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• W2942091276 endingPage "SDDC01" @default.
• W2942091276 startingPage "SDDC01" @default.
• W2942091276 abstract "The reaction mechanism of ZrO-based metal resists by extreme ultraviolet (EUV) exposure was investigated using hard X-ray photoelectron spectroscopy, near edge X-ray absorption fine structure spectroscopy, and X-ray diffraction. EUV exposure did not affect the amorphous structure of the metal resist. After EUV exposure, the π* states of the C atom and the σ* states of the O atom of the cell molecules were reacted. Moreover, EUV exposure decomposed the carbonyl species of the cell molecules and forms the high oxidation states of ZrOx. Thus, the metal resist reaction occurred with the decomposition of cell molecules and the formation of ZrO2 by EUV exposure." @default.
• W2942091276 created "2019-05-03" @default.
• W2942091276 creator A5014361326 @default.
• W2942091276 creator A5020777915 @default.
• W2942091276 creator A5062989653 @default.
• W2942091276 creator A5086379728 @default.
• W2942091276 date "2019-04-23" @default.
• W2942091276 modified "2023-09-23" @default.
• W2942091276 title "Reaction mechanism of ZrO<i> _x </i> metal resists with extreme ultraviolet irradiation" @default.
• W2942091276 cites W1202456769 @default.
• W2942091276 cites W1569731142 @default.
• W2942091276 cites W1915641865 @default.
• W2942091276 cites W1989333354 @default.
• W2942091276 cites W1989645825 @default.
• W2942091276 cites W1997014349 @default.
• W2942091276 cites W2000883834 @default.
• W2942091276 cites W2006308503 @default.
• W2942091276 cites W2006825657 @default.
• W2942091276 cites W2006900277 @default.
• W2942091276 cites W2011706523 @default.
• W2942091276 cites W2020495774 @default.
• W2942091276 cites W2024464227 @default.
• W2942091276 cites W2039316215 @default.
• W2942091276 cites W2052018870 @default.
• W2942091276 cites W2060869821 @default.
• W2942091276 cites W2081938409 @default.
• W2942091276 cites W2088174413 @default.
• W2942091276 cites W2134804594 @default.
• W2942091276 cites W2306308680 @default.
• W2942091276 cites W2426402959 @default.
• W2942091276 cites W2486119844 @default.
• W2942091276 cites W2593445405 @default.
• W2942091276 cites W2743309067 @default.
• W2942091276 cites W4235663868 @default.
• W2942091276 cites W4244110490 @default.
• W2942091276 cites W4376043544 @default.
• W2942091276 doi "https://doi.org/10.7567/1347-4065/ab0542" @default.
• W2942091276 hasPublicationYear "2019" @default.
• W2942091276 type Work @default.
• W2942091276 sameAs 2942091276 @default.
• W2942091276 citedByCount "3" @default.
• W2942091276 countsByYear W29420912762020 @default.
• W2942091276 countsByYear W29420912762022 @default.
• W2942091276 countsByYear W29420912762023 @default.
• W2942091276 crossrefType "journal-article" @default.
• W2942091276 hasAuthorship W2942091276A5014361326 @default.
• W2942091276 hasAuthorship W2942091276A5020777915 @default.
• W2942091276 hasAuthorship W2942091276A5062989653 @default.
• W2942091276 hasAuthorship W2942091276A5086379728 @default.
• W2942091276 hasConcept C111337013 @default.
• W2942091276 hasConcept C120665830 @default.
• W2942091276 hasConcept C121332964 @default.
• W2942091276 hasConcept C127413603 @default.
• W2942091276 hasConcept C146024833 @default.
• W2942091276 hasConcept C162996421 @default.
• W2942091276 hasConcept C171250308 @default.
• W2942091276 hasConcept C175708663 @default.
• W2942091276 hasConcept C178790620 @default.
• W2942091276 hasConcept C185544564 @default.
• W2942091276 hasConcept C185592680 @default.
• W2942091276 hasConcept C192562407 @default.
• W2942091276 hasConcept C2779227376 @default.
• W2942091276 hasConcept C32909587 @default.
• W2942091276 hasConcept C42360764 @default.
• W2942091276 hasConcept C520434653 @default.
• W2942091276 hasConcept C53524968 @default.
• W2942091276 hasConcept C544153396 @default.
• W2942091276 hasConcept C56052488 @default.
• W2942091276 hasConcept C75473681 @default.
• W2942091276 hasConcept C8010536 @default.
• W2942091276 hasConceptScore W2942091276C111337013 @default.
• W2942091276 hasConceptScore W2942091276C120665830 @default.
• W2942091276 hasConceptScore W2942091276C121332964 @default.
• W2942091276 hasConceptScore W2942091276C127413603 @default.
• W2942091276 hasConceptScore W2942091276C146024833 @default.
• W2942091276 hasConceptScore W2942091276C162996421 @default.
• W2942091276 hasConceptScore W2942091276C171250308 @default.
• W2942091276 hasConceptScore W2942091276C175708663 @default.
• W2942091276 hasConceptScore W2942091276C178790620 @default.
• W2942091276 hasConceptScore W2942091276C185544564 @default.
• W2942091276 hasConceptScore W2942091276C185592680 @default.
• W2942091276 hasConceptScore W2942091276C192562407 @default.
• W2942091276 hasConceptScore W2942091276C2779227376 @default.
• W2942091276 hasConceptScore W2942091276C32909587 @default.
• W2942091276 hasConceptScore W2942091276C42360764 @default.
• W2942091276 hasConceptScore W2942091276C520434653 @default.
• W2942091276 hasConceptScore W2942091276C53524968 @default.
• W2942091276 hasConceptScore W2942091276C544153396 @default.
• W2942091276 hasConceptScore W2942091276C56052488 @default.
• W2942091276 hasConceptScore W2942091276C75473681 @default.
• W2942091276 hasConceptScore W2942091276C8010536 @default.
• W2942091276 hasIssue "SD" @default.
• W2942091276 hasLocation W29420912761 @default.
• W2942091276 hasOpenAccess W2942091276 @default.
• W2942091276 hasPrimaryLocation W29420912761 @default.
• W2942091276 hasRelatedWork W1903698838 @default.
• W2942091276 hasRelatedWork W1976820972 @default.
• W2942091276 hasRelatedWork W1978950407 @default.

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