FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2949969482> ?p ?o ?g. }

• W2949969482 abstract "Adhesive wafer bonding using laminated photo-sensitive dry-resist offers many advantages and can be used to realize advanced, CMOS integrated, volume manufacturable lab-on-a-chip devices. The relatively low bond temperatures involved allow the wafer-level hybrid integration of a range of substrates, e.g., CMOS wafers with structured MEMS glass wafers. The dry-film polymer acts as the adhesive interlayer and can also be lithographically patterned to form sealed microfluidic fluid-channels and chambers after the bonding process." @default.
• W2949969482 created "2019-06-27" @default.
• W2949969482 creator A5011529050 @default.
• W2949969482 creator A5014468552 @default.
• W2949969482 creator A5056459599 @default.
• W2949969482 creator A5089436144 @default.
• W2949969482 date "2019-05-01" @default.
• W2949969482 modified "2023-10-04" @default.
• W2949969482 title "Adhesive Wafer Bonding for CMOS based Lab-on-a-Chip Devices" @default.
• W2949969482 cites W1911315423 @default.
• W2949969482 cites W1973048096 @default.
• W2949969482 cites W1974565277 @default.
• W2949969482 cites W2009948709 @default.
• W2949969482 cites W2018018298 @default.
• W2949969482 cites W2023923307 @default.
• W2949969482 cites W2025519092 @default.
• W2949969482 cites W2031823178 @default.
• W2949969482 cites W2039235747 @default.
• W2949969482 cites W2040946508 @default.
• W2949969482 cites W2047021260 @default.
• W2949969482 cites W2054362192 @default.
• W2949969482 cites W2078446036 @default.
• W2949969482 cites W2086187432 @default.
• W2949969482 cites W2086364932 @default.
• W2949969482 cites W2087467085 @default.
• W2949969482 cites W2089731238 @default.
• W2949969482 cites W2106342535 @default.
• W2949969482 cites W2111267412 @default.
• W2949969482 cites W2125538249 @default.
• W2949969482 cites W2152255152 @default.
• W2949969482 cites W2154010883 @default.
• W2949969482 cites W2159492645 @default.
• W2949969482 cites W2160501566 @default.
• W2949969482 cites W216508767 @default.
• W2949969482 cites W2219522269 @default.
• W2949969482 cites W2746195036 @default.
• W2949969482 cites W2751102597 @default.
• W2949969482 cites W2796376725 @default.
• W2949969482 cites W2797506008 @default.
• W2949969482 cites W2891408684 @default.
• W2949969482 cites W2897052423 @default.
• W2949969482 cites W603192908 @default.
• W2949969482 doi "https://doi.org/10.23919/ltb-3d.2019.8735114" @default.
• W2949969482 hasPublicationYear "2019" @default.
• W2949969482 type Work @default.
• W2949969482 sameAs 2949969482 @default.
• W2949969482 citedByCount "1" @default.
• W2949969482 countsByYear W29499694822019 @default.
• W2949969482 crossrefType "proceedings-article" @default.
• W2949969482 hasAuthorship W2949969482A5011529050 @default.
• W2949969482 hasAuthorship W2949969482A5014468552 @default.
• W2949969482 hasAuthorship W2949969482A5056459599 @default.
• W2949969482 hasAuthorship W2949969482A5089436144 @default.
• W2949969482 hasConcept C119599485 @default.
• W2949969482 hasConcept C126355924 @default.
• W2949969482 hasConcept C127413603 @default.
• W2949969482 hasConcept C160671074 @default.
• W2949969482 hasConcept C165005293 @default.
• W2949969482 hasConcept C165013422 @default.
• W2949969482 hasConcept C171250308 @default.
• W2949969482 hasConcept C192562407 @default.
• W2949969482 hasConcept C2778638305 @default.
• W2949969482 hasConcept C2779133538 @default.
• W2949969482 hasConcept C2779227376 @default.
• W2949969482 hasConcept C37977207 @default.
• W2949969482 hasConcept C46362747 @default.
• W2949969482 hasConcept C49040817 @default.
• W2949969482 hasConcept C53524968 @default.
• W2949969482 hasConcept C68928338 @default.
• W2949969482 hasConcept C8673954 @default.
• W2949969482 hasConceptScore W2949969482C119599485 @default.
• W2949969482 hasConceptScore W2949969482C126355924 @default.
• W2949969482 hasConceptScore W2949969482C127413603 @default.
• W2949969482 hasConceptScore W2949969482C160671074 @default.
• W2949969482 hasConceptScore W2949969482C165005293 @default.
• W2949969482 hasConceptScore W2949969482C165013422 @default.
• W2949969482 hasConceptScore W2949969482C171250308 @default.
• W2949969482 hasConceptScore W2949969482C192562407 @default.
• W2949969482 hasConceptScore W2949969482C2778638305 @default.
• W2949969482 hasConceptScore W2949969482C2779133538 @default.
• W2949969482 hasConceptScore W2949969482C2779227376 @default.
• W2949969482 hasConceptScore W2949969482C37977207 @default.
• W2949969482 hasConceptScore W2949969482C46362747 @default.
• W2949969482 hasConceptScore W2949969482C49040817 @default.
• W2949969482 hasConceptScore W2949969482C53524968 @default.
• W2949969482 hasConceptScore W2949969482C68928338 @default.
• W2949969482 hasConceptScore W2949969482C8673954 @default.
• W2949969482 hasLocation W29499694821 @default.
• W2949969482 hasOpenAccess W2949969482 @default.
• W2949969482 hasPrimaryLocation W29499694821 @default.
• W2949969482 hasRelatedWork W1492229509 @default.
• W2949969482 hasRelatedWork W1604121550 @default.
• W2949969482 hasRelatedWork W2026096961 @default.
• W2949969482 hasRelatedWork W2063997516 @default.
• W2949969482 hasRelatedWork W2069753296 @default.
• W2949969482 hasRelatedWork W2081367672 @default.
• W2949969482 hasRelatedWork W2116716825 @default.
• W2949969482 hasRelatedWork W2134346907 @default.
• W2949969482 hasRelatedWork W2172095933 @default.
• W2949969482 hasRelatedWork W219958277 @default.

• next