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- W2945148960 abstract "We present a review of recent progress in quantitative performance assessment of optical interferometry. Specifically, a three-level framework is introduced for evaluating the sensitivity of optical pathlength measurement. Its application is demonstrated for whitelight interferometry and wavelength shifting interferometry. It shows that there is a performance gap, potentially significant, between currently achieved measurement sensitivity and the sensitivity limit of the system. The framework allows one to accurately assess hardware performance, identify sources of degradation, and devise optimization strategy. It may offer guidance to lower sensor cost and improve commercial competitiveness." @default.
- W2945148960 created "2019-05-29" @default.
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- W2945148960 date "2019-05-14" @default.
- W2945148960 modified "2023-09-27" @default.
- W2945148960 title "Performance assessment of interferometric sensing" @default.
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- W2945148960 doi "https://doi.org/10.1117/12.2521339" @default.
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