Matches in SemOpenAlex for { <https://semopenalex.org/work/W2948177579> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W2948177579 endingPage "012019" @default.
- W2948177579 startingPage "012019" @default.
- W2948177579 abstract "Influences of substrate temperature on crystal structure, surface topography and surface morphology of cerium dioxide or ceria (CeO2) thin films deposited using radio frequency (RF) magnetron sputtering were studied. The substrate temperature was varied i.e. room temperature, 100, 200 and 300 °C. The characteristics of the film surface could be controlled by tuning the substrate temperature. As studied in the X-ray diffraction (XRD) analysis, the CeO2 thin films exhibited a cubic fluorite structure with predominant (200) orientation at substrate temperature of room temperature and 200 °C, while (111) preferred orientation at substrate temperature of 100 and 300 °C. The CeO2 films featured uniform surface topography and surface morphology, as observed from the atomic force microscopy and scanning electron microscopy analyses, respectively. The surface roughness and the average grain size of the films fluctuated with increasing substrate temperature. This phenomenon was suggested due to the difference in the preferential orientation of the films as in the XRD analysis." @default.
- W2948177579 created "2019-06-14" @default.
- W2948177579 creator A5021725515 @default.
- W2948177579 creator A5025604593 @default.
- W2948177579 creator A5060769173 @default.
- W2948177579 creator A5075413760 @default.
- W2948177579 date "2019-06-04" @default.
- W2948177579 modified "2023-10-18" @default.
- W2948177579 title "A Study on the Surface of RF Magnetron Sputtered CeO2 Thin Films at Relatively Low Substrate Temperature" @default.
- W2948177579 cites W1971600532 @default.
- W2948177579 cites W1975638588 @default.
- W2948177579 cites W1978878707 @default.
- W2948177579 cites W1979444139 @default.
- W2948177579 cites W1996738435 @default.
- W2948177579 cites W2008373165 @default.
- W2948177579 cites W2030559666 @default.
- W2948177579 cites W2034805534 @default.
- W2948177579 cites W2036640753 @default.
- W2948177579 cites W2043554692 @default.
- W2948177579 cites W2045637874 @default.
- W2948177579 cites W2094928296 @default.
- W2948177579 cites W2119162423 @default.
- W2948177579 cites W2402983996 @default.
- W2948177579 cites W864533251 @default.
- W2948177579 doi "https://doi.org/10.1088/1757-899x/538/1/012019" @default.
- W2948177579 hasPublicationYear "2019" @default.
- W2948177579 type Work @default.
- W2948177579 sameAs 2948177579 @default.
- W2948177579 citedByCount "0" @default.
- W2948177579 crossrefType "journal-article" @default.
- W2948177579 hasAuthorship W2948177579A5021725515 @default.
- W2948177579 hasAuthorship W2948177579A5025604593 @default.
- W2948177579 hasAuthorship W2948177579A5060769173 @default.
- W2948177579 hasAuthorship W2948177579A5075413760 @default.
- W2948177579 hasBestOaLocation W29481775791 @default.
- W2948177579 hasConcept C107365816 @default.
- W2948177579 hasConcept C111368507 @default.
- W2948177579 hasConcept C113196181 @default.
- W2948177579 hasConcept C127313418 @default.
- W2948177579 hasConcept C159985019 @default.
- W2948177579 hasConcept C171250308 @default.
- W2948177579 hasConcept C185592680 @default.
- W2948177579 hasConcept C19067145 @default.
- W2948177579 hasConcept C191897082 @default.
- W2948177579 hasConcept C192191005 @default.
- W2948177579 hasConcept C192562407 @default.
- W2948177579 hasConcept C22423302 @default.
- W2948177579 hasConcept C26771246 @default.
- W2948177579 hasConcept C2777289219 @default.
- W2948177579 hasConcept C43617362 @default.
- W2948177579 hasConcept C523597863 @default.
- W2948177579 hasConcept C61427134 @default.
- W2948177579 hasConceptScore W2948177579C107365816 @default.
- W2948177579 hasConceptScore W2948177579C111368507 @default.
- W2948177579 hasConceptScore W2948177579C113196181 @default.
- W2948177579 hasConceptScore W2948177579C127313418 @default.
- W2948177579 hasConceptScore W2948177579C159985019 @default.
- W2948177579 hasConceptScore W2948177579C171250308 @default.
- W2948177579 hasConceptScore W2948177579C185592680 @default.
- W2948177579 hasConceptScore W2948177579C19067145 @default.
- W2948177579 hasConceptScore W2948177579C191897082 @default.
- W2948177579 hasConceptScore W2948177579C192191005 @default.
- W2948177579 hasConceptScore W2948177579C192562407 @default.
- W2948177579 hasConceptScore W2948177579C22423302 @default.
- W2948177579 hasConceptScore W2948177579C26771246 @default.
- W2948177579 hasConceptScore W2948177579C2777289219 @default.
- W2948177579 hasConceptScore W2948177579C43617362 @default.
- W2948177579 hasConceptScore W2948177579C523597863 @default.
- W2948177579 hasConceptScore W2948177579C61427134 @default.
- W2948177579 hasLocation W29481775791 @default.
- W2948177579 hasOpenAccess W2948177579 @default.
- W2948177579 hasPrimaryLocation W29481775791 @default.
- W2948177579 hasRelatedWork W1995810423 @default.
- W2948177579 hasRelatedWork W2073638793 @default.
- W2948177579 hasRelatedWork W2316948141 @default.
- W2948177579 hasRelatedWork W2373012329 @default.
- W2948177579 hasRelatedWork W2373579184 @default.
- W2948177579 hasRelatedWork W2388714392 @default.
- W2948177579 hasRelatedWork W2526521535 @default.
- W2948177579 hasRelatedWork W2739557535 @default.
- W2948177579 hasRelatedWork W2113878586 @default.
- W2948177579 hasRelatedWork W2188856160 @default.
- W2948177579 hasVolume "538" @default.
- W2948177579 isParatext "false" @default.
- W2948177579 isRetracted "false" @default.
- W2948177579 magId "2948177579" @default.
- W2948177579 workType "article" @default.