FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2944640843> ?p ?o ?g. }

• W2944640843 endingPage "142" @default.
• W2944640843 startingPage "136" @default.
• W2944640843 abstract "Diamond has been utilized for various applications such as ultra-precision cutting tools and power semiconductor devices. Chemical mechanical polishing (CMP) is an effective processing method for the planarization of diamond, but the removal mechanism of the carbon atoms in diamond CMP is still under debate. Here, the atomic mechanism of removal in diamond CMP with OH environment was investigated using the molecular dynamics (MD) simulation method of reactive force field (ReaxFF). The simulation results show that with chemical action alone, the substrate surface adsorbs O, H or OH to form C–O, C–H, C–OH, etc., but no carbon atoms are removed from the diamond substrate. However, when the mechanical sliding is added, some carbon atoms are removed in form of CO or CO2, and the other carbon atoms are removed by the attachment to abrasive. The formation of C–C bonds between the diamond substrate and the abrasive or the formation of C–O bonds is a prerequisite for subsequent sliding removal. This work contributes to understanding the removal mechanism of diamond CMP at the atomic level." @default.
• W2944640843 created "2019-05-16" @default.
• W2944640843 creator A5011650519 @default.
• W2944640843 creator A5022358678 @default.
• W2944640843 creator A5024969519 @default.
• W2944640843 creator A5051875003 @default.
• W2944640843 creator A5087202703 @default.
• W2944640843 date "2019-08-01" @default.
• W2944640843 modified "2023-10-01" @default.
• W2944640843 title "Insights into the atomistic behavior in diamond chemical mechanical polishing with OH environment using ReaxFF molecular dynamics simulation" @default.
• W2944640843 cites W1888616392 @default.
• W2944640843 cites W1965821181 @default.
• W2944640843 cites W1968451940 @default.
• W2944640843 cites W1973607619 @default.
• W2944640843 cites W1979680610 @default.
• W2944640843 cites W1980776093 @default.
• W2944640843 cites W1983638732 @default.
• W2944640843 cites W1988385989 @default.
• W2944640843 cites W1991794210 @default.
• W2944640843 cites W1998645060 @default.
• W2944640843 cites W2000195080 @default.
• W2944640843 cites W2005337271 @default.
• W2944640843 cites W2005944647 @default.
• W2944640843 cites W2012193654 @default.
• W2944640843 cites W2019465613 @default.
• W2944640843 cites W2023616054 @default.
• W2944640843 cites W2026249555 @default.
• W2944640843 cites W2032328042 @default.
• W2944640843 cites W2035266068 @default.
• W2944640843 cites W2040275462 @default.
• W2944640843 cites W2041057274 @default.
• W2944640843 cites W2042271653 @default.
• W2944640843 cites W2043424687 @default.
• W2944640843 cites W2047968138 @default.
• W2944640843 cites W2077243211 @default.
• W2944640843 cites W2082755274 @default.
• W2944640843 cites W2089364141 @default.
• W2944640843 cites W2093273369 @default.
• W2944640843 cites W2093976799 @default.
• W2944640843 cites W2103242559 @default.
• W2944640843 cites W2111169173 @default.
• W2944640843 cites W2141784245 @default.
• W2944640843 cites W2146678921 @default.
• W2944640843 cites W2155155530 @default.
• W2944640843 cites W2170665315 @default.
• W2944640843 cites W2511071951 @default.
• W2944640843 cites W2527605937 @default.
• W2944640843 cites W2754369971 @default.
• W2944640843 cites W2780355582 @default.
• W2944640843 cites W2790927011 @default.
• W2944640843 cites W2888592458 @default.
• W2944640843 cites W2893100282 @default.
• W2944640843 cites W2900301242 @default.
• W2944640843 doi "https://doi.org/10.1016/j.commatsci.2019.05.001" @default.
• W2944640843 hasPublicationYear "2019" @default.
• W2944640843 type Work @default.
• W2944640843 sameAs 2944640843 @default.
• W2944640843 citedByCount "17" @default.
• W2944640843 countsByYear W29446408432019 @default.
• W2944640843 countsByYear W29446408432020 @default.
• W2944640843 countsByYear W29446408432021 @default.
• W2944640843 countsByYear W29446408432022 @default.
• W2944640843 countsByYear W29446408432023 @default.
• W2944640843 crossrefType "journal-article" @default.
• W2944640843 hasAuthorship W2944640843A5011650519 @default.
• W2944640843 hasAuthorship W2944640843A5022358678 @default.
• W2944640843 hasAuthorship W2944640843A5024969519 @default.
• W2944640843 hasAuthorship W2944640843A5051875003 @default.
• W2944640843 hasAuthorship W2944640843A5087202703 @default.
• W2944640843 hasBestOaLocation W29446408431 @default.
• W2944640843 hasConcept C104779481 @default.
• W2944640843 hasConcept C111368507 @default.
• W2944640843 hasConcept C127313418 @default.
• W2944640843 hasConcept C127413603 @default.
• W2944640843 hasConcept C138113353 @default.
• W2944640843 hasConcept C140205800 @default.
• W2944640843 hasConcept C147597530 @default.
• W2944640843 hasConcept C159467904 @default.
• W2944640843 hasConcept C159985019 @default.
• W2944640843 hasConcept C171250308 @default.
• W2944640843 hasConcept C178213299 @default.
• W2944640843 hasConcept C178790620 @default.
• W2944640843 hasConcept C180088628 @default.
• W2944640843 hasConcept C185592680 @default.
• W2944640843 hasConcept C192562407 @default.
• W2944640843 hasConcept C2776372370 @default.
• W2944640843 hasConcept C2776653683 @default.
• W2944640843 hasConcept C2776921476 @default.
• W2944640843 hasConcept C2777289219 @default.
• W2944640843 hasConcept C2780957350 @default.
• W2944640843 hasConcept C42360764 @default.
• W2944640843 hasConcept C59593255 @default.
• W2944640843 hasConceptScore W2944640843C104779481 @default.
• W2944640843 hasConceptScore W2944640843C111368507 @default.
• W2944640843 hasConceptScore W2944640843C127313418 @default.
• W2944640843 hasConceptScore W2944640843C127413603 @default.
• W2944640843 hasConceptScore W2944640843C138113353 @default.
• W2944640843 hasConceptScore W2944640843C140205800 @default.

• next