FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2942073039> ?p ?o ?g. }

• W2942073039 abstract "Abstract Stencil masks are used in fabrication processes such as photolithography for circuit patterning and micro-electromechanical systems devices. A stencil mask has micro- and nano-scale through-hole patterns on a substrate, and the metal or Si through-patterns are chemically etched along electron beam (EB) lithographic patterns on a resist. However, the electron beam lithography (EBL) and chemical etching processes are complex. Therefore, in this study, a simple and high-throughput fabrication process is proposed. In this process, an ultra-violet (UV)-curable positive-type EB resist was prepared, which can be used to prepare a polymer substrate that can be lithographed by an EB. The micro-scale through-hole patterns were created on a resist substrate with a thickness of approximately 5 μm. Cr deposition was demonstrated on an Si wafer using a fabricated stencil mask. The deposited Cr thin film traced the EBL pattern on the wafer through the mask. The usefulness of the method was demonstrated by preparing a polymer stencil mask." @default.
• W2942073039 created "2019-05-03" @default.
• W2942073039 creator A5008874006 @default.
• W2942073039 creator A5080157773 @default.
• W2942073039 creator A5091158809 @default.
• W2942073039 date "2019-06-01" @default.
• W2942073039 modified "2023-09-27" @default.
• W2942073039 title "Stencil mask using ultra-violet-curable positive-tone electron beam resist" @default.
• W2942073039 cites W1996900454 @default.
• W2942073039 cites W2022325625 @default.
• W2942073039 cites W2022948920 @default.
• W2942073039 cites W2050132318 @default.
• W2942073039 cites W2050639691 @default.
• W2942073039 cites W2085443555 @default.
• W2942073039 cites W2095276977 @default.
• W2942073039 cites W2106251107 @default.
• W2942073039 cites W2129216969 @default.
• W2942073039 cites W2138368127 @default.
• W2942073039 cites W2265309500 @default.
• W2942073039 cites W2281858351 @default.
• W2942073039 cites W2342710295 @default.
• W2942073039 cites W2579761063 @default.
• W2942073039 cites W2606331679 @default.
• W2942073039 cites W2806543351 @default.
• W2942073039 cites W2890402440 @default.
• W2942073039 doi "https://doi.org/10.1016/j.mee.2019.04.022" @default.
• W2942073039 hasPublicationYear "2019" @default.
• W2942073039 type Work @default.
• W2942073039 sameAs 2942073039 @default.
• W2942073039 citedByCount "0" @default.
• W2942073039 crossrefType "journal-article" @default.
• W2942073039 hasAuthorship W2942073039A5008874006 @default.
• W2942073039 hasAuthorship W2942073039A5080157773 @default.
• W2942073039 hasAuthorship W2942073039A5091158809 @default.
• W2942073039 hasConcept C100460472 @default.
• W2942073039 hasConcept C105487726 @default.
• W2942073039 hasConcept C111368507 @default.
• W2942073039 hasConcept C120665830 @default.
• W2942073039 hasConcept C121332964 @default.
• W2942073039 hasConcept C127313418 @default.
• W2942073039 hasConcept C134406635 @default.
• W2942073039 hasConcept C136525101 @default.
• W2942073039 hasConcept C142724271 @default.
• W2942073039 hasConcept C160671074 @default.
• W2942073039 hasConcept C171250308 @default.
• W2942073039 hasConcept C192562407 @default.
• W2942073039 hasConcept C200274948 @default.
• W2942073039 hasConcept C204223013 @default.
• W2942073039 hasConcept C204787440 @default.
• W2942073039 hasConcept C2777289219 @default.
• W2942073039 hasConcept C2779227376 @default.
• W2942073039 hasConcept C41008148 @default.
• W2942073039 hasConcept C459310 @default.
• W2942073039 hasConcept C49040817 @default.
• W2942073039 hasConcept C53524968 @default.
• W2942073039 hasConcept C70520399 @default.
• W2942073039 hasConcept C71924100 @default.
• W2942073039 hasConcept C76752949 @default.
• W2942073039 hasConceptScore W2942073039C100460472 @default.
• W2942073039 hasConceptScore W2942073039C105487726 @default.
• W2942073039 hasConceptScore W2942073039C111368507 @default.
• W2942073039 hasConceptScore W2942073039C120665830 @default.
• W2942073039 hasConceptScore W2942073039C121332964 @default.
• W2942073039 hasConceptScore W2942073039C127313418 @default.
• W2942073039 hasConceptScore W2942073039C134406635 @default.
• W2942073039 hasConceptScore W2942073039C136525101 @default.
• W2942073039 hasConceptScore W2942073039C142724271 @default.
• W2942073039 hasConceptScore W2942073039C160671074 @default.
• W2942073039 hasConceptScore W2942073039C171250308 @default.
• W2942073039 hasConceptScore W2942073039C192562407 @default.
• W2942073039 hasConceptScore W2942073039C200274948 @default.
• W2942073039 hasConceptScore W2942073039C204223013 @default.
• W2942073039 hasConceptScore W2942073039C204787440 @default.
• W2942073039 hasConceptScore W2942073039C2777289219 @default.
• W2942073039 hasConceptScore W2942073039C2779227376 @default.
• W2942073039 hasConceptScore W2942073039C41008148 @default.
• W2942073039 hasConceptScore W2942073039C459310 @default.
• W2942073039 hasConceptScore W2942073039C49040817 @default.
• W2942073039 hasConceptScore W2942073039C53524968 @default.
• W2942073039 hasConceptScore W2942073039C70520399 @default.
• W2942073039 hasConceptScore W2942073039C71924100 @default.
• W2942073039 hasConceptScore W2942073039C76752949 @default.
• W2942073039 hasLocation W29420730391 @default.
• W2942073039 hasOpenAccess W2942073039 @default.
• W2942073039 hasPrimaryLocation W29420730391 @default.
• W2942073039 hasRelatedWork W1825011475 @default.
• W2942073039 hasRelatedWork W1963969600 @default.
• W2942073039 hasRelatedWork W1964954888 @default.
• W2942073039 hasRelatedWork W1975598103 @default.
• W2942073039 hasRelatedWork W2000246509 @default.
• W2942073039 hasRelatedWork W2014436559 @default.
• W2942073039 hasRelatedWork W2015937030 @default.
• W2942073039 hasRelatedWork W2019667267 @default.
• W2942073039 hasRelatedWork W2044293840 @default.
• W2942073039 hasRelatedWork W2048729869 @default.
• W2942073039 hasRelatedWork W2066467859 @default.
• W2942073039 hasRelatedWork W2076880070 @default.
• W2942073039 hasRelatedWork W2086274507 @default.
• W2942073039 hasRelatedWork W2157901844 @default.
• W2942073039 hasRelatedWork W1525341344 @default.

• next