Matches in SemOpenAlex for { <https://semopenalex.org/work/W2945679178> ?p ?o ?g. }
Showing items 1 to 99 of
99
with 100 items per page.
- W2945679178 endingPage "7883" @default.
- W2945679178 startingPage "7875" @default.
- W2945679178 abstract "This paper presents a resonant pressure microsensor composed of a glass cap for hermetic package, an SOI layer with sensing elements and a glass base for stress isolation. Tested pressure under measurement bends the pressure sensitive diaphragm, producing frequency shifts of underlining resonators while the stress isolation layer can work as a cushion layer to minimize environmental temperature and mechanical disturbances. Numerical simulations were conducted, finding that the stress isolation layer can decrease the axial stresses of the resonators from +16 to +2 MPa (high-temperature challenging), from −12 to −5 MPa (low-temperature challenging), and from 2.5 to 0.5 MPa (mechanical challenging). The proposed microsensor was fabricated based on conventional microfabrication and characterized with comparison to the counterpart without the stress isolation layer, producing an accuracy of 0.01% FS vs. 1% FS, a temperature shift of 37 ppm versus 10088 ppm, a pressure shift of 45 ppm versus 777 ppm, a temperature hysteresis error of 21 ppm versus 187 ppm, a pressure hysteresis error of 22 ppm versus 265 ppm, a temperature repeatability error of 15 ppm versus 703 ppm, a pressure repeatability error of 21 ppm versus 36 ppm, and a long-term stability of >7 months versus 69 days. These results validated the functionality of the proposed resonant pressure microsensor with the stress isolation layer, which may be potentially used as an effective tool in the fields of aerospace aviation, industrial control, and meteorological monitoring." @default.
- W2945679178 created "2019-05-29" @default.
- W2945679178 creator A5009951694 @default.
- W2945679178 creator A5010696218 @default.
- W2945679178 creator A5019555517 @default.
- W2945679178 creator A5032243296 @default.
- W2945679178 creator A5034084187 @default.
- W2945679178 creator A5047352969 @default.
- W2945679178 creator A5049215297 @default.
- W2945679178 creator A5050851728 @default.
- W2945679178 creator A5062851869 @default.
- W2945679178 date "2019-09-15" @default.
- W2945679178 modified "2023-10-09" @default.
- W2945679178 title "A Resonant Pressure Microsensor With a Stress Isolation Layer" @default.
- W2945679178 cites W1954875177 @default.
- W2945679178 cites W1970227858 @default.
- W2945679178 cites W1979147366 @default.
- W2945679178 cites W1988062883 @default.
- W2945679178 cites W2030890954 @default.
- W2945679178 cites W2035394251 @default.
- W2945679178 cites W2048616414 @default.
- W2945679178 cites W2069767940 @default.
- W2945679178 cites W2082935391 @default.
- W2945679178 cites W2088161664 @default.
- W2945679178 cites W2089073173 @default.
- W2945679178 cites W2098508403 @default.
- W2945679178 cites W2099714921 @default.
- W2945679178 cites W2131753857 @default.
- W2945679178 cites W2562590922 @default.
- W2945679178 cites W2591495025 @default.
- W2945679178 cites W2908505878 @default.
- W2945679178 cites W3145353849 @default.
- W2945679178 doi "https://doi.org/10.1109/jsen.2019.2918771" @default.
- W2945679178 hasPublicationYear "2019" @default.
- W2945679178 type Work @default.
- W2945679178 sameAs 2945679178 @default.
- W2945679178 citedByCount "3" @default.
- W2945679178 countsByYear W29456791782019 @default.
- W2945679178 countsByYear W29456791782021 @default.
- W2945679178 countsByYear W29456791782022 @default.
- W2945679178 crossrefType "journal-article" @default.
- W2945679178 hasAuthorship W2945679178A5009951694 @default.
- W2945679178 hasAuthorship W2945679178A5010696218 @default.
- W2945679178 hasAuthorship W2945679178A5019555517 @default.
- W2945679178 hasAuthorship W2945679178A5032243296 @default.
- W2945679178 hasAuthorship W2945679178A5034084187 @default.
- W2945679178 hasAuthorship W2945679178A5047352969 @default.
- W2945679178 hasAuthorship W2945679178A5049215297 @default.
- W2945679178 hasAuthorship W2945679178A5050851728 @default.
- W2945679178 hasAuthorship W2945679178A5062851869 @default.
- W2945679178 hasConcept C127413603 @default.
- W2945679178 hasConcept C138885662 @default.
- W2945679178 hasConcept C159985019 @default.
- W2945679178 hasConcept C192562407 @default.
- W2945679178 hasConcept C21036866 @default.
- W2945679178 hasConcept C2775941552 @default.
- W2945679178 hasConcept C2779227376 @default.
- W2945679178 hasConcept C41325743 @default.
- W2945679178 hasConcept C41895202 @default.
- W2945679178 hasConcept C49040817 @default.
- W2945679178 hasConcept C78519656 @default.
- W2945679178 hasConcept C86803240 @default.
- W2945679178 hasConcept C89423630 @default.
- W2945679178 hasConceptScore W2945679178C127413603 @default.
- W2945679178 hasConceptScore W2945679178C138885662 @default.
- W2945679178 hasConceptScore W2945679178C159985019 @default.
- W2945679178 hasConceptScore W2945679178C192562407 @default.
- W2945679178 hasConceptScore W2945679178C21036866 @default.
- W2945679178 hasConceptScore W2945679178C2775941552 @default.
- W2945679178 hasConceptScore W2945679178C2779227376 @default.
- W2945679178 hasConceptScore W2945679178C41325743 @default.
- W2945679178 hasConceptScore W2945679178C41895202 @default.
- W2945679178 hasConceptScore W2945679178C49040817 @default.
- W2945679178 hasConceptScore W2945679178C78519656 @default.
- W2945679178 hasConceptScore W2945679178C86803240 @default.
- W2945679178 hasConceptScore W2945679178C89423630 @default.
- W2945679178 hasFunder F4320321001 @default.
- W2945679178 hasFunder F4320335777 @default.
- W2945679178 hasIssue "18" @default.
- W2945679178 hasLocation W29456791781 @default.
- W2945679178 hasOpenAccess W2945679178 @default.
- W2945679178 hasPrimaryLocation W29456791781 @default.
- W2945679178 hasRelatedWork W1968777335 @default.
- W2945679178 hasRelatedWork W1993889649 @default.
- W2945679178 hasRelatedWork W2071264383 @default.
- W2945679178 hasRelatedWork W2121524308 @default.
- W2945679178 hasRelatedWork W2292675962 @default.
- W2945679178 hasRelatedWork W2330747830 @default.
- W2945679178 hasRelatedWork W2509384934 @default.
- W2945679178 hasRelatedWork W2961581639 @default.
- W2945679178 hasRelatedWork W2985940919 @default.
- W2945679178 hasRelatedWork W3127524829 @default.
- W2945679178 hasVolume "19" @default.
- W2945679178 isParatext "false" @default.
- W2945679178 isRetracted "false" @default.
- W2945679178 magId "2945679178" @default.
- W2945679178 workType "article" @default.