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- W2945552692 abstract "We developed a low-temperature silicon nitride (SiNx) film deposition technique using ultraviolet (UV)-irradiated ammonia (NH3) as the reactant gas. In this work, to determine the effect of UV-irradiated NH3, we deposited SiNx films using the developed chemical vapor deposition technique and then evaluated their characteristics. The energy of UV light was only used to excite NH3. Disilane (Si2H6) without UV irradiation was used as the precursor gas. The results demonstrated that using UV-irradiated NH3 as the reactant gas enabled deposition of SiNx films at 30 and 450°C. The N/Si ratio of the SiNx film deposited at 450°C was close to 1.33." @default.
- W2945552692 created "2019-05-29" @default.
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- W2945552692 date "2019-04-08" @default.
- W2945552692 modified "2023-09-27" @default.
- W2945552692 title "SiNx Deposition at Low Temperature Using UV-Irradiated NH3" @default.
- W2945552692 doi "https://doi.org/10.1149/08904.0031ecst" @default.
- W2945552692 hasPublicationYear "2019" @default.
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