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• W2945789213 endingPage "SDDF06" @default.
• W2945789213 startingPage "SDDF06" @default.
• W2945789213 abstract "The influence of a polyethylene glycol (PEG) additive on the morphology of 10 μm diameter holes in a Si(001) substrate formed by metal-assisted chemical etching (MacEtch) was investigated. The addition of PEG to the etching solution suppressed deformation of the Au catalyst film, so that the verticality of the etched holes was significantly improved. There was a strong correlation between the deformation of the thin (10 nm) Au catalyst film and the bending of etched holes during the MacEtch process." @default.
• W2945789213 created "2019-05-29" @default.
• W2945789213 creator A5016807224 @default.
• W2945789213 creator A5050728257 @default.
• W2945789213 creator A5067629492 @default.
• W2945789213 creator A5071915572 @default.
• W2945789213 date "2019-05-16" @default.
• W2945789213 modified "2023-10-17" @default.
• W2945789213 title "Effect of additives on preparation of vertical holes in Si substrate using metal-assisted chemical etching" @default.
• W2945789213 cites W1622645825 @default.
• W2945789213 cites W1636543212 @default.
• W2945789213 cites W1964087342 @default.
• W2945789213 cites W1971966678 @default.
• W2945789213 cites W1972563478 @default.
• W2945789213 cites W1990356037 @default.
• W2945789213 cites W1995963013 @default.
• W2945789213 cites W1997913942 @default.
• W2945789213 cites W2001741162 @default.
• W2945789213 cites W2009195513 @default.
• W2945789213 cites W2014721931 @default.
• W2945789213 cites W2019108633 @default.
• W2945789213 cites W2032830867 @default.
• W2945789213 cites W2036458080 @default.
• W2945789213 cites W2043431019 @default.
• W2945789213 cites W2069756028 @default.
• W2945789213 cites W2083316642 @default.
• W2945789213 cites W2094915857 @default.
• W2945789213 cites W2099454047 @default.
• W2945789213 cites W2100366177 @default.
• W2945789213 cites W2140529708 @default.
• W2945789213 cites W2155707315 @default.
• W2945789213 cites W2161555133 @default.
• W2945789213 cites W2297361440 @default.
• W2945789213 cites W2556264163 @default.
• W2945789213 cites W2600393565 @default.
• W2945789213 cites W2964811167 @default.
• W2945789213 cites W4233262543 @default.
• W2945789213 cites W4239573994 @default.
• W2945789213 cites W4250364441 @default.
• W2945789213 doi "https://doi.org/10.7567/1347-4065/ab0ff5" @default.
• W2945789213 hasPublicationYear "2019" @default.
• W2945789213 type Work @default.
• W2945789213 sameAs 2945789213 @default.
• W2945789213 citedByCount "5" @default.
• W2945789213 countsByYear W29457892132020 @default.
• W2945789213 countsByYear W29457892132021 @default.
• W2945789213 countsByYear W29457892132022 @default.
• W2945789213 countsByYear W29457892132023 @default.
• W2945789213 crossrefType "journal-article" @default.
• W2945789213 hasAuthorship W2945789213A5016807224 @default.
• W2945789213 hasAuthorship W2945789213A5050728257 @default.
• W2945789213 hasAuthorship W2945789213A5067629492 @default.
• W2945789213 hasAuthorship W2945789213A5071915572 @default.
• W2945789213 hasBestOaLocation W29457892131 @default.
• W2945789213 hasConcept C100460472 @default.
• W2945789213 hasConcept C10138342 @default.
• W2945789213 hasConcept C111368507 @default.
• W2945789213 hasConcept C127313418 @default.
• W2945789213 hasConcept C127413603 @default.
• W2945789213 hasConcept C1291036 @default.
• W2945789213 hasConcept C159985019 @default.
• W2945789213 hasConcept C161790260 @default.
• W2945789213 hasConcept C162324750 @default.
• W2945789213 hasConcept C171250308 @default.
• W2945789213 hasConcept C178790620 @default.
• W2945789213 hasConcept C185592680 @default.
• W2945789213 hasConcept C191897082 @default.
• W2945789213 hasConcept C192562407 @default.
• W2945789213 hasConcept C204366326 @default.
• W2945789213 hasConcept C2776964284 @default.
• W2945789213 hasConcept C2777289219 @default.
• W2945789213 hasConcept C2779227376 @default.
• W2945789213 hasConcept C33220542 @default.
• W2945789213 hasConcept C42360764 @default.
• W2945789213 hasConcept C54400483 @default.
• W2945789213 hasConcept C544153396 @default.
• W2945789213 hasConcept C87210426 @default.
• W2945789213 hasConceptScore W2945789213C100460472 @default.
• W2945789213 hasConceptScore W2945789213C10138342 @default.
• W2945789213 hasConceptScore W2945789213C111368507 @default.
• W2945789213 hasConceptScore W2945789213C127313418 @default.
• W2945789213 hasConceptScore W2945789213C127413603 @default.
• W2945789213 hasConceptScore W2945789213C1291036 @default.
• W2945789213 hasConceptScore W2945789213C159985019 @default.
• W2945789213 hasConceptScore W2945789213C161790260 @default.
• W2945789213 hasConceptScore W2945789213C162324750 @default.
• W2945789213 hasConceptScore W2945789213C171250308 @default.
• W2945789213 hasConceptScore W2945789213C178790620 @default.
• W2945789213 hasConceptScore W2945789213C185592680 @default.
• W2945789213 hasConceptScore W2945789213C191897082 @default.
• W2945789213 hasConceptScore W2945789213C192562407 @default.
• W2945789213 hasConceptScore W2945789213C204366326 @default.
• W2945789213 hasConceptScore W2945789213C2776964284 @default.
• W2945789213 hasConceptScore W2945789213C2777289219 @default.
• W2945789213 hasConceptScore W2945789213C2779227376 @default.
• W2945789213 hasConceptScore W2945789213C33220542 @default.
• W2945789213 hasConceptScore W2945789213C42360764 @default.
• W2945789213 hasConceptScore W2945789213C54400483 @default.

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