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- W2950821215 abstract "It is demonstrated, that the thermal oxidation of silicon, which is one of the important processing steps in the fabrication of integrated circuit devices, can be enhanced without introducing additional impurities." @default.
- W2950821215 created "2019-06-27" @default.
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- W2950821215 date "1989-12-26" @default.
- W2950821215 modified "2023-09-23" @default.
- W2950821215 title "ChemInform Abstract: Enhancement in Thermal Oxidation of Silicon by Ozone." @default.
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- W2950821215 doi "https://doi.org/10.1002/chin.198952344" @default.
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