Matches in SemOpenAlex for { <https://semopenalex.org/work/W2949682596> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W2949682596 endingPage "no" @default.
- W2949682596 startingPage "no" @default.
- W2949682596 abstract "TiN films were reactively deposited from a Ti nozzle by an RF plasma jet. At power >100 W the optical emission from Ti measured in the plasma jet channel is significantly higher for 0.4% content of nitrogen in the argon than for pure argon. Extreme enhancement of the TiN deposition rate at 0.4% content of nitrogen with respect to Ti film growth rate was observed. At 180 W the film growth rate of TiN of 1,850 nm/min was achieved, which is 30 times higher than the deposition rate of Ti at similar deposition conditions." @default.
- W2949682596 created "2019-06-27" @default.
- W2949682596 creator A5033766171 @default.
- W2949682596 creator A5037527063 @default.
- W2949682596 creator A5061711438 @default.
- W2949682596 date "2010-08-19" @default.
- W2949682596 modified "2023-10-18" @default.
- W2949682596 title "ChemInform Abstract: Enhancement of the Reactive Deposition Rate of TiN Films at Low Nitrogen Content." @default.
- W2949682596 cites W2027131258 @default.
- W2949682596 doi "https://doi.org/10.1002/chin.199415033" @default.
- W2949682596 hasPublicationYear "2010" @default.
- W2949682596 type Work @default.
- W2949682596 sameAs 2949682596 @default.
- W2949682596 citedByCount "0" @default.
- W2949682596 crossrefType "journal-article" @default.
- W2949682596 hasAuthorship W2949682596A5033766171 @default.
- W2949682596 hasAuthorship W2949682596A5037527063 @default.
- W2949682596 hasAuthorship W2949682596A5061711438 @default.
- W2949682596 hasConcept C107872376 @default.
- W2949682596 hasConcept C113196181 @default.
- W2949682596 hasConcept C119947313 @default.
- W2949682596 hasConcept C121332964 @default.
- W2949682596 hasConcept C151730666 @default.
- W2949682596 hasConcept C178790620 @default.
- W2949682596 hasConcept C185592680 @default.
- W2949682596 hasConcept C2816523 @default.
- W2949682596 hasConcept C525849907 @default.
- W2949682596 hasConcept C537208039 @default.
- W2949682596 hasConcept C547737533 @default.
- W2949682596 hasConcept C56200935 @default.
- W2949682596 hasConcept C62520636 @default.
- W2949682596 hasConcept C64297162 @default.
- W2949682596 hasConcept C82706917 @default.
- W2949682596 hasConcept C86803240 @default.
- W2949682596 hasConcept C97355855 @default.
- W2949682596 hasConceptScore W2949682596C107872376 @default.
- W2949682596 hasConceptScore W2949682596C113196181 @default.
- W2949682596 hasConceptScore W2949682596C119947313 @default.
- W2949682596 hasConceptScore W2949682596C121332964 @default.
- W2949682596 hasConceptScore W2949682596C151730666 @default.
- W2949682596 hasConceptScore W2949682596C178790620 @default.
- W2949682596 hasConceptScore W2949682596C185592680 @default.
- W2949682596 hasConceptScore W2949682596C2816523 @default.
- W2949682596 hasConceptScore W2949682596C525849907 @default.
- W2949682596 hasConceptScore W2949682596C537208039 @default.
- W2949682596 hasConceptScore W2949682596C547737533 @default.
- W2949682596 hasConceptScore W2949682596C56200935 @default.
- W2949682596 hasConceptScore W2949682596C62520636 @default.
- W2949682596 hasConceptScore W2949682596C64297162 @default.
- W2949682596 hasConceptScore W2949682596C82706917 @default.
- W2949682596 hasConceptScore W2949682596C86803240 @default.
- W2949682596 hasConceptScore W2949682596C97355855 @default.
- W2949682596 hasIssue "15" @default.
- W2949682596 hasLocation W29496825961 @default.
- W2949682596 hasOpenAccess W2949682596 @default.
- W2949682596 hasPrimaryLocation W29496825961 @default.
- W2949682596 hasRelatedWork W1989880548 @default.
- W2949682596 hasRelatedWork W1994247020 @default.
- W2949682596 hasRelatedWork W1997848678 @default.
- W2949682596 hasRelatedWork W2013680275 @default.
- W2949682596 hasRelatedWork W2027131258 @default.
- W2949682596 hasRelatedWork W2039145399 @default.
- W2949682596 hasRelatedWork W2040618728 @default.
- W2949682596 hasRelatedWork W2050663135 @default.
- W2949682596 hasRelatedWork W2070914519 @default.
- W2949682596 hasRelatedWork W2075157762 @default.
- W2949682596 hasRelatedWork W2077004276 @default.
- W2949682596 hasRelatedWork W2093141452 @default.
- W2949682596 hasRelatedWork W2120802747 @default.
- W2949682596 hasRelatedWork W2321690658 @default.
- W2949682596 hasRelatedWork W2332581835 @default.
- W2949682596 hasRelatedWork W2510482050 @default.
- W2949682596 hasRelatedWork W2766950180 @default.
- W2949682596 hasRelatedWork W3102095725 @default.
- W2949682596 hasRelatedWork W3143784647 @default.
- W2949682596 hasRelatedWork W864268202 @default.
- W2949682596 hasVolume "25" @default.
- W2949682596 isParatext "false" @default.
- W2949682596 isRetracted "false" @default.
- W2949682596 magId "2949682596" @default.
- W2949682596 workType "article" @default.