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- W2950528856 abstract "This article gives a condensed review of the MEMS actuators that have seen light in the past three decades. Since the electrostatic drive comes almost natural when creating mechanical devices with the available MEMS technology, greater importance is highlighted. Nevertheless, by introducing more non-IC related materials, other devices are presented, and range from magnetic and piezo-electric drive, to applications based on hydraulics and pneumatic actuation." @default.
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- W2950528856 date "2019-08-01" @default.
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- W2950528856 title "Actuators: Accomplishments, opportunities and challenges" @default.
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- W2950528856 doi "https://doi.org/10.1016/j.sna.2019.05.048" @default.
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