Matches in SemOpenAlex for { <https://semopenalex.org/work/W2947326817> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W2947326817 endingPage "1498" @default.
- W2947326817 startingPage "1495" @default.
- W2947326817 abstract "This paper introduces a phenomenon of the SD bump on the gate layer MoNiTi(bottom)/Cu(top) in GI hole because of the worsening of adhesion between SD layer and gate layer after the copper oxides form on the top copper surface of gate layer. We investigated the relationship of the SD bump with TFT array processes and solved the SD bump issue by reducing the power, gas flow ratio (O 2 /SF 6 ) or O.E.(%) time of GI etching process. Because these changes of GI etching parameter can decrease the amount and lower the energy of O* and S* free radical in GI etching chamber." @default.
- W2947326817 created "2019-06-07" @default.
- W2947326817 creator A5011044465 @default.
- W2947326817 creator A5016219794 @default.
- W2947326817 creator A5019005863 @default.
- W2947326817 creator A5044633814 @default.
- W2947326817 creator A5055987305 @default.
- W2947326817 creator A5058305195 @default.
- W2947326817 creator A5066332067 @default.
- W2947326817 creator A5072842356 @default.
- W2947326817 creator A5080131969 @default.
- W2947326817 creator A5083905041 @default.
- W2947326817 creator A5091771819 @default.
- W2947326817 date "2019-05-29" @default.
- W2947326817 modified "2023-10-16" @default.
- W2947326817 title "P‐70: Resolving Bump Issue on Copper Surface in GI Hole of TFT‐LCDs" @default.
- W2947326817 cites W2026877207 @default.
- W2947326817 cites W2065745021 @default.
- W2947326817 cites W2088786039 @default.
- W2947326817 cites W2118287556 @default.
- W2947326817 cites W2123405230 @default.
- W2947326817 cites W2621111546 @default.
- W2947326817 doi "https://doi.org/10.1002/sdtp.13225" @default.
- W2947326817 hasPublicationYear "2019" @default.
- W2947326817 type Work @default.
- W2947326817 sameAs 2947326817 @default.
- W2947326817 citedByCount "0" @default.
- W2947326817 crossrefType "journal-article" @default.
- W2947326817 hasAuthorship W2947326817A5011044465 @default.
- W2947326817 hasAuthorship W2947326817A5016219794 @default.
- W2947326817 hasAuthorship W2947326817A5019005863 @default.
- W2947326817 hasAuthorship W2947326817A5044633814 @default.
- W2947326817 hasAuthorship W2947326817A5055987305 @default.
- W2947326817 hasAuthorship W2947326817A5058305195 @default.
- W2947326817 hasAuthorship W2947326817A5066332067 @default.
- W2947326817 hasAuthorship W2947326817A5072842356 @default.
- W2947326817 hasAuthorship W2947326817A5080131969 @default.
- W2947326817 hasAuthorship W2947326817A5083905041 @default.
- W2947326817 hasAuthorship W2947326817A5091771819 @default.
- W2947326817 hasConcept C100460472 @default.
- W2947326817 hasConcept C121332964 @default.
- W2947326817 hasConcept C159985019 @default.
- W2947326817 hasConcept C191897082 @default.
- W2947326817 hasConcept C192562407 @default.
- W2947326817 hasConcept C2779227376 @default.
- W2947326817 hasConcept C38349280 @default.
- W2947326817 hasConcept C49040817 @default.
- W2947326817 hasConcept C544778455 @default.
- W2947326817 hasConcept C57879066 @default.
- W2947326817 hasConcept C87359718 @default.
- W2947326817 hasConceptScore W2947326817C100460472 @default.
- W2947326817 hasConceptScore W2947326817C121332964 @default.
- W2947326817 hasConceptScore W2947326817C159985019 @default.
- W2947326817 hasConceptScore W2947326817C191897082 @default.
- W2947326817 hasConceptScore W2947326817C192562407 @default.
- W2947326817 hasConceptScore W2947326817C2779227376 @default.
- W2947326817 hasConceptScore W2947326817C38349280 @default.
- W2947326817 hasConceptScore W2947326817C49040817 @default.
- W2947326817 hasConceptScore W2947326817C544778455 @default.
- W2947326817 hasConceptScore W2947326817C57879066 @default.
- W2947326817 hasConceptScore W2947326817C87359718 @default.
- W2947326817 hasIssue "1" @default.
- W2947326817 hasLocation W29473268171 @default.
- W2947326817 hasOpenAccess W2947326817 @default.
- W2947326817 hasPrimaryLocation W29473268171 @default.
- W2947326817 hasRelatedWork W2014315543 @default.
- W2947326817 hasRelatedWork W2051270029 @default.
- W2947326817 hasRelatedWork W2082293200 @default.
- W2947326817 hasRelatedWork W2137307547 @default.
- W2947326817 hasRelatedWork W2380293314 @default.
- W2947326817 hasRelatedWork W2943188944 @default.
- W2947326817 hasRelatedWork W3008690834 @default.
- W2947326817 hasRelatedWork W3082440218 @default.
- W2947326817 hasRelatedWork W4242480814 @default.
- W2947326817 hasRelatedWork W4285802202 @default.
- W2947326817 hasVolume "50" @default.
- W2947326817 isParatext "false" @default.
- W2947326817 isRetracted "false" @default.
- W2947326817 magId "2947326817" @default.
- W2947326817 workType "article" @default.