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• W2941122224 abstract "The optical properties of thick silicon dioxide on silicon substrate SiO2/Si were fully investigated at the hydrogen Lyman– alpha spectral line. In this case, it was observed that the reflectance measurements are not enough to determine reliable values of the optical constants, but a full polarimetric investigation is required. Thus, the optical constants were determined together with the phase retarder properties by combining EUV reflective ellipsometry and reflectometry. The experimental system used for the measurements is a reflectometer optimized for VUV–EUV spectral range and equipped with a linear rotating polarizer used as an analyzer. The results show the potential of the approach, suitable for cases in which the determination of the ellipsometric parameters, ratio ρ, and phase shift φ, is required for a complete study of the optical and structural properties of the samples. Moreover, it was found that SiO2 behaves as a retarder by introducing a phase difference between the s-and p- polarization components of the incoming light. The phase shift ranges from 18° to 160° depending on the incidence angle. The method, the experimental measurements, the analysis and the results are discussed thereafter." @default.
• W2941122224 created "2019-05-03" @default.
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• W2941122224 date "2019-04-26" @default.
• W2941122224 modified "2023-09-24" @default.
• W2941122224 title "EUV reflective ellipsometry in laboratory: determination of the optical constants and phase retarder properties of SiO2 at hydrogen Lyman–alpha" @default.
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• W2941122224 doi "https://doi.org/10.1117/12.2520834" @default.
• W2941122224 hasPublicationYear "2019" @default.
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