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- W2949944209 abstract "This paper concerns a new design of RF MEMS switch combined with an innovative process which enable low actuation voltage (<5V) and avoid stiction. First, the structure described with principal design issues, the corresponding anti-stiction system is presented and FEM simulations are done. Then, a short description of the process flow based on two non polymer sacrificial layers. Finally, RF measurements are presented and preliminary experimental protocol and results of anti-stiction validation is detailed. Resulting RF performances are -30dB of isolation and -0.45dB of insertion loss at 10 GHz." @default.
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- W2949944209 date "2008-04-01" @default.
- W2949944209 modified "2023-10-18" @default.
- W2949944209 title "Low Voltage Totally Free Flexible RF MEMS Switch With Anti-Stiction System" @default.
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