Matches in SemOpenAlex for { <https://semopenalex.org/work/W2949005463> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W2949005463 abstract "Plasma induced charging is known to cause gate oxide and MIM capacitor reliability degradation. However, the impact of plasma induced charging on metal/via is rarely reported. This paper highlights the importance of built-in-reliability during design of via connections to gate poly. Large gate oxide area per via is shown to impact via resistance and reliability. Thus, it is recommended to ground these via or design gate oxide area per via to be less than 600 $u {mathrm{ m}}^{mathbf {2}}$ to minimize the impact." @default.
- W2949005463 created "2019-06-14" @default.
- W2949005463 creator A5013684392 @default.
- W2949005463 creator A5016948375 @default.
- W2949005463 creator A5035672143 @default.
- W2949005463 creator A5049197292 @default.
- W2949005463 creator A5056130525 @default.
- W2949005463 creator A5081772659 @default.
- W2949005463 date "2018-10-01" @default.
- W2949005463 modified "2023-09-23" @default.
- W2949005463 title "Gate-to-via ratio design for reliability" @default.
- W2949005463 cites W2006194638 @default.
- W2949005463 cites W2046198989 @default.
- W2949005463 cites W2092343500 @default.
- W2949005463 cites W2093441630 @default.
- W2949005463 cites W2096360039 @default.
- W2949005463 doi "https://doi.org/10.1109/iirw.2018.8727091" @default.
- W2949005463 hasPublicationYear "2018" @default.
- W2949005463 type Work @default.
- W2949005463 sameAs 2949005463 @default.
- W2949005463 citedByCount "0" @default.
- W2949005463 crossrefType "proceedings-article" @default.
- W2949005463 hasAuthorship W2949005463A5013684392 @default.
- W2949005463 hasAuthorship W2949005463A5016948375 @default.
- W2949005463 hasAuthorship W2949005463A5035672143 @default.
- W2949005463 hasAuthorship W2949005463A5049197292 @default.
- W2949005463 hasAuthorship W2949005463A5056130525 @default.
- W2949005463 hasAuthorship W2949005463A5081772659 @default.
- W2949005463 hasConcept C119599485 @default.
- W2949005463 hasConcept C121332964 @default.
- W2949005463 hasConcept C127413603 @default.
- W2949005463 hasConcept C131017901 @default.
- W2949005463 hasConcept C152909973 @default.
- W2949005463 hasConcept C163258240 @default.
- W2949005463 hasConcept C165801399 @default.
- W2949005463 hasConcept C172385210 @default.
- W2949005463 hasConcept C191897082 @default.
- W2949005463 hasConcept C192562407 @default.
- W2949005463 hasConcept C200601418 @default.
- W2949005463 hasConcept C2361726 @default.
- W2949005463 hasConcept C2779679103 @default.
- W2949005463 hasConcept C2779851234 @default.
- W2949005463 hasConcept C41008148 @default.
- W2949005463 hasConcept C43214815 @default.
- W2949005463 hasConcept C49040817 @default.
- W2949005463 hasConcept C51140833 @default.
- W2949005463 hasConcept C52192207 @default.
- W2949005463 hasConcept C62520636 @default.
- W2949005463 hasConcept C82706917 @default.
- W2949005463 hasConceptScore W2949005463C119599485 @default.
- W2949005463 hasConceptScore W2949005463C121332964 @default.
- W2949005463 hasConceptScore W2949005463C127413603 @default.
- W2949005463 hasConceptScore W2949005463C131017901 @default.
- W2949005463 hasConceptScore W2949005463C152909973 @default.
- W2949005463 hasConceptScore W2949005463C163258240 @default.
- W2949005463 hasConceptScore W2949005463C165801399 @default.
- W2949005463 hasConceptScore W2949005463C172385210 @default.
- W2949005463 hasConceptScore W2949005463C191897082 @default.
- W2949005463 hasConceptScore W2949005463C192562407 @default.
- W2949005463 hasConceptScore W2949005463C200601418 @default.
- W2949005463 hasConceptScore W2949005463C2361726 @default.
- W2949005463 hasConceptScore W2949005463C2779679103 @default.
- W2949005463 hasConceptScore W2949005463C2779851234 @default.
- W2949005463 hasConceptScore W2949005463C41008148 @default.
- W2949005463 hasConceptScore W2949005463C43214815 @default.
- W2949005463 hasConceptScore W2949005463C49040817 @default.
- W2949005463 hasConceptScore W2949005463C51140833 @default.
- W2949005463 hasConceptScore W2949005463C52192207 @default.
- W2949005463 hasConceptScore W2949005463C62520636 @default.
- W2949005463 hasConceptScore W2949005463C82706917 @default.
- W2949005463 hasLocation W29490054631 @default.
- W2949005463 hasOpenAccess W2949005463 @default.
- W2949005463 hasPrimaryLocation W29490054631 @default.
- W2949005463 hasRelatedWork W1996721837 @default.
- W2949005463 hasRelatedWork W2053078872 @default.
- W2949005463 hasRelatedWork W2062186725 @default.
- W2949005463 hasRelatedWork W2087419950 @default.
- W2949005463 hasRelatedWork W2118683351 @default.
- W2949005463 hasRelatedWork W2137678062 @default.
- W2949005463 hasRelatedWork W2142531470 @default.
- W2949005463 hasRelatedWork W2281124270 @default.
- W2949005463 hasRelatedWork W2290111054 @default.
- W2949005463 hasRelatedWork W2336993850 @default.
- W2949005463 hasRelatedWork W2487233895 @default.
- W2949005463 hasRelatedWork W2526765774 @default.
- W2949005463 hasRelatedWork W2543902693 @default.
- W2949005463 hasRelatedWork W2620793859 @default.
- W2949005463 hasRelatedWork W2980341568 @default.
- W2949005463 hasRelatedWork W3006144294 @default.
- W2949005463 hasRelatedWork W2262728679 @default.
- W2949005463 hasRelatedWork W2266807001 @default.
- W2949005463 hasRelatedWork W2409704746 @default.
- W2949005463 hasRelatedWork W2462050895 @default.
- W2949005463 isParatext "false" @default.
- W2949005463 isRetracted "false" @default.
- W2949005463 magId "2949005463" @default.
- W2949005463 workType "article" @default.