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- W2948040366 abstract "CVD (Chemical Vapour Deposition) is an advanced technique for depositing a coating on a substrate. CVD implies that a solid phase is deposited on a normally heated substrate surface using a reactiv ..." @default.
- W2948040366 created "2019-06-14" @default.
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- W2948040366 date "2019-01-01" @default.
- W2948040366 modified "2023-09-24" @default.
- W2948040366 title "Muspel and Surtr : CVD system and control program for WF6 chemistry" @default.
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