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• W2943239583 endingPage "107407" @default.
• W2943239583 startingPage "107407" @default.
• W2943239583 abstract "The paper presents results of measurements of spatial distributions of emission intensity of various lines of argon, atomic hydrogen, C2 and CH molecules in a wide pressure range from 40 to 500 Torr in diamond chemical vapor deposition (CVD) reactor. Microwave discharge plasma was maintained in reactor in continuous mode both in hydrogen and in a mixture of hydrogen-methane with a small addition of argon for diagnostic purposes. Intensity distribution of argon emission was characterized by a pronounced maximum near the substrate in reactor, which indicates that microwave power density (MWPD) absorbed in the plasma is also concentrated mainly near the substrate. Maximum emission intensity of hydrogen atoms is located at some distance from the substrate, and maxima of spatial distributions of emission intensity of carbon-containing species C2 and CH are shifted farther away from the substrate. This leads to the fact that the shape and size of discharge, which are observed visually or with help of a camera, significantly differ from the distribution of MWPD. There is a difference in the shape of spatial distribution of argon lines emission (750.4 nm and 811.5 nm), that can be explained by a change in the mechanism for quenching the excited levels of argon in different regions of discharge. This imposes some restrictions on the use of argon for measuring characteristics of microwave discharge." @default.
• W2943239583 created "2019-05-09" @default.
• W2943239583 creator A5007527113 @default.
• W2943239583 creator A5070756316 @default.
• W2943239583 creator A5075588479 @default.
• W2943239583 creator A5076779535 @default.
• W2943239583 creator A5080591111 @default.
• W2943239583 date "2019-08-01" @default.
• W2943239583 modified "2023-09-27" @default.
• W2943239583 title "Study of microwave discharge at high power density conditions in diamond chemical vapor deposition reactor by optical emission spectroscopy" @default.
• W2943239583 cites W1617713722 @default.
• W2943239583 cites W1983402117 @default.
• W2943239583 cites W1993083910 @default.
• W2943239583 cites W2001236033 @default.
• W2943239583 cites W2013692760 @default.
• W2943239583 cites W2018266149 @default.
• W2943239583 cites W2021893034 @default.
• W2943239583 cites W2024707364 @default.
• W2943239583 cites W2025531338 @default.
• W2943239583 cites W2036267434 @default.
• W2943239583 cites W2043702398 @default.
• W2943239583 cites W2054457664 @default.
• W2943239583 cites W2072040273 @default.
• W2943239583 cites W2083965462 @default.
• W2943239583 cites W2087225629 @default.
• W2943239583 cites W2112838036 @default.
• W2943239583 cites W2159753973 @default.
• W2943239583 cites W2231301565 @default.
• W2943239583 cites W2379312549 @default.
• W2943239583 cites W2759129447 @default.
• W2943239583 cites W2894509061 @default.
• W2943239583 cites W2943891213 @default.
• W2943239583 doi "https://doi.org/10.1016/j.diamond.2019.04.030" @default.
• W2943239583 hasPublicationYear "2019" @default.
• W2943239583 type Work @default.
• W2943239583 sameAs 2943239583 @default.
• W2943239583 citedByCount "16" @default.
• W2943239583 countsByYear W29432395832019 @default.
• W2943239583 countsByYear W29432395832020 @default.
• W2943239583 countsByYear W29432395832021 @default.
• W2943239583 countsByYear W29432395832022 @default.
• W2943239583 countsByYear W29432395832023 @default.
• W2943239583 crossrefType "journal-article" @default.
• W2943239583 hasAuthorship W2943239583A5007527113 @default.
• W2943239583 hasAuthorship W2943239583A5070756316 @default.
• W2943239583 hasAuthorship W2943239583A5075588479 @default.
• W2943239583 hasAuthorship W2943239583A5076779535 @default.
• W2943239583 hasAuthorship W2943239583A5080591111 @default.
• W2943239583 hasConcept C111368507 @default.
• W2943239583 hasConcept C113196181 @default.
• W2943239583 hasConcept C120665830 @default.
• W2943239583 hasConcept C121332964 @default.
• W2943239583 hasConcept C121745418 @default.
• W2943239583 hasConcept C127313418 @default.
• W2943239583 hasConcept C1276947 @default.
• W2943239583 hasConcept C178790620 @default.
• W2943239583 hasConcept C181500209 @default.
• W2943239583 hasConcept C184779094 @default.
• W2943239583 hasConcept C185592680 @default.
• W2943239583 hasConcept C192562407 @default.
• W2943239583 hasConcept C2776921476 @default.
• W2943239583 hasConcept C2777289219 @default.
• W2943239583 hasConcept C43617362 @default.
• W2943239583 hasConcept C44838205 @default.
• W2943239583 hasConcept C4839761 @default.
• W2943239583 hasConcept C49040817 @default.
• W2943239583 hasConcept C512968161 @default.
• W2943239583 hasConcept C54725983 @default.
• W2943239583 hasConcept C547737533 @default.
• W2943239583 hasConcept C57410435 @default.
• W2943239583 hasConcept C62520636 @default.
• W2943239583 hasConcept C85080765 @default.
• W2943239583 hasConcept C91881484 @default.
• W2943239583 hasConcept C96141758 @default.
• W2943239583 hasConceptScore W2943239583C111368507 @default.
• W2943239583 hasConceptScore W2943239583C113196181 @default.
• W2943239583 hasConceptScore W2943239583C120665830 @default.
• W2943239583 hasConceptScore W2943239583C121332964 @default.
• W2943239583 hasConceptScore W2943239583C121745418 @default.
• W2943239583 hasConceptScore W2943239583C127313418 @default.
• W2943239583 hasConceptScore W2943239583C1276947 @default.
• W2943239583 hasConceptScore W2943239583C178790620 @default.
• W2943239583 hasConceptScore W2943239583C181500209 @default.
• W2943239583 hasConceptScore W2943239583C184779094 @default.
• W2943239583 hasConceptScore W2943239583C185592680 @default.
• W2943239583 hasConceptScore W2943239583C192562407 @default.
• W2943239583 hasConceptScore W2943239583C2776921476 @default.
• W2943239583 hasConceptScore W2943239583C2777289219 @default.
• W2943239583 hasConceptScore W2943239583C43617362 @default.
• W2943239583 hasConceptScore W2943239583C44838205 @default.
• W2943239583 hasConceptScore W2943239583C4839761 @default.
• W2943239583 hasConceptScore W2943239583C49040817 @default.
• W2943239583 hasConceptScore W2943239583C512968161 @default.
• W2943239583 hasConceptScore W2943239583C54725983 @default.
• W2943239583 hasConceptScore W2943239583C547737533 @default.
• W2943239583 hasConceptScore W2943239583C57410435 @default.
• W2943239583 hasConceptScore W2943239583C62520636 @default.
• W2943239583 hasConceptScore W2943239583C85080765 @default.

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