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- W2950408100 abstract "We describe a wafer prober integrated with an optical probe for wafer-level inspection of photonic integrated circuits. The design of the electric and photonic circuit was optimized for wafer-level inspection. The customized prober and circuit design enabled us to perform high-volume and high-speed inspection of over 400 elements, and sufficiently reliable results were obtained. It took about 10 sec. to evaluate the propagation loss of an element. This technology will be a key to reducing the costs of photonic devices." @default.
- W2950408100 created "2019-06-27" @default.
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- W2950408100 date "2019-06-21" @default.
- W2950408100 modified "2023-10-02" @default.
- W2950408100 title "Wafer-level inspection platform on high-volume photonic integrated circuits for drastic reduction of testing time" @default.
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- W2950408100 doi "https://doi.org/10.1117/12.2527382" @default.
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