Matches in SemOpenAlex for { <https://semopenalex.org/work/W2941296407> ?p ?o ?g. }
- W2941296407 endingPage "496" @default.
- W2941296407 startingPage "465" @default.
- W2941296407 abstract "Atomic layer deposition (ALD) is an ultra-thin film deposition technique that has found many applications owing to its distinct abilities. They include uniform deposition of conformal films with controllable thickness, even on complex three-dimensional surfaces, and can improve the efficiency of electronic devices. This technology has attracted significant interest both for fundamental understanding how the new functional materials can be synthesized by ALD and for numerous practical applications, particularly in advanced nanopatterning for microelectronics, energy storage systems, desalinations, catalysis and medical fields. This review introduces the progress made in ALD, both for computational and experimental methodologies, and provides an outlook of this emerging technology in comparison with other film deposition methods. It discusses experimental approaches and factors that affect the deposition and presents simulation methods, such as molecular dynamics and computational fluid dynamics, which help determine and predict effective ways to optimize ALD processes, hence enabling the reduction in cost, energy waste and adverse environmental impacts. Specific examples are chosen to illustrate the progress in ALD processes and applications that showed a considerable impact on other technologies." @default.
- W2941296407 created "2019-05-03" @default.
- W2941296407 creator A5020407338 @default.
- W2941296407 creator A5027048459 @default.
- W2941296407 creator A5028166450 @default.
- W2941296407 creator A5062502459 @default.
- W2941296407 creator A5067706359 @default.
- W2941296407 date "2019-05-23" @default.
- W2941296407 modified "2023-10-16" @default.
- W2941296407 title "New development of atomic layer deposition: processes, methods and applications" @default.
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