and wave-shaped electrode (IWE) during the chemical vapor deposition (CVD) process. The results showed a feasibility to monitor the impedance change according to the parylene deposition, and that the resistance at the frequency of 2.15 kHz was decreased in dependency on the type of the deposited parylene." @default.
- W2940598410 created "2019-05-03" @default.
- W2940598410 creator A5030097949 @default.
- W2940598410 creator A5050825324 @default.
- W2940598410 creator A5055895254 @default.
- W2940598410 creator A5056447779 @default.
- W2940598410 creator A5068712361 @default.
- W2940598410 date "2019-10-01" @default.
- W2940598410 modified "2023-09-26" @default.
- W2940598410 title "New Parylene Coating System with Real-Time and Non-Destructive Electrical Impedance Monitoring of Parylene Layer" @default.
- W2940598410 doi "https://doi.org/10.1166/jnn.2019.17065" @default.
- W2940598410 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/31026977" @default.
- W2940598410 hasPublicationYear "2019" @default.
- W2940598410 type Work @default.
- W2940598410 sameAs 2940598410 @default.
- W2940598410 citedByCount "2" @default.
- W2940598410 countsByYear W29405984102020 @default.
- W2940598410 crossrefType "journal-article" @default.
- W2940598410 hasAuthorship W2940598410A5030097949 @default.
- W2940598410 hasAuthorship W2940598410A5050825324 @default.
- W2940598410 hasAuthorship W2940598410A5055895254 @default.
- W2940598410 hasAuthorship W2940598410A5056447779 @default.
- W2940598410 hasAuthorship W2940598410A5068712361 @default.
- W2940598410 hasConcept C119599485 @default.
- W2940598410 hasConcept C127413603 @default.
- W2940598410 hasConcept C136229726 @default.
- W2940598410 hasConcept C147789679 @default.
- W2940598410 hasConcept C151730666 @default.
- W2940598410 hasConcept C159985019 @default.
- W2940598410 hasConcept C171250308 @default.
- W2940598410 hasConcept C17525397 @default.
- W2940598410 hasConcept C17829176 @default.
- W2940598410 hasConcept C185592680 @default.
- W2940598410 hasConcept C191897082 @default.
- W2940598410 hasConcept C192562407 @default.
- W2940598410 hasConcept C2777230088 @default.
- W2940598410 hasConcept C2777385008 @default.
- W2940598410 hasConcept C2779227376 @default.
- W2940598410 hasConcept C2781448156 @default.
- W2940598410 hasConcept C2816523 @default.
- W2940598410 hasConcept C49040817 @default.
- W2940598410 hasConcept C521977710 @default.
- W2940598410 hasConcept C57410435 @default.
- W2940598410 hasConcept C64297162 @default.
- W2940598410 hasConcept C71924100 @default.
- W2940598410 hasConcept C86803240 @default.
- W2940598410 hasConceptScore W2940598410C119599485 @default.
- W2940598410 hasConceptScore W2940598410C127413603 @default.
- W2940598410 hasConceptScore W2940598410C136229726 @default.
- W2940598410 hasConceptScore W2940598410C147789679 @default.
- W2940598410 hasConceptScore W2940598410C151730666 @default.
- W2940598410 hasConceptScore W2940598410C159985019 @default.
- W2940598410 hasConceptScore W2940598410C171250308 @default.
- W2940598410 hasConceptScore W2940598410C17525397 @default.
- W2940598410 hasConceptScore W2940598410C17829176 @default.
- W2940598410 hasConceptScore W2940598410C185592680 @default.
- W2940598410 hasConceptScore W2940598410C191897082 @default.
- W2940598410 hasConceptScore W2940598410C192562407 @default.
- W2940598410 hasConceptScore W2940598410C2777230088 @default.
- W2940598410 hasConceptScore W2940598410C2777385008 @default.
- W2940598410 hasConceptScore W2940598410C2779227376 @default.
- W2940598410 hasConceptScore W2940598410C2781448156 @default.
- W2940598410 hasConceptScore W2940598410C2816523 @default.
- W2940598410 hasConceptScore W2940598410C49040817 @default.
- W2940598410 hasConceptScore W2940598410C521977710 @default.
- W2940598410 hasConceptScore W2940598410C57410435 @default.
- W2940598410 hasConceptScore W2940598410C64297162 @default.
- W2940598410 hasConceptScore W2940598410C71924100 @default.
- W2940598410 hasConceptScore W2940598410C86803240 @default.
- W2940598410 hasIssue "10" @default.
- W2940598410 hasLocation W29405984101 @default.
- W2940598410 hasOpenAccess W2940598410 @default.
- W2940598410 hasPrimaryLocation W29405984101 @default.
- W2940598410 hasRelatedWork W21172775 @default.
- W2940598410 hasRelatedWork W37138766 @default.
- W2940598410 hasRelatedWork W4007337 @default.
- W2940598410 hasRelatedWork W4363696 @default.
- W2940598410 hasRelatedWork W45857336 @default.
- W2940598410 hasRelatedWork W52205431 @default.
- W2940598410 hasRelatedWork W5688329 @default.
- W2940598410 hasRelatedWork W6115053 @default.
- W2940598410 hasRelatedWork W7402037 @default.
- W2940598410 hasRelatedWork W8382879 @default.
- W2940598410 hasVolume "19" @default.
- W2940598410 isParatext "false" @default.
- W2940598410 isRetracted "false" @default.
- W2940598410 magId "2940598410" @default.
- W2940598410 workType "article" @default.