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• W2942115343 abstract "The authors report the detailed growth characterization of a molecular layer deposition chemistry that utilizes a cyclic azasilane, maleic anhydride, and water in a sequential reaction sequence. They observe a three stage growth for this chemistry during which the growth rate per cycle (GPC) is initially small and increases to large steady state values. Using a quartz crystal microbalance, they observe significant diffusion of maleic anhydride and cyclic azasilane into the film that causes the large GPC. They also observe that longer purge times between precursor exposures result in a smaller GPC and an increased number of cycles required to reach steady state and large GPCs. At higher substrate temperatures, growth is suppressed due to precursor desorption. Furthermore, after long inert gas purging after film growth, significant film mass loss occurs accompanied by a loss of porosity indicated by the lack of film absorption of maleic anhydride and cyclic azasilane precursors after restarting growth. They conclude that growth using this specific chemistry is largely dominated by precursor absorption and diffusion within the film, resulting in CVD-like reactions, rather than sequential, self-limiting surface reactions." @default.
• W2942115343 created "2019-05-03" @default.
• W2942115343 creator A5024163809 @default.
• W2942115343 creator A5066967897 @default.
• W2942115343 creator A5068152238 @default.
• W2942115343 date "2019-04-26" @default.
• W2942115343 modified "2023-09-27" @default.
• W2942115343 title "Quartz crystal microbalance study of precursor diffusion during molecular layer deposition using cyclic azasilane, maleic anhydride, and water" @default.
• W2942115343 cites W1967271445 @default.
• W2942115343 cites W1977292655 @default.
• W2942115343 cites W1992568289 @default.
• W2942115343 cites W2008193211 @default.
• W2942115343 cites W2008365303 @default.
• W2942115343 cites W2010716222 @default.
• W2942115343 cites W2023603575 @default.
• W2942115343 cites W2028881021 @default.
• W2942115343 cites W2031734182 @default.
• W2942115343 cites W2032681615 @default.
• W2942115343 cites W2043219308 @default.
• W2942115343 cites W2045064685 @default.
• W2942115343 cites W2059636064 @default.
• W2942115343 cites W2060807842 @default.
• W2942115343 cites W2072526654 @default.
• W2942115343 cites W2078805106 @default.
• W2942115343 cites W2111156460 @default.
• W2942115343 cites W2143177048 @default.
• W2942115343 cites W2158932701 @default.
• W2942115343 cites W2284386348 @default.
• W2942115343 cites W2295792941 @default.
• W2942115343 cites W2315389850 @default.
• W2942115343 cites W2565114939 @default.
• W2942115343 cites W2942115343 @default.
• W2942115343 cites W4236282065 @default.
• W2942115343 cites W759364117 @default.
• W2942115343 doi "https://doi.org/10.1116/1.5093509" @default.
• W2942115343 hasPublicationYear "2019" @default.
• W2942115343 type Work @default.
• W2942115343 sameAs 2942115343 @default.
• W2942115343 citedByCount "6" @default.
• W2942115343 countsByYear W29421153432019 @default.
• W2942115343 countsByYear W29421153432020 @default.
• W2942115343 countsByYear W29421153432022 @default.
• W2942115343 countsByYear W29421153432023 @default.
• W2942115343 crossrefType "journal-article" @default.
• W2942115343 hasAuthorship W2942115343A5024163809 @default.
• W2942115343 hasAuthorship W2942115343A5066967897 @default.
• W2942115343 hasAuthorship W2942115343A5068152238 @default.
• W2942115343 hasConcept C113196181 @default.
• W2942115343 hasConcept C121332964 @default.
• W2942115343 hasConcept C125287762 @default.
• W2942115343 hasConcept C127413603 @default.
• W2942115343 hasConcept C150394285 @default.
• W2942115343 hasConcept C15920480 @default.
• W2942115343 hasConcept C159985019 @default.
• W2942115343 hasConcept C162711632 @default.
• W2942115343 hasConcept C178790620 @default.
• W2942115343 hasConcept C185592680 @default.
• W2942115343 hasConcept C188027245 @default.
• W2942115343 hasConcept C192562407 @default.
• W2942115343 hasConcept C2777666793 @default.
• W2942115343 hasConcept C2779227376 @default.
• W2942115343 hasConcept C42360764 @default.
• W2942115343 hasConcept C521977710 @default.
• W2942115343 hasConcept C69357855 @default.
• W2942115343 hasConcept C97355855 @default.
• W2942115343 hasConcept C9996572 @default.
• W2942115343 hasConceptScore W2942115343C113196181 @default.
• W2942115343 hasConceptScore W2942115343C121332964 @default.
• W2942115343 hasConceptScore W2942115343C125287762 @default.
• W2942115343 hasConceptScore W2942115343C127413603 @default.
• W2942115343 hasConceptScore W2942115343C150394285 @default.
• W2942115343 hasConceptScore W2942115343C15920480 @default.
• W2942115343 hasConceptScore W2942115343C159985019 @default.
• W2942115343 hasConceptScore W2942115343C162711632 @default.
• W2942115343 hasConceptScore W2942115343C178790620 @default.
• W2942115343 hasConceptScore W2942115343C185592680 @default.
• W2942115343 hasConceptScore W2942115343C188027245 @default.
• W2942115343 hasConceptScore W2942115343C192562407 @default.
• W2942115343 hasConceptScore W2942115343C2777666793 @default.
• W2942115343 hasConceptScore W2942115343C2779227376 @default.
• W2942115343 hasConceptScore W2942115343C42360764 @default.
• W2942115343 hasConceptScore W2942115343C521977710 @default.
• W2942115343 hasConceptScore W2942115343C69357855 @default.
• W2942115343 hasConceptScore W2942115343C97355855 @default.
• W2942115343 hasConceptScore W2942115343C9996572 @default.
• W2942115343 hasFunder F4320307102 @default.
• W2942115343 hasFunder F4320308117 @default.
• W2942115343 hasIssue "3" @default.
• W2942115343 hasLocation W29421153431 @default.
• W2942115343 hasOpenAccess W2942115343 @default.
• W2942115343 hasPrimaryLocation W29421153431 @default.
• W2942115343 hasRelatedWork W1571675741 @default.
• W2942115343 hasRelatedWork W1984891107 @default.
• W2942115343 hasRelatedWork W2056604271 @default.
• W2942115343 hasRelatedWork W2085605139 @default.
• W2942115343 hasRelatedWork W2313736042 @default.
• W2942115343 hasRelatedWork W2380551708 @default.
• W2942115343 hasRelatedWork W2748952813 @default.
• W2942115343 hasRelatedWork W2899084033 @default.
• W2942115343 hasRelatedWork W4224436599 @default.

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