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• W2947789780 abstract "AlGaN/GaN HEMTs on SiC substrate were fabricated and through-wafer via holes up to 50μm deep were etched by inductively coupled plasma (ICP).The SiC substrate was thinned to 50μm,and 3μm thick Ni mask with openings was patterned followed by SF6/O2 gas mixture etching of SiC substrate.Through-wafer via holes with a slightly sloped via sidewall to facilitate subsequent metal coverage to complete the front-to-back electrical connection were finished by Cl2/BCl3 gas mixture based ICP etching of AlGaN/GaN heterostructure.The method exhibited is suitable for AlGaN/GaN HEMTs and MMICs fabrication." @default.
• W2947789780 created "2019-06-07" @default.
• W2947789780 creator A5018906036 @default.
• W2947789780 creator A5039688076 @default.
• W2947789780 creator A5061126491 @default.
• W2947789780 creator A5063253432 @default.
• W2947789780 creator A5078168143 @default.
• W2947789780 creator A5083864273 @default.
• W2947789780 date "2008-12-09" @default.
• W2947789780 modified "2023-09-22" @default.
• W2947789780 title "Inductively Coupled Plasma via Hole Etching of AlGaN/GaN HEMTs on SiC Substrate" @default.
• W2947789780 hasPublicationYear "2008" @default.
• W2947789780 type Work @default.
• W2947789780 sameAs 2947789780 @default.
• W2947789780 citedByCount "0" @default.
• W2947789780 crossrefType "journal-article" @default.
• W2947789780 hasAuthorship W2947789780A5018906036 @default.
• W2947789780 hasAuthorship W2947789780A5039688076 @default.
• W2947789780 hasAuthorship W2947789780A5061126491 @default.
• W2947789780 hasAuthorship W2947789780A5063253432 @default.
• W2947789780 hasAuthorship W2947789780A5078168143 @default.
• W2947789780 hasAuthorship W2947789780A5083864273 @default.
• W2947789780 hasConcept C100460472 @default.
• W2947789780 hasConcept C107187091 @default.
• W2947789780 hasConcept C111368507 @default.
• W2947789780 hasConcept C119599485 @default.
• W2947789780 hasConcept C121332964 @default.
• W2947789780 hasConcept C127313418 @default.
• W2947789780 hasConcept C127413603 @default.
• W2947789780 hasConcept C1291036 @default.
• W2947789780 hasConcept C136525101 @default.
• W2947789780 hasConcept C142724271 @default.
• W2947789780 hasConcept C159985019 @default.
• W2947789780 hasConcept C160671074 @default.
• W2947789780 hasConcept C162057924 @default.
• W2947789780 hasConcept C165801399 @default.
• W2947789780 hasConcept C171250308 @default.
• W2947789780 hasConcept C172385210 @default.
• W2947789780 hasConcept C192562407 @default.
• W2947789780 hasConcept C204787440 @default.
• W2947789780 hasConcept C2777289219 @default.
• W2947789780 hasConcept C2778871202 @default.
• W2947789780 hasConcept C2779227376 @default.
• W2947789780 hasConcept C2780722187 @default.
• W2947789780 hasConcept C49040817 @default.
• W2947789780 hasConcept C62520636 @default.
• W2947789780 hasConcept C71924100 @default.
• W2947789780 hasConcept C79794668 @default.
• W2947789780 hasConcept C82706917 @default.
• W2947789780 hasConcept C95974651 @default.
• W2947789780 hasConceptScore W2947789780C100460472 @default.
• W2947789780 hasConceptScore W2947789780C107187091 @default.
• W2947789780 hasConceptScore W2947789780C111368507 @default.
• W2947789780 hasConceptScore W2947789780C119599485 @default.
• W2947789780 hasConceptScore W2947789780C121332964 @default.
• W2947789780 hasConceptScore W2947789780C127313418 @default.
• W2947789780 hasConceptScore W2947789780C127413603 @default.
• W2947789780 hasConceptScore W2947789780C1291036 @default.
• W2947789780 hasConceptScore W2947789780C136525101 @default.
• W2947789780 hasConceptScore W2947789780C142724271 @default.
• W2947789780 hasConceptScore W2947789780C159985019 @default.
• W2947789780 hasConceptScore W2947789780C160671074 @default.
• W2947789780 hasConceptScore W2947789780C162057924 @default.
• W2947789780 hasConceptScore W2947789780C165801399 @default.
• W2947789780 hasConceptScore W2947789780C171250308 @default.
• W2947789780 hasConceptScore W2947789780C172385210 @default.
• W2947789780 hasConceptScore W2947789780C192562407 @default.
• W2947789780 hasConceptScore W2947789780C204787440 @default.
• W2947789780 hasConceptScore W2947789780C2777289219 @default.
• W2947789780 hasConceptScore W2947789780C2778871202 @default.
• W2947789780 hasConceptScore W2947789780C2779227376 @default.
• W2947789780 hasConceptScore W2947789780C2780722187 @default.
• W2947789780 hasConceptScore W2947789780C49040817 @default.
• W2947789780 hasConceptScore W2947789780C62520636 @default.
• W2947789780 hasConceptScore W2947789780C71924100 @default.
• W2947789780 hasConceptScore W2947789780C79794668 @default.
• W2947789780 hasConceptScore W2947789780C82706917 @default.
• W2947789780 hasConceptScore W2947789780C95974651 @default.
• W2947789780 hasLocation W29477897801 @default.
• W2947789780 hasOpenAccess W2947789780 @default.
• W2947789780 hasPrimaryLocation W29477897801 @default.
• W2947789780 hasRelatedWork W1765629852 @default.
• W2947789780 hasRelatedWork W2011954319 @default.
• W2947789780 hasRelatedWork W2061208114 @default.
• W2947789780 hasRelatedWork W2088213517 @default.
• W2947789780 hasRelatedWork W2188081293 @default.
• W2947789780 hasRelatedWork W2303473170 @default.
• W2947789780 hasRelatedWork W2823613557 @default.
• W2947789780 hasRelatedWork W2894950078 @default.
• W2947789780 hasRelatedWork W3022013866 @default.
• W2947789780 hasRelatedWork W1992185493 @default.
• W2947789780 hasRelatedWork W2818981941 @default.
• W2947789780 hasRelatedWork W2833330325 @default.
• W2947789780 hasRelatedWork W2839487410 @default.
• W2947789780 hasRelatedWork W2872714459 @default.
• W2947789780 hasRelatedWork W2931912143 @default.
• W2947789780 hasRelatedWork W2942199093 @default.
• W2947789780 hasRelatedWork W2979063077 @default.
• W2947789780 hasRelatedWork W3018864795 @default.
• W2947789780 hasRelatedWork W3019981996 @default.

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