FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2947898051> ?p ?o ?g. }

• W2947898051 abstract "Self-organized plasma structures, called spokes, have been previously reported for continuous and pulsed magnetron discharges. Here, we demonstrate that spokes also form in the oscillatory RF magnetron sputtering (RFMS) regime. We used an intensified charge-coupled device camera and electrical probes to investigate the rotating plasma patterns. The spokes in RFMS were compared to the spokes in classical DC magnetron sputtering (DCMS) at similar discharge conditions. In both regimes, stable plasma patterns were observed for a wide range of discharge parameters. For similar gas pressures and discharge powers, the number of spokes in the RFMS regime was always larger than that in the DCMS regime. The number of spokes changed sequentially when the working gas pressure was increased for both magnetron operations. In the DCMS regime, a single spoke was observed at the lowest argon pressure (0.25 Pa), and a second spoke was observed only at the highest pressure (2 Pa). In the same pressure range, the plasma in the RFMS regime displayed four spokes at the lowest pressure and six or seven spokes at the highest pressure. The influence of discharge power on the number of spokes was less pronounced for both magnetron regimes. We analyzed the spoke patterns by examining the inelastic collisions between electrons and argon atoms. For this purpose, we simulated the dissipation of electron energy in the drift direction and compared the calculations to the length and number of spokes for particular discharge conditions. Overall, the simulations agree well with the observed plasma patterns in DCMS and RFMS." @default.
• W2947898051 created "2019-06-07" @default.
• W2947898051 creator A5067612564 @default.
• W2947898051 date "2019-05-28" @default.
• W2947898051 modified "2023-10-09" @default.
• W2947898051 title "Self-organizing plasma behavior in RF magnetron sputtering discharges" @default.
• W2947898051 cites W1950087651 @default.
• W2947898051 cites W1963708949 @default.
• W2947898051 cites W1967861543 @default.
• W2947898051 cites W1971201268 @default.
• W2947898051 cites W1978644763 @default.
• W2947898051 cites W1979133238 @default.
• W2947898051 cites W1980899127 @default.
• W2947898051 cites W1982063322 @default.
• W2947898051 cites W1985423992 @default.
• W2947898051 cites W1991936615 @default.
• W2947898051 cites W1993176620 @default.
• W2947898051 cites W1995880691 @default.
• W2947898051 cites W1998544721 @default.
• W2947898051 cites W2003044025 @default.
• W2947898051 cites W2007372844 @default.
• W2947898051 cites W2009661921 @default.
• W2947898051 cites W2010137617 @default.
• W2947898051 cites W2012071618 @default.
• W2947898051 cites W2017048033 @default.
• W2947898051 cites W2022349558 @default.
• W2947898051 cites W2027839237 @default.
• W2947898051 cites W2030574468 @default.
• W2947898051 cites W2030936812 @default.
• W2947898051 cites W2036584212 @default.
• W2947898051 cites W2040285553 @default.
• W2947898051 cites W2042414791 @default.
• W2947898051 cites W2047438302 @default.
• W2947898051 cites W2051955688 @default.
• W2947898051 cites W2060004838 @default.
• W2947898051 cites W2065573120 @default.
• W2947898051 cites W2066551385 @default.
• W2947898051 cites W2079902137 @default.
• W2947898051 cites W2087655813 @default.
• W2947898051 cites W2094491269 @default.
• W2947898051 cites W2122689239 @default.
• W2947898051 cites W2143845821 @default.
• W2947898051 cites W2145872827 @default.
• W2947898051 cites W2164232380 @default.
• W2947898051 cites W2169473587 @default.
• W2947898051 cites W2232793693 @default.
• W2947898051 cites W2275033392 @default.
• W2947898051 cites W2319607935 @default.
• W2947898051 cites W2322140368 @default.
• W2947898051 cites W2330547225 @default.
• W2947898051 cites W2468488163 @default.
• W2947898051 cites W2549532332 @default.
• W2947898051 cites W2556461100 @default.
• W2947898051 cites W2586457035 @default.
• W2947898051 cites W2618524637 @default.
• W2947898051 cites W2744468607 @default.
• W2947898051 cites W2782626779 @default.
• W2947898051 cites W3100503259 @default.
• W2947898051 cites W3104938560 @default.
• W2947898051 cites W3106057779 @default.
• W2947898051 doi "https://doi.org/10.1063/1.5094240" @default.
• W2947898051 hasPublicationYear "2019" @default.
• W2947898051 type Work @default.
• W2947898051 sameAs 2947898051 @default.
• W2947898051 citedByCount "19" @default.
• W2947898051 countsByYear W29478980512020 @default.
• W2947898051 countsByYear W29478980512021 @default.
• W2947898051 countsByYear W29478980512022 @default.
• W2947898051 countsByYear W29478980512023 @default.
• W2947898051 crossrefType "journal-article" @default.
• W2947898051 hasAuthorship W2947898051A5067612564 @default.
• W2947898051 hasBestOaLocation W29478980511 @default.
• W2947898051 hasConcept C121332964 @default.
• W2947898051 hasConcept C123408415 @default.
• W2947898051 hasConcept C125989502 @default.
• W2947898051 hasConcept C131097465 @default.
• W2947898051 hasConcept C147120987 @default.
• W2947898051 hasConcept C159985019 @default.
• W2947898051 hasConcept C171250308 @default.
• W2947898051 hasConcept C184779094 @default.
• W2947898051 hasConcept C185544564 @default.
• W2947898051 hasConcept C185592680 @default.
• W2947898051 hasConcept C19067145 @default.
• W2947898051 hasConcept C192562407 @default.
• W2947898051 hasConcept C204323151 @default.
• W2947898051 hasConcept C22423302 @default.
• W2947898051 hasConcept C547737533 @default.
• W2947898051 hasConcept C61427134 @default.
• W2947898051 hasConcept C82706917 @default.
• W2947898051 hasConcept C97355855 @default.
• W2947898051 hasConceptScore W2947898051C121332964 @default.
• W2947898051 hasConceptScore W2947898051C123408415 @default.
• W2947898051 hasConceptScore W2947898051C125989502 @default.
• W2947898051 hasConceptScore W2947898051C131097465 @default.
• W2947898051 hasConceptScore W2947898051C147120987 @default.
• W2947898051 hasConceptScore W2947898051C159985019 @default.
• W2947898051 hasConceptScore W2947898051C171250308 @default.
• W2947898051 hasConceptScore W2947898051C184779094 @default.
• W2947898051 hasConceptScore W2947898051C185544564 @default.
• W2947898051 hasConceptScore W2947898051C185592680 @default.

• next