Matches in SemOpenAlex for { <https://semopenalex.org/work/W2943384194> ?p ?o ?g. }
- W2943384194 endingPage "14" @default.
- W2943384194 startingPage "8" @default.
- W2943384194 abstract "High-quality Al0.37In0.63N layers have been grown by reactive radio-frequency (RF) sputtering on sapphire, glass and Si (111) at low substrate temperature (from room temperature to 300{deg}C). Their structural, chemical and optical properties are investigated as a function of the growth temperature and type of substrate. X-ray diffraction measurements reveal that all samples have a wurtzite crystallographic structure oriented with the c-axis perpendicular to the substrate surface, without parasitic orientations. The layers preserve their Al content at 37 % for the whole range of studied growth temperature. The samples grown at low temperatures (RT and 100{deg}C) are almost fully relaxed, showing a closely-packed columnar-like morphology with an RMS surface roughness below 3 nm. The optical band gap energy estimated for layers grown at RT and 100{deg}C on sapphire and glass substrates is of ~2.4 eV while it red shifts to ~2.03 eV at 300{deg}C. The feasibility of growing high crystalline quality AlInN at low growth temperature even on amorphous substrates open new application fields for this material like surface plasmon resonance sensors developed directly on optical fibers and other applications where temperature is a handicap and the material cannot be heated." @default.
- W2943384194 created "2019-05-09" @default.
- W2943384194 creator A5001479148 @default.
- W2943384194 creator A5013213200 @default.
- W2943384194 creator A5048771183 @default.
- W2943384194 creator A5057599869 @default.
- W2943384194 creator A5058914708 @default.
- W2943384194 creator A5066484973 @default.
- W2943384194 date "2019-09-01" @default.
- W2943384194 modified "2023-10-15" @default.
- W2943384194 title "High quality Al0.37In0.63N layers grown at low temperature (<300 °C) by radio-frequency sputtering" @default.
- W2943384194 cites W1545531820 @default.
- W2943384194 cites W1563079018 @default.
- W2943384194 cites W1618113926 @default.
- W2943384194 cites W1882611525 @default.
- W2943384194 cites W1975575528 @default.
- W2943384194 cites W1979362058 @default.
- W2943384194 cites W1985761757 @default.
- W2943384194 cites W1993238155 @default.
- W2943384194 cites W1995421517 @default.
- W2943384194 cites W1995727714 @default.
- W2943384194 cites W1995837642 @default.
- W2943384194 cites W2007128687 @default.
- W2943384194 cites W2007887811 @default.
- W2943384194 cites W2016295172 @default.
- W2943384194 cites W2017946252 @default.
- W2943384194 cites W2018596312 @default.
- W2943384194 cites W2019077266 @default.
- W2943384194 cites W2019078558 @default.
- W2943384194 cites W2030461108 @default.
- W2943384194 cites W2031975877 @default.
- W2943384194 cites W2032023381 @default.
- W2943384194 cites W2035224304 @default.
- W2943384194 cites W2047205370 @default.
- W2943384194 cites W2051884677 @default.
- W2943384194 cites W2058717737 @default.
- W2943384194 cites W2058723660 @default.
- W2943384194 cites W2060429741 @default.
- W2943384194 cites W2062003744 @default.
- W2943384194 cites W2063040839 @default.
- W2943384194 cites W2063354978 @default.
- W2943384194 cites W2065849768 @default.
- W2943384194 cites W2070232974 @default.
- W2943384194 cites W2074631662 @default.
- W2943384194 cites W2076167733 @default.
- W2943384194 cites W2082690820 @default.
- W2943384194 cites W2088194154 @default.
- W2943384194 cites W2090143534 @default.
- W2943384194 cites W2094411087 @default.
- W2943384194 cites W2103101933 @default.
- W2943384194 cites W2118200423 @default.
- W2943384194 cites W2122977439 @default.
- W2943384194 cites W2129104348 @default.
- W2943384194 cites W2145505151 @default.
- W2943384194 cites W214713297 @default.
- W2943384194 cites W2171784610 @default.
- W2943384194 cites W2239422125 @default.
- W2943384194 cites W2339908216 @default.
- W2943384194 cites W2346891804 @default.
- W2943384194 cites W2950229617 @default.
- W2943384194 doi "https://doi.org/10.1016/j.mssp.2019.04.029" @default.
- W2943384194 hasPublicationYear "2019" @default.
- W2943384194 type Work @default.
- W2943384194 sameAs 2943384194 @default.
- W2943384194 citedByCount "7" @default.
- W2943384194 countsByYear W29433841942020 @default.
- W2943384194 countsByYear W29433841942021 @default.
- W2943384194 countsByYear W29433841942022 @default.
- W2943384194 crossrefType "journal-article" @default.
- W2943384194 hasAuthorship W2943384194A5001479148 @default.
- W2943384194 hasAuthorship W2943384194A5013213200 @default.
- W2943384194 hasAuthorship W2943384194A5048771183 @default.
- W2943384194 hasAuthorship W2943384194A5057599869 @default.
- W2943384194 hasAuthorship W2943384194A5058914708 @default.
- W2943384194 hasAuthorship W2943384194A5066484973 @default.
- W2943384194 hasBestOaLocation W29433841942 @default.
- W2943384194 hasConcept C107365816 @default.
- W2943384194 hasConcept C111368507 @default.
- W2943384194 hasConcept C113196181 @default.
- W2943384194 hasConcept C120665830 @default.
- W2943384194 hasConcept C121332964 @default.
- W2943384194 hasConcept C127313418 @default.
- W2943384194 hasConcept C159985019 @default.
- W2943384194 hasConcept C171250308 @default.
- W2943384194 hasConcept C185592680 @default.
- W2943384194 hasConcept C19067145 @default.
- W2943384194 hasConcept C191897082 @default.
- W2943384194 hasConcept C192562407 @default.
- W2943384194 hasConcept C22423302 @default.
- W2943384194 hasConcept C2777289219 @default.
- W2943384194 hasConcept C2780064504 @default.
- W2943384194 hasConcept C3045981 @default.
- W2943384194 hasConcept C43617362 @default.
- W2943384194 hasConcept C49040817 @default.
- W2943384194 hasConcept C520434653 @default.
- W2943384194 hasConcept C535196362 @default.
- W2943384194 hasConcept C56052488 @default.
- W2943384194 hasConcept C8010536 @default.