Matches in SemOpenAlex for { <https://semopenalex.org/work/W2948376064> ?p ?o ?g. }
- W2948376064 endingPage "137351" @default.
- W2948376064 startingPage "137351" @default.
- W2948376064 abstract "A series of TiOx(0 < x ≤ 2) thin films with different O/Ti ratio were deposited on Si substrates by reactive magnetron sputtering of Ti metal in Ar + O2 plasma. The influence of oxygen flow rate and substrate temperature on the structural, mechanical, and electrical properties of the films was explored. With increasing the oxygen flow rate, the following phases appeared in the following order: Ti metal, Ti(O) solid solution, TiO, Ti2O3, Magnéli phases, rutile and anatase TiO2. With increasing the temperature, the crystallinity, and oxygen content of the films varied, which resulted in changes in film properties. The trend of hardness and electrical conductivity in ceramic TiOx films is TiO > Ti2O3 > Magneli phases > rutile phase." @default.
- W2948376064 created "2019-06-14" @default.
- W2948376064 creator A5010999350 @default.
- W2948376064 creator A5052453618 @default.
- W2948376064 creator A5054991954 @default.
- W2948376064 creator A5065184968 @default.
- W2948376064 date "2019-10-01" @default.
- W2948376064 modified "2023-09-24" @default.
- W2948376064 title "Processing, structure and properties of reactively sputtered films of titanium dioxide and suboxides" @default.
- W2948376064 cites W1975464092 @default.
- W2948376064 cites W1976568077 @default.
- W2948376064 cites W1979787838 @default.
- W2948376064 cites W1984556894 @default.
- W2948376064 cites W1990046987 @default.
- W2948376064 cites W1991404435 @default.
- W2948376064 cites W1998054947 @default.
- W2948376064 cites W1999410817 @default.
- W2948376064 cites W2000785012 @default.
- W2948376064 cites W2001861467 @default.
- W2948376064 cites W2006920511 @default.
- W2948376064 cites W2008612727 @default.
- W2948376064 cites W2010236460 @default.
- W2948376064 cites W2013902219 @default.
- W2948376064 cites W2014707243 @default.
- W2948376064 cites W2017655719 @default.
- W2948376064 cites W2019809578 @default.
- W2948376064 cites W2028643597 @default.
- W2948376064 cites W2033726248 @default.
- W2948376064 cites W2043542423 @default.
- W2948376064 cites W2048893513 @default.
- W2948376064 cites W2054134511 @default.
- W2948376064 cites W2061814269 @default.
- W2948376064 cites W2065307024 @default.
- W2948376064 cites W2066099485 @default.
- W2948376064 cites W2068163474 @default.
- W2948376064 cites W2078226033 @default.
- W2948376064 cites W2083702336 @default.
- W2948376064 cites W2092303427 @default.
- W2948376064 cites W2094487640 @default.
- W2948376064 cites W2102792613 @default.
- W2948376064 cites W2126395700 @default.
- W2948376064 cites W2136577398 @default.
- W2948376064 cites W2149209941 @default.
- W2948376064 cites W2171943099 @default.
- W2948376064 cites W2299129177 @default.
- W2948376064 cites W2324235723 @default.
- W2948376064 cites W2408963440 @default.
- W2948376064 cites W2757093121 @default.
- W2948376064 cites W782538931 @default.
- W2948376064 cites W2020251963 @default.
- W2948376064 cites W2045020042 @default.
- W2948376064 doi "https://doi.org/10.1016/j.tsf.2019.06.001" @default.
- W2948376064 hasPublicationYear "2019" @default.
- W2948376064 type Work @default.
- W2948376064 sameAs 2948376064 @default.
- W2948376064 citedByCount "7" @default.
- W2948376064 countsByYear W29483760642020 @default.
- W2948376064 countsByYear W29483760642021 @default.
- W2948376064 countsByYear W29483760642022 @default.
- W2948376064 countsByYear W29483760642023 @default.
- W2948376064 crossrefType "journal-article" @default.
- W2948376064 hasAuthorship W2948376064A5010999350 @default.
- W2948376064 hasAuthorship W2948376064A5052453618 @default.
- W2948376064 hasAuthorship W2948376064A5054991954 @default.
- W2948376064 hasAuthorship W2948376064A5065184968 @default.
- W2948376064 hasConcept C111368507 @default.
- W2948376064 hasConcept C113196181 @default.
- W2948376064 hasConcept C119599485 @default.
- W2948376064 hasConcept C127313418 @default.
- W2948376064 hasConcept C127413603 @default.
- W2948376064 hasConcept C134132462 @default.
- W2948376064 hasConcept C159985019 @default.
- W2948376064 hasConcept C161790260 @default.
- W2948376064 hasConcept C171250308 @default.
- W2948376064 hasConcept C178790620 @default.
- W2948376064 hasConcept C185592680 @default.
- W2948376064 hasConcept C19067145 @default.
- W2948376064 hasConcept C191897082 @default.
- W2948376064 hasConcept C192562407 @default.
- W2948376064 hasConcept C199289684 @default.
- W2948376064 hasConcept C22423302 @default.
- W2948376064 hasConcept C2777289219 @default.
- W2948376064 hasConcept C2777402863 @default.
- W2948376064 hasConcept C2777593239 @default.
- W2948376064 hasConcept C2777889555 @default.
- W2948376064 hasConcept C42360764 @default.
- W2948376064 hasConcept C43617362 @default.
- W2948376064 hasConcept C44280652 @default.
- W2948376064 hasConcept C46275449 @default.
- W2948376064 hasConcept C506065880 @default.
- W2948376064 hasConcept C540031477 @default.
- W2948376064 hasConcept C55493867 @default.
- W2948376064 hasConcept C61427134 @default.
- W2948376064 hasConcept C65165184 @default.
- W2948376064 hasConcept C69990965 @default.
- W2948376064 hasConceptScore W2948376064C111368507 @default.
- W2948376064 hasConceptScore W2948376064C113196181 @default.
- W2948376064 hasConceptScore W2948376064C119599485 @default.