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- W2947394414 abstract "Abstract The performance of chemical mechanical polishing (CMP) has been found highly dependent on the pad-workpiece contact status, which is far from theoretical understanding. To this end, a physically-based material removal rate (MRR) model is developed under pad-asperity scale. The theoretical predictions agree well with the experimental results no matter the contact spots distribution is dispersed or concentrated. It is found that the deterioration of MRR is attributed to the continuously reduced number of reacted atoms in each individual contact spot and the inadequate time for chemical reaction between successive contact spots. The present model is expected to facilitate the clarification of the effect of contact status on MRR, and further provide a strategy for CMP mechanisms investigation." @default.
- W2947394414 created "2019-06-07" @default.
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- W2947394414 date "2019-10-01" @default.
- W2947394414 modified "2023-10-17" @default.
- W2947394414 title "Physically-based modeling of pad-asperity scale chemical-mechanical synergy in chemical mechanical polishing" @default.
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- W2947394414 doi "https://doi.org/10.1016/j.triboint.2019.05.046" @default.
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