Matches in SemOpenAlex for { <https://semopenalex.org/work/W2945298665> ?p ?o ?g. }
- W2945298665 endingPage "219" @default.
- W2945298665 startingPage "214" @default.
- W2945298665 abstract "We study the effect of plasma-enhanced chemical vapor deposition (PECVD) SiNx process to atomic layer deposited (ALD) Al2O3 films on crystalline silicon surface passivation. The plasma-induced damage on Al2O3 films is affected by the methods of PECVD process (direct or microwave), and the states (as-deposited or annealed) and the thickness of ALD-Al2O3 films. The passivation degradation may be related to the doping of Si, N and H atoms into Al2O3 films during PECVD process, and is mainly manifested in the form of affecting interface defect density rather than negative fixed charge density. In particular, the annealed thick Al2O3 films with direct-PECVD SiNx process show more severe passivation degradation. Anyhow, to the great degree, the passivation quality can be repaired and further improved by post-annealing. Low temperature long time annealing can effectively increase the lifetime of the ALD-Al2O3/PECVD-SiNx stacks, while it cannot be simply replaced by a rapid high temperature firing. By post-annealing repairing, an absolute 0.13% increase in efficiency can be achieved for p-PERC solar cells." @default.
- W2945298665 created "2019-05-29" @default.
- W2945298665 creator A5011688089 @default.
- W2945298665 creator A5017651188 @default.
- W2945298665 creator A5037785133 @default.
- W2945298665 creator A5052720623 @default.
- W2945298665 creator A5059895037 @default.
- W2945298665 creator A5078149059 @default.
- W2945298665 creator A5079313942 @default.
- W2945298665 creator A5088737482 @default.
- W2945298665 date "2019-09-01" @default.
- W2945298665 modified "2023-10-16" @default.
- W2945298665 title "Plasma-induced damage and annealing repairing in ALD-Al2O3/PECVD-SiNx stacks" @default.
- W2945298665 cites W1614676509 @default.
- W2945298665 cites W1885836091 @default.
- W2945298665 cites W1945496849 @default.
- W2945298665 cites W1955194042 @default.
- W2945298665 cites W1966497072 @default.
- W2945298665 cites W1977053792 @default.
- W2945298665 cites W1995045781 @default.
- W2945298665 cites W1999499650 @default.
- W2945298665 cites W2006294331 @default.
- W2945298665 cites W2019267643 @default.
- W2945298665 cites W2023775961 @default.
- W2945298665 cites W2035974690 @default.
- W2945298665 cites W2043047928 @default.
- W2945298665 cites W2057127888 @default.
- W2945298665 cites W2057493969 @default.
- W2945298665 cites W2063137548 @default.
- W2945298665 cites W2070687134 @default.
- W2945298665 cites W2071994816 @default.
- W2945298665 cites W2084690397 @default.
- W2945298665 cites W2092031154 @default.
- W2945298665 cites W2095710757 @default.
- W2945298665 cites W2152536483 @default.
- W2945298665 cites W2154027555 @default.
- W2945298665 cites W2154103482 @default.
- W2945298665 cites W2163613573 @default.
- W2945298665 cites W2404647545 @default.
- W2945298665 cites W2522735923 @default.
- W2945298665 cites W2551439336 @default.
- W2945298665 cites W2577098032 @default.
- W2945298665 cites W2596723738 @default.
- W2945298665 cites W2597381831 @default.
- W2945298665 cites W2800578954 @default.
- W2945298665 doi "https://doi.org/10.1016/j.mssp.2019.05.010" @default.
- W2945298665 hasPublicationYear "2019" @default.
- W2945298665 type Work @default.
- W2945298665 sameAs 2945298665 @default.
- W2945298665 citedByCount "9" @default.
- W2945298665 countsByYear W29452986652019 @default.
- W2945298665 countsByYear W29452986652020 @default.
- W2945298665 countsByYear W29452986652021 @default.
- W2945298665 countsByYear W29452986652022 @default.
- W2945298665 countsByYear W29452986652023 @default.
- W2945298665 crossrefType "journal-article" @default.
- W2945298665 hasAuthorship W2945298665A5011688089 @default.
- W2945298665 hasAuthorship W2945298665A5017651188 @default.
- W2945298665 hasAuthorship W2945298665A5037785133 @default.
- W2945298665 hasAuthorship W2945298665A5052720623 @default.
- W2945298665 hasAuthorship W2945298665A5059895037 @default.
- W2945298665 hasAuthorship W2945298665A5078149059 @default.
- W2945298665 hasAuthorship W2945298665A5079313942 @default.
- W2945298665 hasAuthorship W2945298665A5088737482 @default.
- W2945298665 hasConcept C159985019 @default.
- W2945298665 hasConcept C171250308 @default.
- W2945298665 hasConcept C19067145 @default.
- W2945298665 hasConcept C192562407 @default.
- W2945298665 hasConcept C2777855556 @default.
- W2945298665 hasConcept C2779227376 @default.
- W2945298665 hasConcept C33574316 @default.
- W2945298665 hasConcept C38347018 @default.
- W2945298665 hasConcept C49040817 @default.
- W2945298665 hasConcept C544956773 @default.
- W2945298665 hasConcept C57410435 @default.
- W2945298665 hasConcept C69544855 @default.
- W2945298665 hasConceptScore W2945298665C159985019 @default.
- W2945298665 hasConceptScore W2945298665C171250308 @default.
- W2945298665 hasConceptScore W2945298665C19067145 @default.
- W2945298665 hasConceptScore W2945298665C192562407 @default.
- W2945298665 hasConceptScore W2945298665C2777855556 @default.
- W2945298665 hasConceptScore W2945298665C2779227376 @default.
- W2945298665 hasConceptScore W2945298665C33574316 @default.
- W2945298665 hasConceptScore W2945298665C38347018 @default.
- W2945298665 hasConceptScore W2945298665C49040817 @default.
- W2945298665 hasConceptScore W2945298665C544956773 @default.
- W2945298665 hasConceptScore W2945298665C57410435 @default.
- W2945298665 hasConceptScore W2945298665C69544855 @default.
- W2945298665 hasLocation W29452986651 @default.
- W2945298665 hasOpenAccess W2945298665 @default.
- W2945298665 hasPrimaryLocation W29452986651 @default.
- W2945298665 hasRelatedWork W1506642512 @default.
- W2945298665 hasRelatedWork W2038485973 @default.
- W2945298665 hasRelatedWork W2102841566 @default.
- W2945298665 hasRelatedWork W2135904835 @default.
- W2945298665 hasRelatedWork W2164875540 @default.
- W2945298665 hasRelatedWork W2527080606 @default.
- W2945298665 hasRelatedWork W2613264833 @default.