Matches in SemOpenAlex for { <https://semopenalex.org/work/W2943669102> ?p ?o ?g. }
Showing items 1 to 76 of
76
with 100 items per page.
- W2943669102 abstract "The electrical properties and the conductive mechanism of HfOxNy gate dielectric films deposited by dc sputtering were studied. The results indicate that higher temperature annealing in nitride ambient is helpful to improve the electrical properties of HfOxNy gate dielectric films. And at the low electric field the 1-V characteristics obeys the Ohm's law, while at the moderate field, the conductive mechanism is according to the space charge limited current (SCLC) theory. The leakage current density is not high that indicate that HfOxNy is a promising material instead of SiO2." @default.
- W2943669102 created "2019-05-09" @default.
- W2943669102 creator A5066030719 @default.
- W2943669102 creator A5078685752 @default.
- W2943669102 creator A5090956517 @default.
- W2943669102 date "2006-12-01" @default.
- W2943669102 modified "2023-09-27" @default.
- W2943669102 title "Electrical properties of HfOxNy gate dielectrics" @default.
- W2943669102 hasPublicationYear "2006" @default.
- W2943669102 type Work @default.
- W2943669102 sameAs 2943669102 @default.
- W2943669102 citedByCount "0" @default.
- W2943669102 crossrefType "journal-article" @default.
- W2943669102 hasAuthorship W2943669102A5066030719 @default.
- W2943669102 hasAuthorship W2943669102A5078685752 @default.
- W2943669102 hasAuthorship W2943669102A5090956517 @default.
- W2943669102 hasConcept C119599485 @default.
- W2943669102 hasConcept C121332964 @default.
- W2943669102 hasConcept C127413603 @default.
- W2943669102 hasConcept C133386390 @default.
- W2943669102 hasConcept C159985019 @default.
- W2943669102 hasConcept C165801399 @default.
- W2943669102 hasConcept C166972891 @default.
- W2943669102 hasConcept C172385210 @default.
- W2943669102 hasConcept C192562407 @default.
- W2943669102 hasConcept C202374169 @default.
- W2943669102 hasConcept C26873012 @default.
- W2943669102 hasConcept C2777855556 @default.
- W2943669102 hasConcept C49040817 @default.
- W2943669102 hasConcept C60799052 @default.
- W2943669102 hasConcept C61696701 @default.
- W2943669102 hasConcept C62520636 @default.
- W2943669102 hasConceptScore W2943669102C119599485 @default.
- W2943669102 hasConceptScore W2943669102C121332964 @default.
- W2943669102 hasConceptScore W2943669102C127413603 @default.
- W2943669102 hasConceptScore W2943669102C133386390 @default.
- W2943669102 hasConceptScore W2943669102C159985019 @default.
- W2943669102 hasConceptScore W2943669102C165801399 @default.
- W2943669102 hasConceptScore W2943669102C166972891 @default.
- W2943669102 hasConceptScore W2943669102C172385210 @default.
- W2943669102 hasConceptScore W2943669102C192562407 @default.
- W2943669102 hasConceptScore W2943669102C202374169 @default.
- W2943669102 hasConceptScore W2943669102C26873012 @default.
- W2943669102 hasConceptScore W2943669102C2777855556 @default.
- W2943669102 hasConceptScore W2943669102C49040817 @default.
- W2943669102 hasConceptScore W2943669102C60799052 @default.
- W2943669102 hasConceptScore W2943669102C61696701 @default.
- W2943669102 hasConceptScore W2943669102C62520636 @default.
- W2943669102 hasLocation W29436691021 @default.
- W2943669102 hasOpenAccess W2943669102 @default.
- W2943669102 hasPrimaryLocation W29436691021 @default.
- W2943669102 hasRelatedWork W1602115141 @default.
- W2943669102 hasRelatedWork W1619095121 @default.
- W2943669102 hasRelatedWork W1984395741 @default.
- W2943669102 hasRelatedWork W1993664112 @default.
- W2943669102 hasRelatedWork W2000894254 @default.
- W2943669102 hasRelatedWork W2002058260 @default.
- W2943669102 hasRelatedWork W2003693008 @default.
- W2943669102 hasRelatedWork W2019598320 @default.
- W2943669102 hasRelatedWork W2060312913 @default.
- W2943669102 hasRelatedWork W2060436687 @default.
- W2943669102 hasRelatedWork W2070792739 @default.
- W2943669102 hasRelatedWork W2082068286 @default.
- W2943669102 hasRelatedWork W2084611752 @default.
- W2943669102 hasRelatedWork W2126262663 @default.
- W2943669102 hasRelatedWork W2134190852 @default.
- W2943669102 hasRelatedWork W2357232909 @default.
- W2943669102 hasRelatedWork W2535045777 @default.
- W2943669102 hasRelatedWork W2799778719 @default.
- W2943669102 hasRelatedWork W3022292651 @default.
- W2943669102 hasRelatedWork W568339155 @default.
- W2943669102 hasVolume "27" @default.
- W2943669102 isParatext "false" @default.
- W2943669102 isRetracted "false" @default.
- W2943669102 magId "2943669102" @default.
- W2943669102 workType "article" @default.