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- W2950052879 abstract "For decades, globular black-white catalytic gas sensor has the problems of handmade, large element dispersion and matching difficulty. To solve these problems, with combination of silicon-based MEMS technology and nanometer technology, an idea of integrating sensitive components of catalytic sensors and compensation components together into a chip is proposed. $gamma$-Al 2 O 3 /ZrO 2 active carriers are created using chemical co-precipitation method and stabilization modification with ThO 2 +CeO 2 using doping technology (Pd and Pt as catalysts). In order to fabricate catalytic gas sensors with integration, sensor chip and heat sensitive electrode are manufactured by silicon MEMS and high pure platinum film production process so that the catalytic sensitive elements and temperature-humidity compensating element can be integrated on micro bridge. The results show that the sensor has a fast response to methane gas, with 90% response time of 10s and recovery time of 12s. The average sensitivity of the sensor output is 15mv/1%CH 4 ." @default.
- W2950052879 created "2019-06-27" @default.
- W2950052879 creator A5003850660 @default.
- W2950052879 creator A5017630846 @default.
- W2950052879 creator A5038755121 @default.
- W2950052879 creator A5052541540 @default.
- W2950052879 date "2019-03-01" @default.
- W2950052879 modified "2023-09-24" @default.
- W2950052879 title "Study on Single Chip Integrated Methane Sensor based on MEMS Process" @default.
- W2950052879 cites W2049984025 @default.
- W2950052879 cites W2070949086 @default.
- W2950052879 cites W2350160188 @default.
- W2950052879 doi "https://doi.org/10.1109/itnec.2019.8729394" @default.
- W2950052879 hasPublicationYear "2019" @default.
- W2950052879 type Work @default.
- W2950052879 sameAs 2950052879 @default.
- W2950052879 citedByCount "0" @default.
- W2950052879 crossrefType "proceedings-article" @default.
- W2950052879 hasAuthorship W2950052879A5003850660 @default.
- W2950052879 hasAuthorship W2950052879A5017630846 @default.
- W2950052879 hasAuthorship W2950052879A5038755121 @default.
- W2950052879 hasAuthorship W2950052879A5052541540 @default.
- W2950052879 hasConcept C119599485 @default.
- W2950052879 hasConcept C127413603 @default.
- W2950052879 hasConcept C151054161 @default.
- W2950052879 hasConcept C161790260 @default.
- W2950052879 hasConcept C165005293 @default.
- W2950052879 hasConcept C171250308 @default.
- W2950052879 hasConcept C178790620 @default.
- W2950052879 hasConcept C185592680 @default.
- W2950052879 hasConcept C192562407 @default.
- W2950052879 hasConcept C24326235 @default.
- W2950052879 hasConcept C37977207 @default.
- W2950052879 hasConcept C49040817 @default.
- W2950052879 hasConcept C516920438 @default.
- W2950052879 hasConcept C544956773 @default.
- W2950052879 hasConcept C55493867 @default.
- W2950052879 hasConceptScore W2950052879C119599485 @default.
- W2950052879 hasConceptScore W2950052879C127413603 @default.
- W2950052879 hasConceptScore W2950052879C151054161 @default.
- W2950052879 hasConceptScore W2950052879C161790260 @default.
- W2950052879 hasConceptScore W2950052879C165005293 @default.
- W2950052879 hasConceptScore W2950052879C171250308 @default.
- W2950052879 hasConceptScore W2950052879C178790620 @default.
- W2950052879 hasConceptScore W2950052879C185592680 @default.
- W2950052879 hasConceptScore W2950052879C192562407 @default.
- W2950052879 hasConceptScore W2950052879C24326235 @default.
- W2950052879 hasConceptScore W2950052879C37977207 @default.
- W2950052879 hasConceptScore W2950052879C49040817 @default.
- W2950052879 hasConceptScore W2950052879C516920438 @default.
- W2950052879 hasConceptScore W2950052879C544956773 @default.
- W2950052879 hasConceptScore W2950052879C55493867 @default.
- W2950052879 hasLocation W29500528791 @default.
- W2950052879 hasOpenAccess W2950052879 @default.
- W2950052879 hasPrimaryLocation W29500528791 @default.
- W2950052879 hasRelatedWork W1539500908 @default.
- W2950052879 hasRelatedWork W1975926196 @default.
- W2950052879 hasRelatedWork W2041502422 @default.
- W2950052879 hasRelatedWork W2051140281 @default.
- W2950052879 hasRelatedWork W2058222212 @default.
- W2950052879 hasRelatedWork W2083967912 @default.
- W2950052879 hasRelatedWork W2112310196 @default.
- W2950052879 hasRelatedWork W2112672784 @default.
- W2950052879 hasRelatedWork W2126930917 @default.
- W2950052879 hasRelatedWork W2943636945 @default.
- W2950052879 hasRelatedWork W3201599999 @default.
- W2950052879 hasRelatedWork W2155842017 @default.
- W2950052879 hasRelatedWork W2603232473 @default.
- W2950052879 hasRelatedWork W2606287808 @default.
- W2950052879 hasRelatedWork W2819222842 @default.
- W2950052879 hasRelatedWork W2823335075 @default.
- W2950052879 hasRelatedWork W2871526041 @default.
- W2950052879 hasRelatedWork W2925735663 @default.
- W2950052879 hasRelatedWork W2930406144 @default.
- W2950052879 hasRelatedWork W2930929844 @default.
- W2950052879 isParatext "false" @default.
- W2950052879 isRetracted "false" @default.
- W2950052879 magId "2950052879" @default.
- W2950052879 workType "article" @default.