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- W2946526832 abstract "Metal-Insulator-Metal (MIM) capacitors are widely used in More-than-Moore technologies, such as RF devices and image sensors. These technologies typically use SiN for the MIM capacitor dielectric, which has good reliability but a relatively low capacitance density. In this report we examine the reliability and performance tradeoffs for a MIM capacitors based on an Al 2 O 3 / SiO 2 dielectrics." @default.
- W2946526832 created "2019-05-29" @default.
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- W2946526832 date "2019-03-01" @default.
- W2946526832 modified "2023-09-26" @default.
- W2946526832 title "Reliability of an Al2O3/SiO2MIM Capacitor for 180nm (3.3V) Technology" @default.
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- W2946526832 doi "https://doi.org/10.1109/irps.2019.8720443" @default.
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