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- W2949635818 abstract "Dialkylamide von Ti, Zr, Nb und Ta zersetzen sich zwischen 300 und 500°C zu Nitriden, während die Dialkylamide von B, Si und Sn bei höheren Temperaturen metallische Abscheidungen liefern." @default.
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- W2949635818 date "1976-02-10" @default.
- W2949635818 modified "2023-10-18" @default.
- W2949635818 title "ChemInform Abstract: LOW TEMPERATURE DEPOSITION OF METAL NITRIDES BY THERMAL DECOMPOSITION OF ORGANOMETALLIC COMPOUNDS" @default.
- W2949635818 cites W1989705149 @default.
- W2949635818 doi "https://doi.org/10.1002/chin.197606024" @default.
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