Matches in SemOpenAlex for { <https://semopenalex.org/work/W2951422007> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W2951422007 abstract "ULSI quality silicon epitaxial films as thin as 0.6 μm have been grown using dichlorosilane at temperatures as low as 850 o C and pressures as low as 10 torr in commercially available cylindrical epi reactors. Removal of the substrate surface native oxide by a 5 min hydrogen bake has been observed down to 850 o C, 10 torr. In addition, very low defect levels and excellent device characteristics have been measured in the epitaxial films. The results were observed on both 125 and 200 mm substrates" @default.
- W2951422007 created "2019-06-27" @default.
- W2951422007 creator A5003376018 @default.
- W2951422007 creator A5003681927 @default.
- W2951422007 creator A5017082902 @default.
- W2951422007 creator A5029922509 @default.
- W2951422007 creator A5045778102 @default.
- W2951422007 creator A5046662166 @default.
- W2951422007 creator A5069430337 @default.
- W2951422007 creator A5077667483 @default.
- W2951422007 date "1990-09-11" @default.
- W2951422007 modified "2023-09-25" @default.
- W2951422007 title "ChemInform Abstract: ULSI Quality Silicon Epitaxial Growth at 850 °C." @default.
- W2951422007 cites W1982864195 @default.
- W2951422007 doi "https://doi.org/10.1002/chin.199037341" @default.
- W2951422007 hasPublicationYear "1990" @default.
- W2951422007 type Work @default.
- W2951422007 sameAs 2951422007 @default.
- W2951422007 citedByCount "0" @default.
- W2951422007 crossrefType "journal-article" @default.
- W2951422007 hasAuthorship W2951422007A5003376018 @default.
- W2951422007 hasAuthorship W2951422007A5003681927 @default.
- W2951422007 hasAuthorship W2951422007A5017082902 @default.
- W2951422007 hasAuthorship W2951422007A5029922509 @default.
- W2951422007 hasAuthorship W2951422007A5045778102 @default.
- W2951422007 hasAuthorship W2951422007A5046662166 @default.
- W2951422007 hasAuthorship W2951422007A5069430337 @default.
- W2951422007 hasAuthorship W2951422007A5077667483 @default.
- W2951422007 hasConcept C107872376 @default.
- W2951422007 hasConcept C110738630 @default.
- W2951422007 hasConcept C111368507 @default.
- W2951422007 hasConcept C113196181 @default.
- W2951422007 hasConcept C121332964 @default.
- W2951422007 hasConcept C127313418 @default.
- W2951422007 hasConcept C178790620 @default.
- W2951422007 hasConcept C185592680 @default.
- W2951422007 hasConcept C192562407 @default.
- W2951422007 hasConcept C2777289219 @default.
- W2951422007 hasConcept C2779227376 @default.
- W2951422007 hasConcept C2779523567 @default.
- W2951422007 hasConcept C2779851234 @default.
- W2951422007 hasConcept C30646810 @default.
- W2951422007 hasConcept C49040817 @default.
- W2951422007 hasConcept C512968161 @default.
- W2951422007 hasConcept C544956773 @default.
- W2951422007 hasConcept C97355855 @default.
- W2951422007 hasConceptScore W2951422007C107872376 @default.
- W2951422007 hasConceptScore W2951422007C110738630 @default.
- W2951422007 hasConceptScore W2951422007C111368507 @default.
- W2951422007 hasConceptScore W2951422007C113196181 @default.
- W2951422007 hasConceptScore W2951422007C121332964 @default.
- W2951422007 hasConceptScore W2951422007C127313418 @default.
- W2951422007 hasConceptScore W2951422007C178790620 @default.
- W2951422007 hasConceptScore W2951422007C185592680 @default.
- W2951422007 hasConceptScore W2951422007C192562407 @default.
- W2951422007 hasConceptScore W2951422007C2777289219 @default.
- W2951422007 hasConceptScore W2951422007C2779227376 @default.
- W2951422007 hasConceptScore W2951422007C2779523567 @default.
- W2951422007 hasConceptScore W2951422007C2779851234 @default.
- W2951422007 hasConceptScore W2951422007C30646810 @default.
- W2951422007 hasConceptScore W2951422007C49040817 @default.
- W2951422007 hasConceptScore W2951422007C512968161 @default.
- W2951422007 hasConceptScore W2951422007C544956773 @default.
- W2951422007 hasConceptScore W2951422007C97355855 @default.
- W2951422007 hasLocation W29514220071 @default.
- W2951422007 hasOpenAccess W2951422007 @default.
- W2951422007 hasPrimaryLocation W29514220071 @default.
- W2951422007 hasRelatedWork W1976582962 @default.
- W2951422007 hasRelatedWork W1982864195 @default.
- W2951422007 hasRelatedWork W1992512413 @default.
- W2951422007 hasRelatedWork W2016365268 @default.
- W2951422007 hasRelatedWork W2018822425 @default.
- W2951422007 hasRelatedWork W2027678411 @default.
- W2951422007 hasRelatedWork W2030103603 @default.
- W2951422007 hasRelatedWork W2049451674 @default.
- W2951422007 hasRelatedWork W2049724816 @default.
- W2951422007 hasRelatedWork W2062522449 @default.
- W2951422007 hasRelatedWork W2074456044 @default.
- W2951422007 hasRelatedWork W2075067234 @default.
- W2951422007 hasRelatedWork W2077626882 @default.
- W2951422007 hasRelatedWork W2082467386 @default.
- W2951422007 hasRelatedWork W2088619765 @default.
- W2951422007 hasRelatedWork W2093797078 @default.
- W2951422007 hasRelatedWork W2142341975 @default.
- W2951422007 hasRelatedWork W2296764675 @default.
- W2951422007 hasRelatedWork W3201221156 @default.
- W2951422007 hasRelatedWork W2133930168 @default.
- W2951422007 isParatext "false" @default.
- W2951422007 isRetracted "false" @default.
- W2951422007 magId "2951422007" @default.
- W2951422007 workType "article" @default.