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- W2948656733 abstract "A full-aperture rapid polishing process (RPP) for efficiently manufacturing of large optics is introduced. The low and mid-spatial frequency errors were suppressed by deterministically conditioning polishing pad and optimizing process parameters." @default.
- W2948656733 created "2019-06-14" @default.
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- W2948656733 date "2019-01-01" @default.
- W2948656733 modified "2023-09-26" @default.
- W2948656733 title "Suppressing surface low and mid-spatial frequency errors of large optics during full-aperture rapid polishing" @default.
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- W2948656733 doi "https://doi.org/10.1364/oft.2019.om3a.2" @default.
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