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- W2944536675 abstract "Germanium photodetector, formed with a self-aligned dry etching method, together with a tensile silicon nitride sidewall stressor, exhibits a strain profile with improved uniformity and a $sim 2times$ enhancement on the quantum efficiency at the $L$ -band, © 2019 The Author(s)" @default.
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- W2944536675 date "2019-05-05" @default.
- W2944536675 modified "2023-09-23" @default.
- W2944536675 title "Uniformly Tensile-Strained Germanium Enabled by a Recessed Nitride Stressor for Efficient Integrated Photodetectors at Longer Wavelengths" @default.
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- W2944536675 doi "https://doi.org/10.23919/cleo.2019.8749399" @default.
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